Abstract Evaporation cell for a liquid compound suitable for molecular jet epitaxy on a substrate from a compound which is liquid at ambient temperature and which comprises in per se known manner a cell containing said liquid compound in a main ultravacuum enclosure, the cell being provided with heating means. It comprises a preliminary vacuum enclosure tightly connected to the main enclosure and having a first opening provided with a valve and a pipe for forming and regulating the preliminary vacuum in the preliminary vacuum enclosure, an upwardly oriented second opening linked with a chamber containing a large free surface area reservoir for receiving a liquid compound stock, as well as a third downwardly oriented opening linked with a disassemblable reservoir for emptying the liquid compound, while in the preliminary vacuum enclosure is provided a three-way cock connecting the cell containing the liquid compound either to the large surface reservoir, or to the disassemblable reservoir.
An evaporation cell device for a liquid compound suitable for molecular jet epitaxy on a substrate from a compound which is liquid at ambient temperature, said device comprising: a main ultravacuum enclosure; an evaporation cell in said main ultravacuum enclosure and having a predetermined free surface area; heating means in said enclosure for bringing about emission of the molecular jet from the cell so as to be directed onto the substrate; a preliminary vacuum enclosure tightly connected to the main ultravacuum enclosure and having: a first opening provided with a valve and a pipe for forming and regulating a preliminary vacuum in said preliminary vacuum enclosure; a second, upwardly oriented opening connected to a chamber containing a first reservoir of a relatively large free surface area compared with that of said cell, for receiving a liquid compound stock; and a third, downwardly oriented opening connected to a second, disassemblable reservoir for emptying the liquid compound; and a three-way cock in said preliminary vacuum enclosure for connecting the cell selectively to the first or to the second reservoir.
Claim 2
Dependent Claim
177 words
An evaporation cell device for a liquid compound suitable for molecular jet epitaxy on a substrate from a compound which is liquid at ambient temperature, said device comprising: a main ultravacuum enclosure; an evaporation cell in said main ultravacuum enclosure and having a predetermined free surface area; heating means in said enclosure for bringing about emission of the molecular jet from the cell so as to be directed onto the substrate; a preliminary vacuum enclosure tightly connected to the main ultravacuum enclosure and having: a first opening provided with a valve and a pipe for forming and regulating a preliminary vacuum in said preliminary vacuum enclosure; a second, upwardly oriented opening connected to a chamber containing a first reservoir of a relatively large free surface area compared with that of said cell, for receiving a liquid compound stock; and a third, downwardly oriented opening connected to a second, disassemblable reservoir for emptying the liquid compound; and a three-way cock in said preliminary vacuum enclosure for connecting the cell selectively to the first or to the second reservoir.
Claim 3
Dependent Claim
24 words
An evaporation cell device according to claim 1, wherein the chamber is connected by a valve to an introduction lock equipped with a reservoir.