US4600469A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for polishing detector material
Assignee: Honeywell Inc
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Filing: 1984-12-21
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Granted: 1986-07-15
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Expires: 2004-12-21
Abstract
Abstract A method for chemically-mechanically polishing detector material such as mercury cadmium telluride (HgCdTe) to obtain damage free surfaces. The polishing system includes a potassium-iodine iodide in a deionized water base, in combination with an inert lubricant, such as ethylene glycol, and a semisoft porous polishing pad made from, for example, an expanded polyurethane material.
Inventors
- 👤 Albert J. Fusco
- 👤 Bruce C. Cochran
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 13:59
CPC Classifications
H; H10; H10P; H10P50/00; H10D; H10D62/00; H10D62/80; H10D62/86; H10D62/862
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
88 words
A method for the chemical-mechanical polishing of the surface of detector material to a high degree of planarity and surface quality, said method comprising the steps of: A. maintaining said material surface continuously wet with an excess quantity of an aqueous solution comprising potassium-iodine iodide in deionized water; and B. continuously wiping said material surface with a firm surface, using moderate pressure, while maintaining a relative movement between said material surface and said firm surface in order to remove material from the high points of said material surface.
Claim 2
Independent Claim
88 words
A method for the chemical-mechanical polishing of the surface of detector material to a high degree of planarity and surface quality, said method comprising the steps of: A. maintaining said material surface continuously wet with an excess quantity of an aqueous solution comprising potassium-iodine iodide in deionized water; and B. continuously wiping said material surface with a firm surface, using moderate pressure, while maintaining a relative movement between said material surface and said firm surface in order to remove material from the high points of said material surface.
Claim 3
Dependent Claim
15 words
A method as in claim 1 wherein said detector material is mercury cadmium telluride (HgCdTe).
Claim 4
Dependent Claim
20 words
A method as in claim 2 wherein said potassium-iodine iodide concentration in said deionized water is approximately fifty percent (50%).
Claim 5
Dependent Claim
23 words
A method as in claim 3 wherein said moderate pressure is between 150 and 300 grams per square inch of said material surface.
Claim 6
Dependent Claim
28 words
A method as in claim 3 wherein said relative movement between said material surface and said firm surface occurs at a rate of approximately 180 inches per minute.
Claim 7
Dependent Claim
19 words
A method as in claim 2 wherein said firm surface further comprises a semiporous, stiff, low-nap, low abrasive material.
Claim 8
Dependent Claim
15 words
A method as in claim 2 wherein said firm surface comprises an expanded polyurethane pad.
Claim 9
Dependent Claim
27 words
A method as in claim 2 wherein said method further comprises the step of thoroughly wetting said pad with ethylene glycol, as well as said aqueous solution.
Claim 10
Dependent Claim
12 words
A method as in claim 1 wherein said detector material is monocrystalline.
Claim 11
Dependent Claim
12 words
A method as in claim 1 wherein said detector material is polycrystalline.
Claim 12
Independent Claim
109 words
A method for the chemical-mechanical polishing of mercury cadmium telluride (HgCdTe) surface to a high degree of planarity and surface quality, said method comprising the steps of: A. maintaining said HgCdTe surface continuously wet with an excess quantity of an aqueous solution comprising potassium-iodine iodide in deionized water, wherein said potassium-iodine iodide concentration in said deionized water is selected to provide optimum removal rate while maintaining surface quality; and B. continuously wiping said HgCdTe surface with a firm surface, using moderate pressure, while maintaining a relative movement between said HgCdTe surface and said firm surface in order to remove HgCdTe material from the high points of said HgCdTe surface.
Claim 13
Independent Claim
109 words
A method for the chemical-mechanical polishing of mercury cadmium telluride (HgCdTe) surface to a high degree of planarity and surface quality, said method comprising the steps of: A. maintaining said HgCdTe surface continuously wet with an excess quantity of an aqueous solution comprising potassium-iodine iodide in deionized water, wherein said potassium-iodine iodide concentration in said deionized water is selected to provide optimum removal rate while maintaining surface quality; and B. continuously wiping said HgCdTe surface with a firm surface, using moderate pressure, while maintaining a relative movement between said HgCdTe surface and said firm surface in order to remove HgCdTe material from the high points of said HgCdTe surface.
Claim 14
Dependent Claim
23 words
A method as in claim 11 wherein said moderate pressure is between 150 and 300 grams per square inch of said material surface.
Claim 15
Dependent Claim
19 words
A method as in claim 15 wherein said firm surface further comprises a semiporous, stiff, low-nap, low abrasive material.
Claim 16
Dependent Claim
15 words
A method as in claim 11 wherein said firm surface comprises an expanded polyurethane pad.
Claim 17
Dependent Claim
27 words
A method as in claim 11 wherein said method further comprises the step of thoroughly wetting said pad with ethylene glycol, as well as said aqueous solution.
Claim 18
Dependent Claim
21 words
A method as in claim 11 wherein said concentration of potassium-iodine iodide in said deionized water is approximately fifty percent (50%).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-07-14 | 1990-01-13 | 1990-07-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-07-14 | 1994-01-13 | 1994-07-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-07-14 | 1998-01-13 | 1998-07-15 | $7700.00 | Window Closed / Lapsed |