US4579463A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Detecting thermal waves to evaluate thermal parameters
Assignee: Therma Wave Inc
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Filing: 1984-05-21
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Granted: 1986-04-01
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Expires: 2004-05-21
Abstract
Abstract A method and apparatus is disclosed for detecting thermal waves. This system is based on the measurement of the change in reflectivity at the sample surface which is a function of the changing surface temperature. The apparatus includes a radiation probe beam that is directed on a portion of the area which is being periodically heated. A photodetector is aligned to sense the intensity changes in the reflected radiation probe beam which results from the periodic heating. These signals are processed to detect the presence of thermal waves.
Inventors
- 👤 Allan Rosencwaig
- 👤 Jon Opsal
- 👤 Walter L. Smith
- 👤 David L. Willenborg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:16
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/55; G01N25/00; G01N25/72
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
181 words
An apparatus for detecting thermal waves in a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the thermal waves, said thermal waves being generated by a periodic localized heating at a spot on the surface of the sample, said apparatus comprising: a probe for emitting a beam of radiation; means for directing the beam of radiation from the probe within a portion of the periodically heated area on the sample surface in a manner such that the beam of radiation from the probe reflects off the surface of the sample; means for sensing the radiation probe beam reflected off the periodically heated area on the sample surface and measuring the intensity variations thereof resulting from the periodic changes in optical reflectivity of the sample induced by the periodic heating; and means for processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample and deriving thermal wave signals therefrom to evaluate thermal parameters of a sample.
Claim 2
Independent Claim
181 words
An apparatus for detecting thermal waves in a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the thermal waves, said thermal waves being generated by a periodic localized heating at a spot on the surface of the sample, said apparatus comprising: a probe for emitting a beam of radiation; means for directing the beam of radiation from the probe within a portion of the periodically heated area on the sample surface in a manner such that the beam of radiation from the probe reflects off the surface of the sample; means for sensing the radiation probe beam reflected off the periodically heated area on the sample surface and measuring the intensity variations thereof resulting from the periodic changes in optical reflectivity of the sample induced by the periodic heating; and means for processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample and deriving thermal wave signals therefrom to evaluate thermal parameters of a sample.
Claim 3
Dependent Claim
34 words
An apparatus as recited in claim 1 wherein said means for directing said radiation probe beam is arranged to direct said probe beam at the center of the area which has been periodically heated.
Claim 4
Dependent Claim
24 words
An apparatus as recited in claim 1 wherein said means for measuring the intensity variations of the reflected radiation probe beam is a photodetector.
Claim 5
Dependent Claim
16 words
An apparatus as recited in claim 1 wherein said radiation probe is defined by a laser.
Claim 6
Dependent Claim
22 words
An apparatus as recited in claim 1 further including a means for rastering the sample with respect to the radiation probe beam.
Claim 7
Independent Claim
171 words
A method of detecting thermal waves in a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the thermal waves, said thermal waves being generated by a periodic heating at a spot on the surface of the sample, said method comprising the steps of: directing a radiation beam within a portion of the periodically heated area on the surface of the sample in a manner such that the radiation beam reflects off the surface of the sample; sensing the radiation beam after it has reflected off the periodically heated area on the surface of the sample; measuring the intensity variations of the sensed reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample induced by said periodic heating; and processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample and deriving thermal wave signals therefrom to evaluate thermal parameters of a sample.
Claim 8
Independent Claim
171 words
A method of detecting thermal waves in a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the thermal waves, said thermal waves being generated by a periodic heating at a spot on the surface of the sample, said method comprising the steps of: directing a radiation beam within a portion of the periodically heated area on the surface of the sample in a manner such that the radiation beam reflects off the surface of the sample; sensing the radiation beam after it has reflected off the periodically heated area on the surface of the sample; measuring the intensity variations of the sensed reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample induced by said periodic heating; and processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample and deriving thermal wave signals therefrom to evaluate thermal parameters of a sample.
Claim 9
Dependent Claim
26 words
A method as recited in claim 6 wherein said radiation beam is directed at the center of the area periodically heated by said periodic localized heating.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-03-31 | 1989-09-30 | 1990-04-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-03-31 | 1993-09-30 | 1994-04-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-03-31 | 1997-09-30 | 1998-04-01 | $7700.00 | Window Closed / Lapsed |