Method and arrangement for optical distance measurement

Claim 3

The method of claim 1, wherein said grating is symmetrically illuminated by said two light beams having the same angle of incidence onto said grating, said light beams being perpendicularly polarized with respect to each other, the phase difference between symmetrical diffraction orders of both of said light beams being determined by electrooptical compensation of said phase difference.

Claim 6

An optical arrangement for determining the relative displacement of one object with respect to another, each of said objects having an optical grating thereon, including: means for producing an entry light beam, a birefringent plate in the path of said entry light beam for splitting said entry beam into two partial light beams having perpendicularly polarized directions and for recombining said partial light beams after diffraction from said optical gratings, means for directing said polarized light beams to said gratings for diffraction therefrom, one of said light beams being diffracted from one of said gratings while the other is diffracted from the other of said gratings, electrooptic means for measuring the phase shift between light beams of the same diffraction order diffracted from said two optical gratings, said phase shift being a measure of the relative displacement of said objects with respect to one another.

Claim 7

An optical arrangement for determining the relative displacement of one object with respect to another, each of said objects having an optical grating thereon, including: means for producing an entry light beam, a birefringent plate in the path of said entry light beam for splitting said entry beam into two partial light beams having perpendicularly polarized directions and for recombining said partial light beams after diffraction from said optical gratings, means for directing said polarized light beams to said gratings for diffraction therefrom, one of said light beams being diffracted from one of said gratings while the other is diffracted from the other of said gratings, electrooptic means for measuring the phase shift between light beams of the same diffraction order diffracted from said two optical gratings, said phase shift being a measure of the relative displacement of said objects with respect to one another.

Claim 8

The arrangement of claim 4, including a collector lens located between said source of said entry beam and said birefringent plate for focussing said entry beam onto said optical gratings.

Claim 9

An optical arrangement for measuring the displacement of an object, including: a source of an entry beam of light, a birefringent plate located in the path of said entry beam for splitting said entry beam into two partial beams having perpendicular polarization directions, a λ/2 plate having a center hole therein through which one of the partial light beams produced by said birefringent plate passes, a lens, located between said λ/2 plate and an optical grating located on the object whose displacement is to be measured, at a distance corresponding to the focal length of said lens, electrooptical means for measuring the phase shift of the zeroth and first order light beams diffracted from said optical grating, and wherein said birefringent plate has a thickness such that said zeroth and first order light, beams diffracted from said optical grating recombine on its exit surface.

Claim 10

An optical arrangement for measuring the displacement of an object, including: a source of an entry beam of light, a birefringent plate located in the path of said entry beam for splitting said entry beam into two partial beams having perpendicular polarization directions, a λ/2 plate having a center hole therein through which one of the partial light beams produced by said birefringent plate passes, a lens, located between said λ/2 plate and an optical grating located on the object whose displacement is to be measured, at a distance corresponding to the focal length of said lens, electrooptical means for measuring the phase shift of the zeroth and first order light beams diffracted from said optical grating, and wherein said birefringent plate has a thickness such that said zeroth and first order light, beams diffracted from said optical grating recombine on its exit surface.

Claim 11

An optical arrangement for measuring the displacement of an object having an optical grating thereon including: a source of an entry light beam, a birefringent plate arranged in the path of said entry light beam for splitting said entry beam into two light beams having perpendicular polarization directions, a prism and a λ/2 plate located between said birefringent plate and said object, said split light beam being incident upon said optical grating, electrooptic means for introducing a phase shift between the diffracted beam of zeroth and said first order from said optical grating, and wherein said zeroth and said first order diffracted beams from said optical gratings pass through said prism and said birefringent plate after diffraction from said optical grating, the thickness of said birefringent plate being chosen such that the diffracted beam of the zeroth order recombine on its exit surface into a single beam.

Claim 12

An optical arrangement for measuring the displacement of an object having an optical grating thereon including: a source of an entry light beam, a birefringent plate arranged in the path of said entry light beam for splitting said entry beam into two light beams having perpendicular polarization directions, a prism and a λ/2 plate located between said birefringent plate and said object, said split light beam being incident upon said optical grating, electrooptic means for introducing a phase shift between the diffracted beam of zeroth and said first order from said optical grating, and wherein said zeroth and said first order diffracted beams from said optical gratings pass through said prism and said birefringent plate after diffraction from said optical grating, the thickness of said birefringent plate being chosen such that the diffracted beam of the zeroth order recombine on its exit surface into a single beam.

Claim 13

An optical arrangement for measuring the displacement of an object having an optical grating thereon, including: a source of an entry beam of light which is linearly polarized and of a single frequency, a Wollaston prism located in the path of said entry beam for splitting said entry beam into two light beams having different polarization directions, a lens located between said prism and said optical grating for combining said split two light beams at symmetrically identical angles of incidence on said optical grating, said angle of incidence corresponding to the diffraction angle of the first order diffracted beams, the diffraction beams of the +1th and the -1th orders being combined in an exit beam wherein the phase difference between the +1th and the -1th order is a measure of the displacement of said object.

Claim 14

An optical arrangement for measuring the displacement of an object having an optical grating thereon, including: a source of an entry beam of light which is linearly polarized and of a single frequency, a Wollaston prism located in the path of said entry beam for splitting said entry beam into two light beams having different polarization directions, a lens located between said prism and said optical grating for combining said split two light beams at symmetrically identical angles of incidence on said optical grating, said angle of incidence corresponding to the diffraction angle of the first order diffracted beams, the diffraction beams of the +1th and the -1th orders being combined in an exit beam wherein the phase difference between the +1th and the -1th order is a measure of the displacement of said object.

Claim 15

An optical arrangement for measuring the relative displacement between two objects, each of said objects having an optical grating thereon, including: a light source for providing an entry light beam, a birefringent plate for splitting said input beam into two beams having perpendicular polarization directions, a Wollaston prism with a center hole therein, and a 3λ/4 plate with a thinned-out center portion corresponding to a λ/4 plate, said thinned-out center portion being coaxial with the center hole in said Wollaston prism, wherein the deflection angle of said Wollaston prism is chosen in accordance with the diffraction angle of the first order for light diffracted from said optical gratings, and wherein one of said split light beams proceeds through the center hole in said Wollaston prism and the thinned-out center portion of said 3λ/4 plate before striking said optical grating, the other split beam striking said optical grating at an angle corresponding to the diffraction angle of the first order of light diffracted from said grating, means including said birefringent plate for combining light diffracted from said grating in said first diffraction order and light which is reflected from said grating through said thinned-out center portion of said 3λ/4 plate and through the center hole of said Wollaston prism, and means for measuring the phase shift of said light beams reflected from and diffracted by said grating.

Claim 16

An optical arrangement for measuring the relative displacement between two objects, each of said objects having an optical grating thereon, including: a light source for providing an entry light beam, a birefringent plate for splitting said input beam into two beams having perpendicular polarization directions, a Wollaston prism with a center hole therein, and a 3λ/4 plate with a thinned-out center portion corresponding to a λ/4 plate, said thinned-out center portion being coaxial with the center hole in said Wollaston prism, wherein the deflection angle of said Wollaston prism is chosen in accordance with the diffraction angle of the first order for light diffracted from said optical gratings, and wherein one of said split light beams proceeds through the center hole in said Wollaston prism and the thinned-out center portion of said 3λ/4 plate before striking said optical grating, the other split beam striking said optical grating at an angle corresponding to the diffraction angle of the first order of light diffracted from said grating, means including said birefringent plate for combining light diffracted from said grating in said first diffraction order and light which is reflected from said grating through said thinned-out center portion of said 3λ/4 plate and through the center hole of said Wollaston prism, and means for measuring the phase shift of said light beams reflected from and diffracted by said grating.

Claim 17

The optical arrangement of claim 9, including a collector lens located between said light source and said birefringent plate, and wherein said birefringent plate splits said entry beam into an ordinary beam and an extraordinary beam, the polarization of said entry beam corresponding to the polarization of said ordinary beam in said birefringent plate.

Claim 18

An optical arrangement for measuring the displacement of an object, comprising the combination of: a light source for providing an entry light beam, an object having an optical grating associated therewith, the movement of said grating relating to the movement of said object, means for producing two light beams from said entry beam, said two light beams being polarized perpendicularly to each other, means for directing said two light beams to said optical grating for diffraction therefrom, means for combining into a single beam two beams of specified orders of light diffracted from said optical grating the phase difference between said two diffracted light beams being indicative of the displacement of said object, and means for measuring said phase difference including an electrooptical light modulator for splitting a light beam into two components polarized perpendicularly to each other, a compensator for setting to a fixed value the phase difference between the light beams produced by said electrooptical light modulator an analyzer,and a detector which converts input light thereto to an electrical signal indicative of said phase difference.

Claim 19

An optical arrangement for measuring the displacement of an object, comprising the combination of: a light source for providing an entry light beam, an object having an optical grating associated therewith, the movement of said grating relating to the movement of said object, means for producing two light beams from said entry beam, said two light beams being polarized perpendicularly to each other, means for directing said two light beams to said optical grating for diffraction therefrom, means for combining into a single beam two beams of specified orders of light diffracted from said optical grating the phase difference between said two diffracted light beams being indicative of the displacement of said object, and means for measuring said phase difference including an electrooptical light modulator for splitting a light beam into two components polarized perpendicularly to each other, a compensator for setting to a fixed value the phase difference between the light beams produced by said electrooptical light modulator an analyzer,and a detector which converts input light thereto to an electrical signal indicative of said phase difference.