US4524089A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Three-step plasma treatment of copper foils to enhance their laminate adhesion
Assignee: Olin Corp
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Filing: 1983-11-22
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Granted: 1985-06-18
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Expires: 2003-11-22
Abstract
Abstract A three-step plasma treatment for improving the laminate adhesion of metallic and non-metallic substrates is described. The treatment comprises sequentially exposing the substrate to a first plasma of oxygen gas, a second plasma of a hydrocarbon monomer gas and a third plasma of oxygen gas. The process has particular utility in forming polymeric films on one or more surfaces of copper or copper alloy foils to be used in printed circuit applications.
Inventors
- 👤 Reza Haque
- 👤 Edward F. Smith, III
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:25
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; B05D3/00; B05D3/14; B05D3/141; B05D3/142; B05D3/145; B05D3/148; H; H05; H05K; H05K3/00; H05K3/38; H05K3/382; B05D2202/00; B05D2202/40; B05D2202/45; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0355; H05K2203/00; H05K2203/09; H05K2203/095
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
111 words
A process for coating at least one surface of a substrate material with an adherent polymeric film, said process comprising: forming a first plasma of predominantly oxygen gas in the vicinity of said substrate material; exposing said substrate material to said first plasma for a first period of time; forming a plasma of a hydrocarbon monomer gas in the vicinity of said substrate material; exposing said substrate material to said hydrocarbon monomer gas plasma for a second period of time; forming a second plasma of predominantly oxygen gas in the vicinity of said substrate material; and exposing said substrate material to said second oxygen plasma for a third period of time.
Claim 2
Dependent Claim
111 words
A process for coating at least one surface of a substrate material with an adherent polymeric film, said process comprising: forming a first plasma of predominantly oxygen gas in the vicinity of said substrate material; exposing said substrate material to said first plasma for a first period of time; forming a plasma of a hydrocarbon monomer gas in the vicinity of said substrate material; exposing said substrate material to said hydrocarbon monomer gas plasma for a second period of time; forming a second plasma of predominantly oxygen gas in the vicinity of said substrate material; and exposing said substrate material to said second oxygen plasma for a third period of time.
Claim 3
Dependent Claim
23 words
The process of claim 1 further comprising: providing an evacuable chamber containing two spaced-apart electrodes; and positioning said substrate material between said electrodes.
Claim 4
Dependent Claim
45 words
The process of claim 2 wherein each said plasma forming step comprises: introducing said gas into said chamber at a desired flow rate and at a desired working pressure; and applying a current at a desired frequency and a desired power level to said electrodes.
Claim 5
Dependent Claim
56 words
The process of claim 3 further comprising: said desired gas flow rate being in the range of about 0.5 sccm to about 50 sccm; said desired working pressure being in the range of about 5 mtorr to about 100 mtorr; and said desired frequency being in the range of about 10 kilohertz to about 20 gigahertz.
Claim 6
Dependent Claim
54 words
The process of claim 4 further comprising: said flow rate being in the range of about 5 sccm to about 10 sccm; said desired working pressure being in the range of about 10 mtorr to about 50 mtorr; and said desired frequency being in the range of about 1 megahertz to about 100 megahertz.
Claim 7
Dependent Claim
37 words
The process of claim 4 further comprising: each said electrode having a surface area; and said power level per said electrode area being in the range of about 1 watt/in 2 to about 14.8 watts/in 2 .
Claim 8
Dependent Claim
29 words
The process of claim 6 further comprising: said power level per said electrode area being in the range of about 4.9 watts/in 2 to about 10 watts/in 2 .
Claim 9
Dependent Claim
39 words
The process of claim 4 further comprising: said chamber with said electrodes defining a contained plasma volume; and said power level per said volume being in the range of about 0.17 watts/in 3 to about 2.65 watts/in 3 .
Claim 10
Dependent Claim
28 words
The process of claim 8 further comprising: said power level per said volume being in the range of about 0.88 watts/in 3 to about 1.75 watts/in 3 .
Claim 11
Dependent Claim
21 words
The process of claim 2 further comprising: evacuating said chamber to a desired base pressure prior to forming each said plasma.
Claim 12
Dependent Claim
49 words
The process of claim 1 further comprising: said substrate material comprising a metallic foil; said first and third time periods being in the range of about 5 minutes to about 40 minutes; and said second time period being in the range of about 0.5 minutes to about 10 minutes.
Claim 13
Dependent Claim
52 words
The process of claim 11 further comprising: said substrate material comprising a copper or copper alloy foil; said first and third time periods being in the range of about 10 minutes to about 20 minutes; and said second time period being in the range of about 2.5 minutes to about 5 minutes.
Claim 14
Dependent Claim
44 words
The process of claim 3 wherein the step of forming said hydrocarbon monomer gas plasma further comprises: introducing into said chamber at said desired flow rate and at said desired working pressure a gas selected from the group consisting of methane, propene and butadiene.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-06-17 | 1988-12-17 | 1989-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-06-17 | 1992-12-17 | 1993-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-06-17 | 1996-12-17 | 1997-06-18 | $7700.00 | Window Closed / Lapsed |