US4489102A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Radiation-stimulated deposition of aluminum
Assignee: AT&T Inc
•
Filing: 1983-04-04
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Granted: 1984-12-18
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Expires: 2003-04-04
Abstract
Abstract A method for depositing aluminum films on a substrate comprises exposing the substrate to vapors of an aluminum hydride-trialkylamine complex and exposing the surface to ultraviolet light in the areas where aluminum deposition is desired.
Inventors
- 👤 Leonard J. Olmer
- 👤 Daniel J. Shanefield
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 10:22
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45561; C23C16/06; C23C16/18; C23C16/20; C23C16/48; C23C16/482; H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0116; H10D64/012; H10D64/0121; H10D64/0124; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
40 words
A method for depositing aluminum films on a non-catalyzed substrate comprises exposing the substrate to vapors of a composition consisting of an aluminum hydride-trialkylamine complex and exposing the surface to ultraviolet light in the areas where aluminum deposition is desired.
Claim 2
Independent Claim
40 words
A method for depositing aluminum films on a non-catalyzed substrate comprises exposing the substrate to vapors of a composition consisting of an aluminum hydride-trialkylamine complex and exposing the surface to ultraviolet light in the areas where aluminum deposition is desired.
Claim 3
Dependent Claim
11 words
The method recited in claim 1, wherein the trialkylamine is trimethylamine.
Claim 4
Dependent Claim
20 words
The method recited in claim 1, wherein an aluminum pattern is formed by passing the u.v. light through a photomask.
Claim 5
Dependent Claim
24 words
The method recited in claim 1, wherein an aluminum pattern is formed by focusing the u.v. light on specified predetermined areas of the substrate.
Claim 6
Dependent Claim
14 words
The method recited in claim 4, wherein the light source is a u.v. laser.
Claim 7
Dependent Claim
15 words
The method recited in claim 3 wherein the u.v. light source is a mercury-arc lamp.
Claim 8
Dependent Claim
14 words
The method recited in claim 1, wherein deposition takes place at essentially atmospheric pressure.
Claim 9
Dependent Claim
13 words
The method recited in claim 1, wherein deposition takes place at reduced pressures.
References Cited (Backward Citations)
US27606A
Cited
US3271180A
Cited
US3364087A
Cited
US3386823A
Cited
US3462288A
Cited
US3375129A
Cited
USRE27606E
Cited
US4006269A
Cited
US4324854A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-18 | 1988-06-18 | 1988-12-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-18 | 1992-06-18 | 1992-12-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-18 | 1996-06-18 | 1996-12-18 | $7700.00 | Window Closed / Lapsed |