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US4459852A Expired / Lapsed US ⏱️ 0.0 years remaining

Acoustic microscope using line-focus acoustic beam

Assignee: Individual
•
Filing: 1982-07-06
•
Granted: 1984-07-17
•
Expires: 2002-07-06
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Abstract

Abstract An acoustic microscope using a line-focus acoustic beam is disclosed. The line-focus acoustic beam is generated by an acoustic transducer head having an acoustic transducer electrode applied on a flat end surface of a sapphire rod, in the opposite end surface is formed a cylindrical concave surface. The acoustic transducer head is arranged fixedly above a mechanical stage on which a specimen is placed. The mechanical stage is movable in a Z axis, i.e. an axis of the line-focus acoustic beam and is also rotatable about the Z axis. By moving the stage in the Z-axis, a V(z) curve is obtained and a phase velocity of a leaky surface-acoustic wave is calculated from a repetition period of the V(z) curve. Then the V(z) curve measurement is repeated while the stage is rotated, and it is possible to obtain anisotropies of the specimen expressed by a relation between the rotational angle and the phase velocity of the leaky surface-acoustic wave.

Inventors

  • 👤 Noriyoshi Chubachi
  • 👤 Junichi Kushibiki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 16:42
CPC Classifications
G; G01; G01H; G01H3/00; G01H3/10; G01H3/12; G01H3/125; G01N; G01N29/00; G01N29/04; G01N29/06; G10; G10K; G10K11/00; G10K11/18; G10K11/26

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 88 words
An acoustic microscope for detecting acoustic properties of a specimen comprising: an acoustic transducer head for propagating an acoustic beam toward a specimen and which is linearly focussed in a direction perpendicular to the direction of propagation of the acoustic beam; means for moving the acoustic transducer head relative to a specimen in the direction of propagation of the acoustic beam; and means for rotating the acoustic transducer head relative to a specimen about an axis which is parallel with the direction of propagation of the acoustic beam.
Claim 2
Dependent Claim 88 words
An acoustic microscope for detecting acoustic properties of a specimen comprising: an acoustic transducer head for propagating an acoustic beam toward a specimen and which is linearly focussed in a direction perpendicular to the direction of propagation of the acoustic beam; means for moving the acoustic transducer head relative to a specimen in the direction of propagation of the acoustic beam; and means for rotating the acoustic transducer head relative to a specimen about an axis which is parallel with the direction of propagation of the acoustic beam.
Claim 3
Dependent Claim 24 words
An acoustic microscope according to claim 1, wherein said axis of rotation is made coincident with the direction of propagation of the acoustic beam.
Claim 4
Dependent Claim 42 words
An acoustic microscope according to claim 2, wherein said moving and rotating means comprise a mechanical stage which is movable in the direction of propagation of the acoustic beam and rotatable about the parallel axis, while said acoustic transducer head is fixed.
Claim 5
Dependent Claim 57 words
An acoustic microscope according to claim 1, wherein said acoustic transducer head comprises a solid state acoustic field medium having a flat end surface and at least one cylindrical concave surface formed in the opposite end surface, and at least one electroacoustic transducer element applied on said flat end surface of the solid state acoustic field medium.
Claim 6
Dependent Claim 38 words
An acoustic microscope according to claim 4, wherein said acoustic transducer head is so constructed that a half-width of the acoustic beam as viewed in said one direction is substantially equal to one wavelength of the acoustic beam.
Claim 7
Dependent Claim 34 words
An acoustic microscope according to claim 4, wherein an anti-reflection coating is applied onto said opposite end surface of the solid state acoustic field medium in which surface said cylindrical concave surface is formed.
Claim 8
Dependent Claim 24 words
An acoustic microscope according to claims 4, 5 or 6, wherein said solid state acoustic field medium is formed by a Z-cut sapphire rod.
Claim 9
Dependent Claim 18 words
An acoustic microscope according to claim 7, wherein said electroacoustic transducer element is formed by a ZnO film.
Claim 10
Dependent Claim 89 words
An acoustic microscope according to claim 4, wherein a plurality of the acoustic transducer elements are arranged on the flat end surface of the solid state acoustic field medium in such a manner that they make an angle unequal to zero relative to each other and the same number of the cylindrical concave surfaces as that of the transducer elements are formed in the opposite end surface of the solid state acoustic field medium in such a manner that each of them is aligned with the corresponding transducer element.
Claim 11
Dependent Claim 28 words
An acoustic microscope according to claim 1, wherein said acoustic transducer head comprises an acoustic transducer element which is applied on a cylindrical concave surface of a substrate.
Claim 12
Dependent Claim 16 words
An acoustic microscope according to claim 10, wherein said substrate is made of a semicylindrical body.
Claim 13
Dependent Claim 31 words
An acoustic microscope according to claim 1, wherein said acoustic transducer head comprises an acoustic transducer element applied on a cylindrical convex surface of a substrate made of acoustic field material.
Claim 14
Dependent Claim 16 words
An acoustic microscope according to claim 12, wherein said substrate is formed by a semicylindrical body.
Claim 15
Dependent Claim 129 words
An acoustic microscope for detecting acoustic properties of a specimen comprising: an acoustic transducer head for propagating an acoustic beam toward a specimen and which is linearly focussed in a direction perpendicular to the direction of propagation; said acoustic transducer head comprising a solid state acoustic field medium having a flat end surface and an opposite surface, a plurality of electroacoustic transducer elements arranged on said flat end surface in such a manner as to form angles relative to one another which do not equal zero, and a plurality of cylindrical concave surfaces equal in number to the number of said plurality of transducer elements and formed in said opposite surface in such a manner that each transducer element is aligned with a respective one of said concave surfaces.
Claim 16
Dependent Claim 129 words
An acoustic microscope for detecting acoustic properties of a specimen comprising: an acoustic transducer head for propagating an acoustic beam toward a specimen and which is linearly focussed in a direction perpendicular to the direction of propagation; said acoustic transducer head comprising a solid state acoustic field medium having a flat end surface and an opposite surface, a plurality of electroacoustic transducer elements arranged on said flat end surface in such a manner as to form angles relative to one another which do not equal zero, and a plurality of cylindrical concave surfaces equal in number to the number of said plurality of transducer elements and formed in said opposite surface in such a manner that each transducer element is aligned with a respective one of said concave surfaces.

References Cited (Backward Citations)

US3663842A Cited
US4378699A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-07-17 1988-01-16 1988-07-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-07-17 1992-01-16 1992-07-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-07-17 1996-01-16 1996-07-17 $7700.00 Window Closed / Lapsed

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