US4451551A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Radiation-sensitive poly(amic acid) polymer composition
Assignee: Hitachi Ltd
•
Filing: 1981-12-17
•
Granted: 1984-05-29
•
Expires: 2001-12-17
Abstract
Abstract A light- or radiation-sensitive polymer composition comprising (a) a poly(amic acid) having as a major component a repeating unit of the formula: <IMAGE> (b) one or more light- or radiation-sensitive compounds having an amino group and an aromatic azide group or aromatic sulfonylazide group in one molecule, and if necessary (c) one or more photosensitizers and/or amine compounds having at least one unsaturated bonding, and/or (d) one or more compounds having at least two unsaturated bonding in one molecule, is highly sensitive to light and radiation and can give a precise relief pattern on a substrate. Further, a finally obtained polyimide film is excellent in heat resistance.
Inventors
- 👤 Fumio Kataoka
- 👤 Fusaji Shoji
- 👤 Isao Obara
- 👤 Hitoshi Yokono
- 👤 Tokio Isogai
- 👤 Mitumasa Kojima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:06
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0387; C; C08; C08K; C08K5/00; C08K5/0008; C08K5/0041; C08L; C08L79/00; C08L79/04; C08L79/08; G03F7/008; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/12; Y10S430/121; Y10S522/00; Y10S522/904
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
448 words
A light- or radiation-sensitive polymer composition comprising (a) a poly(amic acid) having as a major component a repeating unit of the formula: ##STR120## wherein R 1 is a trivalent or tetravalent organic group having at least 2 carbon atoms; R 2 is a divalent organic group having at least 2 carbon atoms; M is hydrogen or an ammonium ion; and n is an integer of 1 or 2, and (b) one or more light- or radiation-sensitive compounds having an amino group and an aromatic azide group or aromatic sulfonylazide group in one molecule selected from the group consisting of a compound of the formula: ##STR121## wherein X is --N 3 or --SO 2 N 3 ; Y is an alkylene group; and R 3 , R 4 and R 5 are independently hydrogen or a lower alkyl group; a compound of the formula: ##STR122## wherein X is --N 3 or --SO 2 N 3 ; and R 3 , R 4 and R 5 are independently hydrogen or a lower alkyl group; a compound of the formula: ##STR123## wherein X is --N 3 or --SO 2 N 3 ; R 3 , R 4 and R 5 are independently hydrogen or a lower alkyl group; a compound of the formula: ##STR124## wherein X is --N 3 or --SO 2 N 3 ; and R 7 is hydrogen or a lower alkyl group; a compound of the formula: ##STR125## wherein X is --N 3 or --SO 2 N 3 ; R 3 and R 4 are independently hydrogen or a lower alkyl group; R 5' is hydrogen, halogen, a nitro group, a lower alkoxy group, a lower alkyl group or a cyano group; R 7 is hydrogen or a lower alkyl group; R 8 is hydrogen, halogen, a cyano group or a lower alkyl group; R 9 is a divalent organic group bonding to the N atom and the moiety having an unsaturated bonding; and m is an integer of 1 to 3; and a compound of the formula: ##STR126## wherein X is --N 3 or --SO 2 N 3 ; Ar is an aromatic group selected from a benzene ring which may be fused one and a heterocyclic ring; R 3 and R 4 are independently hydrogen or a lower alkyl group; R 10 is a divalent organic group bonding to the Ar and the N atom; and R 11 is hydrogen, halogen, a lower alkyl group, a lower alkoxy group, a nitro group, a carboxyl group, or a sulfonic acid group; in an amount of 0.05 to 5 times the equivalent of the total COOM groups of the repeating units of the formula (1) of component (a).
Claim 2
Dependent Claim
448 words
A light- or radiation-sensitive polymer composition comprising (a) a poly(amic acid) having as a major component a repeating unit of the formula: ##STR120## wherein R 1 is a trivalent or tetravalent organic group having at least 2 carbon atoms; R 2 is a divalent organic group having at least 2 carbon atoms; M is hydrogen or an ammonium ion; and n is an integer of 1 or 2, and (b) one or more light- or radiation-sensitive compounds having an amino group and an aromatic azide group or aromatic sulfonylazide group in one molecule selected from the group consisting of a compound of the formula: ##STR121## wherein X is --N 3 or --SO 2 N 3 ; Y is an alkylene group; and R 3 , R 4 and R 5 are independently hydrogen or a lower alkyl group; a compound of the formula: ##STR122## wherein X is --N 3 or --SO 2 N 3 ; and R 3 , R 4 and R 5 are independently hydrogen or a lower alkyl group; a compound of the formula: ##STR123## wherein X is --N 3 or --SO 2 N 3 ; R 3 , R 4 and R 5 are independently hydrogen or a lower alkyl group; a compound of the formula: ##STR124## wherein X is --N 3 or --SO 2 N 3 ; and R 7 is hydrogen or a lower alkyl group; a compound of the formula: ##STR125## wherein X is --N 3 or --SO 2 N 3 ; R 3 and R 4 are independently hydrogen or a lower alkyl group; R 5' is hydrogen, halogen, a nitro group, a lower alkoxy group, a lower alkyl group or a cyano group; R 7 is hydrogen or a lower alkyl group; R 8 is hydrogen, halogen, a cyano group or a lower alkyl group; R 9 is a divalent organic group bonding to the N atom and the moiety having an unsaturated bonding; and m is an integer of 1 to 3; and a compound of the formula: ##STR126## wherein X is --N 3 or --SO 2 N 3 ; Ar is an aromatic group selected from a benzene ring which may be fused one and a heterocyclic ring; R 3 and R 4 are independently hydrogen or a lower alkyl group; R 10 is a divalent organic group bonding to the Ar and the N atom; and R 11 is hydrogen, halogen, a lower alkyl group, a lower alkoxy group, a nitro group, a carboxyl group, or a sulfonic acid group; in an amount of 0.05 to 5 times the equivalent of the total COOM groups of the repeating units of the formula (1) of component (a).
Claim 3
Dependent Claim
93 words
A composition according to claim 1, which further comprises (c) one or more photosensitizers in an amount of from 0.01% by weight to 10% by weight based on the total weight of the components (a), (b) and (c), and/or amine compounds having at least one unsaturated bonding in an amount of 0.05 mole to 2 moles per mole of the component (b) and the total amounts of the component (b) and the amine of the component (c) being no more than 3 times the equivalent of the COOM groups of the component (a).
Claim 4
Dependent Claim
29 words
A composition according to claim 1, which further comprises (d) one or more compounds having at least two unsaturated bondings in one molecule except for the amine compound (c).
Claim 5
Dependent Claim
45 words
A composition according to claim 1, which further comprises (c) one or more photosensitizers and/or amine compounds having at least one unsaturated bonding, and (d) one or more compounds having at least two unsaturated bondings in one molecule except for the above-mentioned amine compounds (c).
Claim 6
Dependent Claim
20 words
A composition according to claim 1, 2, 3 or 4, wherein the repeating unit of the formula (1) is ##STR127##
Claim 7
Dependent Claim
54 words
A composition according to claim 1, 2, 3 or 4, wherein the component (b) is a compound of the formula: ##STR128## wherein X is --N 3 or --SO 2 N 3 ; Y is an alkylene group; and R 3 , R 4 and R 5 are independently hydrogen or a lower alkyl group.
Claim 8
Dependent Claim
49 words
A composition according to claim 1, 2, 3 or 4, wherein the component (b) is a compound of the formula: ##STR129## wherein X is --N 3 or --SO 2 N 3 ; and R 3 , R 4 and R 5 are independently hydrogen or a lower alkyl group.
Claim 9
Dependent Claim
50 words
A composition according to claim 1, 2, 3 or 4, wherein the component (b) is a compound of the formula: ##STR130## wherein X is --N 3 or --SO 2 N 3 ; R 3 , R 4 and R 5 are independently hydrogen or a lower alkyl group; and ##STR131##
Claim 10
Dependent Claim
42 words
A composition according to claim 1, 2, 3 or 4, wherein the component (b) is a compound of the formula: ##STR132## wherein X is --N 3 or --SO 2 N 3 ; and R 7 is hydrogen or a lower alkyl group.
Claim 11
Dependent Claim
115 words
A composition according to claim 1, 2, 3 or 4, wherein the component (b) is a compound of the formula: ##STR133## wherein X is --N 3 or --SO 2 N 3 ; R 3 and R 4 are independently hydrogen or a lower alkyl group; R 5' is hydrogen, halogen, a nitro group, a lower alkoxy group, a lower alkyl group or a cyano group; R 7 is hydrogen or a lower alkyl group; R 8 is hydrogen, halogen, a cyano group or a lower alkyl group; R 9 is a divalent organic group bonding to the N atom and the moiety having an unsaturated bonding; and m is an integer of 1 to 3.
Claim 12
Dependent Claim
104 words
A composition according to claim 1, 2, 3 or 4, wherein the component (b) is a compound of the formula: ##STR134## wherein X is --N 3 or --SO 2 N 3 ; Ar is an aromatic group selected from a benzene ring which may be fused one and a heterocyclic ring; R 3 and R 4 are independently hydrogen or a lower alkyl group; R 10 is a divalent organic group bonding to the Ar and the N atom; and R 11 is hydrogen, halogen, a lower alkyl group, a lower alkoxy group, a nitro group, a carboxyl group, or a sulfonic acid group.
Claim 13
Dependent Claim
21 words
A composition according to claim 6, wherein the compound of the formula (2) is ##STR135## wherein p is 2 or 3.
Claim 14
Dependent Claim
15 words
A composition according to claim 10, wherein the compound of the formula (6) is ##STR136##
Claim 15
Dependent Claim
15 words
A composition according to claim 10, wherein the compound of the formula (6) is ##STR137##
Claim 16
Dependent Claim
19 words
A composition according to claim 2 or 4, wherein the photosensitizer of the component (C) is N,N'-tetramethyl-4,4'-diaminobenzophenone or N,N'-tetraethyl-4,4'-diaminobenzophenone.
Claim 17
Dependent Claim
22 words
A composition according to claim 3 or 4, wherein the unsaturated bonding in the component (d) is an acryloyl or methacryloyl group.
Claim 18
Dependent Claim
12 words
A composition according to claim 1, wherein the component (b) is 2-(N,N-dimethylamino)ethyl[p-azidobensoate]p-azidobenzoate.
Claim 19
Dependent Claim
47 words
A composition according to claim 1, wherein the one or more light- or radiation-sensitive compounds (b) is incorporated within the composition in an amount of 0.04 to 2 times the equivalent of the total COOM groups of the repeating units of the formula (1) of component (a).
Claim 20
Dependent Claim
57 words
A composition according to claim 1, which further comprises a solvent in which component (a) and component (b) are dissolved, said solvent comprising an aprotic polar solvent and being present in an amount of 100 parts to 10,000 parts by weight per 100 parts by weight of the total of the component (a) and the component (b).
Claim 21
Dependent Claim
52 words
A composition according to claim 1, which further comprises an aprotic polar solvent in which component (a) and component (b) are dissolved, the solvent being present in an amount of 100 parts to 10,000 parts by weight based on 100 parts by weight on the total of component (a) and component (b).
Claim 22
Dependent Claim
49 words
A composition according to claim 1, wherein component (b) is a compound capable of being incorporated into the repeating unit of the Formula (I) of component (a) by ionic combination of the amino group of the component (b) with the carboxyl group in the repeating unit of formula (1).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-29 | 1987-11-28 | 1988-05-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-29 | 1991-11-28 | 1992-05-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-29 | 1995-11-28 | 1996-05-29 | $7700.00 | Window Closed / Lapsed |