US4393505A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gas discharge laser having a buffer gas of neon
Assignee: Lambda Physik AG
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Filing: 1981-11-03
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Granted: 1983-07-12
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Expires: 2001-11-03
Abstract
Abstract The output power and efficiency of a gas discharge laser is substantially improved by the substitution of neon (Ne) for helium (He) as a buffer in the lasing medium. One embodiment of the invention is a pulsed excimer laser having a lasing gas comprising a mixture of krypton (Kr) and fluorine (F 2 ). Use of Ne with the KrF excimer lasing medium further enables advantageous utilization of corona wire pre-ionization to initiate the main discharge of this type of laser.
Inventors
- 👤 Theodore S. Fahlen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 01:55
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/09; H01S3/097; H01S3/0971; H01S3/09713; H01S3/09716; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
178 words
In an excimer laser comprising a chamber, spaced electrodes in said chamber defining a discharge zone therebetween, a source of d-c power, energy storage capacitor means electrically connected to said electrodes and to said source and adapted to be charged by the latter, switch means electrically connected between said capacitor means and said electrodes and operable to apply the charge voltage of said capacitor means across said electrodes, a lasing gas mixture in said chamber having a lasing gas selected from the group consisting of Ar and F 2 , Xe and F 2 , Xe and Br 2 , Hg and Br 2 , Hg and Cl 2 , Xe and Cl 2 and Kr and F 2 , said electrodes producing an electric discharge in said gas in said zone when said switch means is actuated whereby to convert said gas mixture to ArF, XeF, XeBr, HgBr, HgCl, XeCl and KrF, respectively, and optical means aligned with said discharge zone defining a laser cavity, the improvement consisting of a buffer gas of Ne in said mixture.
Claim 2
Dependent Claim
178 words
In an excimer laser comprising a chamber, spaced electrodes in said chamber defining a discharge zone therebetween, a source of d-c power, energy storage capacitor means electrically connected to said electrodes and to said source and adapted to be charged by the latter, switch means electrically connected between said capacitor means and said electrodes and operable to apply the charge voltage of said capacitor means across said electrodes, a lasing gas mixture in said chamber having a lasing gas selected from the group consisting of Ar and F 2 , Xe and F 2 , Xe and Br 2 , Hg and Br 2 , Hg and Cl 2 , Xe and Cl 2 and Kr and F 2 , said electrodes producing an electric discharge in said gas in said zone when said switch means is actuated whereby to convert said gas mixture to ArF, XeF, XeBr, HgBr, HgCl, XeCl and KrF, respectively, and optical means aligned with said discharge zone defining a laser cavity, the improvement consisting of a buffer gas of Ne in said mixture.
Claim 3
Dependent Claim
13 words
The laser according to claim 1 in which said lasing gas comprises KrF.
Claim 4
Dependent Claim
54 words
The laser according to claim 2 with at least one insulated ionization wire spaced closely to one of said electrodes and electrically connected to the other electrode whereby application of said charge voltage to said electrodes causes said wire to pre-ionize said buffer gas and to simultaneously induce the electric discharge between said electrodes.
Claim 5
Dependent Claim
14 words
The laser according to claim 3 in which said switch means comprises a thyratron.
References Cited (Backward Citations)
US3934211A
Cited
US4307351A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-07-11 | 1987-01-10 | 1987-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-07-11 | 1991-01-10 | 1991-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-07-11 | 1995-01-10 | 1995-07-12 | $7700.00 | Window Closed / Lapsed |