US4355903A
Expired / Lapsed
US
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Thin film thickness monitor
Assignee: Intersil Corp
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Filing: 1980-08-28
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Granted: 1982-10-26
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Expires: 2000-08-28
Abstract
Abstract A thin film thickness monitor uses the successive reflection of polychromatic light from a reference or standard thin film having a varying optical thickness (n 1 t 1 ) and then from a thin film of unknown thickness (t f ) or optical thickness (n f t f ). The reflected intensity of light from the thin film is detected to provide a signal indicating when the optical thickness of the unknown film is equal to the optical thickness of the reference.
Inventors
- 👤 John R. Sandercock
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:32
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
273 words
A thin film thickness monitor comprising: a source of light for a light having a plurality of wavelengths; a light detector for generating an output signal indicative of detected light; a reference thin film of varying thickness having a known optical thickness n l t l that varies with the thickness of said film, where n l is the refractive index of said film and t l is the thickness at a particular portion of said film; a specimen thin film of unknown optical thickness n f t f where n f is the refractive index and t f is the thickness; means for scanning light from said source in either successive order over the surface of said reference film, and reflecting said scanned light to the surface of said specimen film and thence to said detector, the output signal of said detector representing the intensity of said reflected light, a variation in the intensity of said reflected light being indicative of the optical thickness of said reference film and said specimen film being equal; said reference thin film comprising a semi-circular member supported on a circular disc, whereby a semi-circular surface portion of said disc adjacent said member is scanned by said light, the thickness of said member varying circumferentially linearly between a minimum thickness and a maximum thickness; and further including: means responsive to said output signal for determining the optical thickness of said film as a function of the scanning time or distance between either the minimum thickness or maximum thickness of the member and the thickness of the member at which the variation in the reflected light intensity occurs.
Claim 2
Dependent Claim
273 words
A thin film thickness monitor comprising: a source of light for a light having a plurality of wavelengths; a light detector for generating an output signal indicative of detected light; a reference thin film of varying thickness having a known optical thickness n l t l that varies with the thickness of said film, where n l is the refractive index of said film and t l is the thickness at a particular portion of said film; a specimen thin film of unknown optical thickness n f t f where n f is the refractive index and t f is the thickness; means for scanning light from said source in either successive order over the surface of said reference film, and reflecting said scanned light to the surface of said specimen film and thence to said detector, the output signal of said detector representing the intensity of said reflected light, a variation in the intensity of said reflected light being indicative of the optical thickness of said reference film and said specimen film being equal; said reference thin film comprising a semi-circular member supported on a circular disc, whereby a semi-circular surface portion of said disc adjacent said member is scanned by said light, the thickness of said member varying circumferentially linearly between a minimum thickness and a maximum thickness; and further including: means responsive to said output signal for determining the optical thickness of said film as a function of the scanning time or distance between either the minimum thickness or maximum thickness of the member and the thickness of the member at which the variation in the reflected light intensity occurs.
Claim 3
Dependent Claim
13 words
The monitor of claim 1 wherein said light source is an incandescent lamp.
Claim 4
Dependent Claim
17 words
The monitor of claim 2 wherein said specimen thin film is silicon and said substrate is sapphire.
Claim 5
Dependent Claim
18 words
The monitor of claim 2 wherein said specimen thin film is a photoresist and said substrate is chromium.
Claim 6
Dependent Claim
37 words
The monitor of claim 1 wherein said disc is mounted on a motor driven shaft and is oriented so that the angle of incidence of said light on the surface of said reference film is substantially normal.
Claim 7
Dependent Claim
19 words
The monitor of claim 1 wherein the surface of said circular disc not covered by said member is black.
Claim 8
Dependent Claim
18 words
The monitor of claim 1 wherein said specimen thin film is silicon dioxide and said substrate is silicon.
Claim 9
Dependent Claim
21 words
The monitor of claim 1 wherein said specimen thin film is titanium oxide (TiO 2 ) and said substrate is glass.
Claim 10
Dependent Claim
127 words
The monitor of claim 1 further including: a second detector for generating an output signal indicative of a detected light; a mirror positioned in a portion of the reflected light following reflection from the first scanned film and before reflection from the second scanned film to reflect light to said second detector; and means responsive to the respective output signals of the first-mentioned detector and said second detector for generating an output signal indicative of the intensity of the reflected light from said specimen and substantially free of distortion in the reflected light signal which would otherwise occur at either very small thicknesses due to the finite bandwidth of the optical system or the reference film thickness being less than the minimum wavelength from the light source.
Claim 11
Independent Claim
140 words
A method of monitoring the thickness of a thin film comprising: reflecting polychromatic light from a source, in either successive order, from a specimen film of unknown optical thickness and a reference film of variable optical thickness, scanning said light on said reference film, which is comprised of a semi-circular member supported on a circular disc, by rotating said disc with respect to said light; varying the optical thickness of the reference film linearly between a minimum thickness and a maximum thickness; detecting the intensity of the reflected light to determine when the optical thickness of the specimen film is equal to the optical thickness of the reference film; and providing a signal representing the optical thickness as a function of the time between either the minimum or maximum thickness and the thickness at which the respective thicknesses are equal.
Claim 12
Independent Claim
140 words
A method of monitoring the thickness of a thin film comprising: reflecting polychromatic light from a source, in either successive order, from a specimen film of unknown optical thickness and a reference film of variable optical thickness, scanning said light on said reference film, which is comprised of a semi-circular member supported on a circular disc, by rotating said disc with respect to said light; varying the optical thickness of the reference film linearly between a minimum thickness and a maximum thickness; detecting the intensity of the reflected light to determine when the optical thickness of the specimen film is equal to the optical thickness of the reference film; and providing a signal representing the optical thickness as a function of the time between either the minimum or maximum thickness and the thickness at which the respective thicknesses are equal.
Claim 13
Dependent Claim
131 words
The method of claim 10 further comprising the steps of: scanning said light initially over said reference film to reflect light subsequently to said specimen film; reflecting a portion of the reflected light from said reference film to a second detector; dividing the output signals of the first-mentioned detector and said second detector to generate a signal representing the intensity of said reflected light from said specimen substantially free of spurious reflected signals from said reference film; detecting an extremum in said divided signal; generating independently a voltage proportional to the reference film thickness; and measuring said voltage at the time of occurrence of said divided signal maximum; and displaying a signal representing the value of said measured voltage, said measured voltage being a measure of thickness of said specimen film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-10-25 | 1986-04-26 | 1986-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-10-25 | 1990-04-26 | 1990-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-10-25 | 1994-04-26 | 1994-10-26 | $7700.00 | Window Closed / Lapsed |