US4348074A
Expired / Lapsed
US
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Application of ion implantation to LiNbO3 integrated, optical spectrum analyzers
Assignee: United States Department of the Navy
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Filing: 1980-03-03
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Granted: 1982-09-07
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Expires: 2000-03-03
Abstract
Abstract A method of improving the signal-to-noise ratio (dynamic range) in integrated optical spectrum analyzers. An integrated optical spectrum analyzer is formed with a lithium niobate (LiNbO 3 ) substrate in its usual manner. Ions such as argon or hydrogen are implanted in the bottom and sides of the LiNbO 3 which causes the substrate to absorb light at the wavelength of interest. The ion-implanted bottom and sides provide absorption with very little reflectivity and the amount of absorption is proportional to the effect of the ion and the time period of implantation. The bottom and sides behave as optical sinks, rather than as reflection or scattering centers.
Inventors
- 👤 William K. Burns
- 👤 Thomas G. Giallorenzi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:06
CPC Classifications
G; G01; G01R; G01R23/00; G01R23/16; G01R23/17; G02; G02F; G02F1/00; G02F1/01; G02F1/11; G02F1/125
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
42 words
In an improved integrated optical spectrum analyzer, including a waveguide, a substrate, a light source, a collimator lens, a transform lens, a light-detector array and a SAW means, the improvement comprising: light-absorbing means within said substrate paralleling the bottom of said substrate.
Claim 2
Dependent Claim
42 words
In an improved integrated optical spectrum analyzer, including a waveguide, a substrate, a light source, a collimator lens, a transform lens, a light-detector array and a SAW means, the improvement comprising: light-absorbing means within said substrate paralleling the bottom of said substrate.
Claim 3
Dependent Claim
25 words
The improvement in an integrated optical spectrum analyzer as claimed in claim 1 which includes: light-absorbing means within and paralleling the sides of said substrate.
Claim 4
Dependent Claim
30 words
The improvement in an integrated optical spectrum analyzer as claimed in claim 2 wherein: said light-absorbing means within and paralleling said bottom and sides of said substrate are implanted ions.
Claim 5
Dependent Claim
37 words
The improvement in an integrated optical spectrum analyzer as claimed in claim 3 wherein: said ions are selected from a group consisting of H + , H 2 + , Na + , and K + .
Claim 6
Dependent Claim
21 words
The improvement in an integrated optical spectrum analyzer as claimed in claim 3 wherein: said implanted ions are H + .
Claim 7
Dependent Claim
59 words
The improvement in an integrated optical spectrum analyzer as claimed in claim 5 wherein: said ions of H + are implanted at an energy of about 100 KeV to a fluence of from 10 16 to 10 17 ions/cm 2 for a period of about one hour to form an ion layer at a depth of about 1.0 μm.
Claim 8
Dependent Claim
50 words
The improvement in an integrated optical spectrum analyzer as claimed in claim 3 in which: a main "beam dump" is formed in said substrate by ion implantation of ions between said transform lens and said detector array for absorbing the main light beam portion not diffracted by said transform lens.
Claim 9
Dependent Claim
58 words
The improvement in an integrated optical spectrum analyzer as claimed in claim 2 in which: said light-absorbing means within and paralleling said bottom and sides of said substrate is partial reduction of said substrate by heating above 500° C. and exposing said bottom and sides to a reducing environment such as H 2 gas, Argon gas, or vacuum.
Claim 10
Dependent Claim
39 words
An improved, substantially rectangular substrate for use in an integrated optical system of the type with waveguides formed within the top surface of said substrate, the improvement comprising: light-absorbing means within said substrate paralleling the bottom of said substrate.
Claim 11
Dependent Claim
39 words
An improved, substantially rectangular substrate for use in an integrated optical system of the type with waveguides formed within the top surface of said substrate, the improvement comprising: light-absorbing means within said substrate paralleling the bottom of said substrate.
Claim 12
Dependent Claim
18 words
The improvement set forth in claim 9, wherein the light-absorbing means is a thin layer of implanted ions.
Claim 13
Dependent Claim
24 words
The improvement set forth in claim 10 wherein said thin layer of implanted ions is adjacently disposed to the bottom surface of said substrate.
Claim 14
Dependent Claim
24 words
In a substrate as set forth in claim 9, the further improvement comprising: light-absorbing means within said substrate paralleling the sides of said substrate.
Claim 15
Dependent Claim
17 words
The improvement set forth in claim 12, wherein all light-absorbing means comprise thin layers of implanted ions.
Claim 16
Dependent Claim
26 words
The improvement set forth in claim 13 wherein said thin layers of implanted ions are adjacently disposed to the bottom and side surfaces of said substrate.
Claim 17
Dependent Claim
42 words
The improvement set forth in claim 14, wherein the substrate is formed from LiNbO 3 and the ions for the implanted layers are selected from the group consisting of H + , H 2 + , Na + and K + .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-09-06 | 1986-03-08 | 1986-09-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-09-06 | 1990-03-08 | 1990-09-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-09-06 | 1994-03-08 | 1994-09-07 | $7700.00 | Window Closed / Lapsed |