Abstract An X-ray transparent mask (51) is comprised of a support ring (42) with a planar substrate stabilizer (41) thereon, the stabilizer having a plurality of apertures (43) therethrough, arranged in a "checkerboard" fashion. A thin X-ray transparent mask substrate (52) is placed over the stabilizer. (41), the substrate having X-ray absorptive metallized patterns (53) thereon which are aligned with the apertures (43). The mask (51) is positioned proximate a semiconductor wafer (56) having a photoresist coating (30) thereon. X-rays (14) are directed at the photoresist coating (30) through the apertures (43) to selectively expose the coating. The mask (51) is then indexed one aperture position and the remaining portion of coating (30) is exposed to the X-rays (14).
A method for selectively exposing a resist-coated substrate to X-ray radiation, comprising the steps of: directing the X-ray radiation through a mark comprising a checkerboard array of apertures having metallized X-ray opaque patterns aligned therewith to selectively expose approximately one-half of the coated substrate; indexing the substrate relative to the mask to align the mask apertures with the remaining unexposed portions of the substrate; and directing X-ray radiation through the patterned apertures in the mask to selectively expose the remaining one-half of the coated substrate.
Claim 2
Independent Claim
85 words
A method for selectively exposing a resist-coated substrate to X-ray radiation, comprising the steps of: directing the X-ray radiation through a mark comprising a checkerboard array of apertures having metallized X-ray opaque patterns aligned therewith to selectively expose approximately one-half of the coated substrate; indexing the substrate relative to the mask to align the mask apertures with the remaining unexposed portions of the substrate; and directing X-ray radiation through the patterned apertures in the mask to selectively expose the remaining one-half of the coated substrate.