US4293624A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for making a mask useful in X-ray lithography
Assignee: Applied Biosystems Inc
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Filing: 1979-06-26
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Granted: 1981-10-06
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Expires: 1999-06-26
Abstract
Abstract In order to make a mask for use in lithography a layer of reflective material is first deposited on a substrate which is transparent to the radiation with which the mask is to be used; a layer of photoresist then deposited; the photoresist exposed with the desired pattern by UV radiation; the photoresist developed to expose the reflective material in the areas where it is desired to deposit an absorber material; the reflective material etched away from these areas undercutting the resist; the absorber deposited through the openings in the resist and reflective layer and the resist then lifted off.
Inventors
- 👤 William D. Buckley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:04
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/02; H05K3/04; H05K3/046; H05K3/048; G; G03; G03F; G03F1/00; G03F1/22; G03F7/00; G03F7/004; G03F7/09; G03F7/091; H05K3/0002; H05K3/06; H05K3/061; H05K3/064; Y; Y10; Y10S; Y10S430/00; Y10S430/167
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
135 words
A method of making a lithography mask comprising: (a) depositing on a substrate which is transparent to the radiation to be used in the lithography process a thin layer of a material which is reflective to ultraviolet radiation; (b) covering said reflective layer with a layer of photoresist; (c) exposing the photoresist with UV radiation through a master mask to thereby expose areas at which radiation absorbers are to be located; (d) developing the photoresist to expose the reflective layer in said areas; (e) etching the reflective layer away to expose the substrate and to provide an undercut; (f) depositing a layer of a material which is opaque to the radiation with which the mask is to be used on the substrate; and (g) lifting off the resist and unwanted portions of said opaque material.
Claim 2
Independent Claim
135 words
A method of making a lithography mask comprising: (a) depositing on a substrate which is transparent to the radiation to be used in the lithography process a thin layer of a material which is reflective to ultraviolet radiation; (b) covering said reflective layer with a layer of photoresist; (c) exposing the photoresist with UV radiation through a master mask to thereby expose areas at which radiation absorbers are to be located; (d) developing the photoresist to expose the reflective layer in said areas; (e) etching the reflective layer away to expose the substrate and to provide an undercut; (f) depositing a layer of a material which is opaque to the radiation with which the mask is to be used on the substrate; and (g) lifting off the resist and unwanted portions of said opaque material.
Claim 3
Dependent Claim
24 words
The method according to claim 1 and further including the step of removing the remainder of said reflective layer after lifting off said resist.
Claim 4
Dependent Claim
15 words
The method according to claim 2 wherein said reflective layer comprises a layer of aluminum.
Claim 5
Dependent Claim
15 words
The method according to claim 1 wherein said reflective layer comprises a layer of aluminum.
Claim 6
Dependent Claim
30 words
The method according to claim 1 wherein the radiation with which said mask is to be used comprises X-ray radiation and wherein said material opaque to said radiation is gold.
Claim 7
Dependent Claim
23 words
The method according to claim 4 wherein said step of depositing said layer of gold comprises evaporating said gold onto the said substrate.
Claim 8
Dependent Claim
25 words
The method according to claim 6 and further including the step of evaporating a thin layer of chromium on said substrate before evaporating said gold.
Claim 9
Dependent Claim
46 words
The method according to claim 1 wherein the thickness of said photoresist layer is approximately 1 1/2 times the thickness of the material opaque to said radiation and wherein the thickness of said reflective layer is approximately one-third the thickness of said layer of paque material.
Claim 10
Dependent Claim
23 words
The method according to claim 1 wherein said substrate material is selected from the group consisting of a thermoset polyimide and polyethylene teraphthalate.
Claim 11
Independent Claim
156 words
A method of making a mask for use in X-ray lithography comprising: (a) depositing a thin layer of aluminum on a substrate selected from the group consisting of a thermoset polyimide film and a film of polyethylene terephthalate; (b) depositing on said layer of aluminum a layer of photoresist which is sensitive to UV radiation; (c) exposing said photoresist, through a master mask, to UV radiation; (d) developing said photoresist to expose said aluminum layer in areas where it is desired to deposit an X-ray absorber; (e) etching said aluminum layer in the areas which are exposed to remove said aluminum layer and to provide an undercut under the remaining resist layer; (f) evaporating a thin layer of chromium on said substrate; (g) evaporating a layer of gold over said chromium; and (h) lifting off said resist to leave remaining on said substrate a pattern of gold absorbers and, spaced therefrom areas of said aluminum layer.
Claim 12
Independent Claim
156 words
A method of making a mask for use in X-ray lithography comprising: (a) depositing a thin layer of aluminum on a substrate selected from the group consisting of a thermoset polyimide film and a film of polyethylene terephthalate; (b) depositing on said layer of aluminum a layer of photoresist which is sensitive to UV radiation; (c) exposing said photoresist, through a master mask, to UV radiation; (d) developing said photoresist to expose said aluminum layer in areas where it is desired to deposit an X-ray absorber; (e) etching said aluminum layer in the areas which are exposed to remove said aluminum layer and to provide an undercut under the remaining resist layer; (f) evaporating a thin layer of chromium on said substrate; (g) evaporating a layer of gold over said chromium; and (h) lifting off said resist to leave remaining on said substrate a pattern of gold absorbers and, spaced therefrom areas of said aluminum layer.
Claim 13
Dependent Claim
20 words
The method according to claim 10 and further including the step of removing the remaining aluminum layer on said substrate.
Claim 14
Dependent Claim
30 words
The method according to claim 11 wherein said aluminum layer is approximately 0.2 microns thick, said photoresist layer approximately 0.9 microns thick and said gold layer approximately 0.6 mirons thick.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-10-05 | 1985-04-06 | 1985-10-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-10-05 | 1989-04-06 | 1989-10-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-10-05 | 1993-04-06 | 1993-10-06 | $7700.00 | Window Closed / Lapsed |