US4287772A
Expired / Lapsed
US
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Strain gage transducer and process for fabricating same
Assignee: GULTON-STATHAM TRANSDUCERS Inc A DELAWARE Corp
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Filing: 1979-09-04
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Granted: 1981-09-08
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Expires: 1999-09-04
Abstract
Abstract A transducer which includes a metal strain gage material formed on a flexible monocrystalline silicon diaphragm is disclosed. The transducer is fabricated to a large extent with semiconductor processing steps. Gold is diffused into a platinum-tungsten gage material. This allows the gage material to be chemically etched in the presence of other metals to define the active gage resistors. In the presently preferred embodiment, these resistors are formed over thin areas of the diaphragm to provide increased linearity and sensitivity.
Inventors
- 👤 Carlyle A. Mounteer
- 👤 Ronald L. Poteet
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:36
CPC Classifications
G; G01; G01L; G01L19/00; G01L19/14; G01L19/148; G01L19/0061; G01L19/0084; G01L19/147; G01L9/00; G01L9/0041; G01L9/0042; G01L9/0051
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
65 words
A strain gage transducer comprising: a monocrystalline silicon substrate having a first and second surface; a silicon dioxide layer disposed on said first surface of said silicon substrate; a plurality of platinum alloy strain gage resistors formed on said silicon dioxide layer; a plurality of gold leads disposed over said silicon dioxide layer interconnecting said resistors; whereby a low cost, high performance transducer is realized.
Claim 2
Dependent Claim
65 words
A strain gage transducer comprising: a monocrystalline silicon substrate having a first and second surface; a silicon dioxide layer disposed on said first surface of said silicon substrate; a plurality of platinum alloy strain gage resistors formed on said silicon dioxide layer; a plurality of gold leads disposed over said silicon dioxide layer interconnecting said resistors; whereby a low cost, high performance transducer is realized.
Claim 3
Dependent Claim
33 words
The transducer defined by claim 1 wherein said substrate defines mesas on said second surface, such that the areas of said substrate between said mesas are thinner, said areas generally underlying said resistors.
Claim 4
Dependent Claim
16 words
The transducer defined by claim 2 wherein said resistors and leads form a Wheatstone bridge circuit.
Claim 5
Dependent Claim
16 words
The transducer defined by claim 3 including a cover covering said resistors and hermetically sealing them.
Claim 6
Dependent Claim
21 words
The transducer defined by claim 4 wherein said cover comprises a silicon member sealed to said first surface of said substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-09-07 | 1985-03-09 | 1985-09-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-09-07 | 1989-03-09 | 1989-09-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-09-07 | 1993-03-09 | 1993-09-08 | $7700.00 | Window Closed / Lapsed |