Surface hafnium-titanium carbide coated hard alloy and method

Claim 2

A surface coated hard alloy material comprising: a substrate made of a cemented carbide, cermet or the like material; a first coating layer constituted by a film of a hafnium compound and coating said substrate; a second coating layer constituted by a film of solid solution of a hafnium compound and a titanium compound and coating said first coating layer; and a third coating layer constituted by a film of a titanium compound.

Claim 3

A surface coated hard alloy material as claimed in claim 1, wherein said hafnium compound is one or more of hafnium carbide HfC, hafnium nitride HfN and hafnium carbonitride HfC.N, said titanium compound is one or more of titanium carbide TiC, titanium nitride TiN and titanium carbonitride TiC.N, and said solid solution is one or more of hafnium-titanium carbide (Hf.Ti)C, hafnium-titanium nitride (Hf.Ti)N and hafnium-titanium carbonitride (Hf.Ti)C.N.

Claim 4

A surface coated hard alloy material as claimed in claim 1, wherein the thicknesses of said first, second and third coating layers are 0.5 to 10 μm, 0.1 to 5 μm and 0.5 to 10 μm, respectively, and the total thickness of these coating layers falls within the region of 2 to 20 μm.

Claim 5

A surface coated hard alloy material as claimed in claim 1, wherein said hafnium compound constituting said first coating layer is the hafnium carbide HfC, said solid solution constituting said second coating layer is the hafnium-titanium carbide (Hf.Ti)C, and said titanium compound constituting said third coating layer is titanium carbide TiC.

Claim 6

A surface coated hard alloy material as claimed in claim 4, wherein the mol% of HfC to TiC of said hafnium-titanium carbide (Hf.Ti)C falls within the range of between 20:80 and 80:20.

Claim 7

A surface coated hard alloy material as claimed in claim 4, wherein said hafnium carbide constituting said first coating layer, said hafnium-titanium carbide constituting said second coating layer and said titanium carbide constituting said third coating layers have thicknesses of about 3 μm, about 1 μm and about 3 μm, respectively, and the mol ratio of HfC to TiC of said hafnium-titanium carbide is about 40:60.

Claim 8

A surface coated hard alloy material as claimed in claim 1, characterized in that said surface coated hard alloy material is formed by forming said hafnium compound, said solid solution of said hafnium compound and said titanium compound, and said titanium compound successively on said substrate in a common reaction system, in a glow discharge under a reduced pressure, by at first forming mainly high grade halides, introducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas, passing the mixture gas to said substrate which has been heated by an induction heating.

Claim 9

A surface coated hard alloy material as claimed in claim 1, characterized in that said material is used as a material of a multi-coated cutting tool.

Claim 12

(i) a first step which consists in forming mainly a high grade hafnium halide (source gas), introducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas as the reaction gas into said source gas, bringing the mixture gas to a substrate of said hard alloy material which has been heated up to 850° C. to 1250° C. so as to coat said substrate with said hafnium compound under a reduced pressure of not higher than 1 Torr and in the presence of a glow discharge;

Claim 13

(i) a first step which consists in forming mainly a high grade hafnium halide (source gas), introducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas as the reaction gas into said source gas, bringing the mixture gas to a substrate of said hard alloy material which has been heated up to 850° C. to 1250° C. so as to coat said substrate with said hafnium compound under a reduced pressure of not higher than 1 Torr and in the presence of a glow discharge;

Claim 14

(ii) a second step which consists in forming mainly a high grade hafnium halide and a high grade titanium halide (source gas), introducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas as the reaction gas into said source gas, introducing the mixture gas to said substrate which has been heated up to 850° C. to 1250° C. so as to coat said hafnium compound formed in said first step on said substrate with a solid solution of said hafnium compound and said titanium compound, under a reduced pressure of not higher than 1 Torr and in the presence of a glow discharge; and

Claim 15

(ii) a second step which consists in forming mainly a high grade hafnium halide and a high grade titanium halide (source gas), introducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas as the reaction gas into said source gas, introducing the mixture gas to said substrate which has been heated up to 850° C. to 1250° C. so as to coat said hafnium compound formed in said first step on said substrate with a solid solution of said hafnium compound and said titanium compound, under a reduced pressure of not higher than 1 Torr and in the presence of a glow discharge; and

Claim 16

(iii) a third step which consists in forming mainly a high grade titanium halide (source gas), introducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas as the reaction gas, introducing the mixture gas to said substrate which has been heated up to 850° C. to 1250° C. so as to coat said solid solution of said hafnium compound and said titanium compound, which has been formed in said second step, with a titanium compound under a reduced pressure of not higher than 1 Torr and in the presence of a glow discharge.

Claim 17

(iii) a third step which consists in forming mainly a high grade titanium halide (source gas), introducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas as the reaction gas, introducing the mixture gas to said substrate which has been heated up to 850° C. to 1250° C. so as to coat said solid solution of said hafnium compound and said titanium compound, which has been formed in said second step, with a titanium compound under a reduced pressure of not higher than 1 Torr and in the presence of a glow discharge.

Claim 18

A method of producing a surface coated hard alloy material as claimed in claim 9, wherein said high grade hafnium halide and said high grade titanium halide are hafnium tetraiodide HfI 4 and titanium tetraiodide TiI 4 , respectively.

Claim 19

A method of producing a surface coated hard alloy material as claimed in claim 9, wherein the heating is effected by a high frequency induction heating.

Claim 20

A method of producing a surface coated hard alloy material as claimed in claim 9, wherein said reaction gas is the hydrocarbon gas.

Claim 21

A method of producing a surface coated hard alloy material as claimed in claim 9, wherein said first step is conducted in two stages: a first stage in which the heating temperature is 1050° C. to 1250° C. and a second stage in which the heating temperature is 850° C. to 1050° C.

Claim 22

A method of producing a surface coated hard alloy material as claimed in claim 9, wherein said reduced pressure in said first step is formed in two stages: a first stage of 0.1 to 1.0 Torr and a second stage of less than 0.1 Torr.

Claim 23

A method of producing a surface coated hard alloy material as claimed in claim 9, wherein said hafnium compound is one or more of hafnium carbide HfC, hafnium nitride HfN and hafnium carbonitride HfC.N, said solid solution is one or more of hafnium-titanium carbide (Hf.Ti)C, hafnium-titanium nitride (Hf.Ti)N and hafnium-titanium carbonitride (Hf.Ti)C.N, and said titanium compound is one or more of titanium carbide TiC, titanium nitride TiN and titanium carbonitride TiC.N.

Claim 24

A method of producing a surface coated hard alloy material as claimed in claim 9, wherein said substrate is placed on a substrate holder which is constituted by a gauze wire set to extend in parallel with the magnetic field.

Claim 25

A method of producing a surface coated hard alloy material as claimed in claim 9, wherein hafnium and a halogen are made to react with each other at a temperature of 200° C. to 600° C. to form mainly a high grade hafnium halide, and titanium and a halogen are made to react with each other at a temperature of 200° C. to 350° C. to form mainly a high grade titanium halide.

Claim 26

A method of producing a surface coated hard alloy material as claimed in claim 9, wherein the following steps are carried out successively in a common reaction system: (i) a first step which consists in forming mainly hafnium tetraiodide HfI 4 as a source gas, introducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas as the reaction gas, and introducing the mixture gas to said substrate of said hard alloy which is heated in a first stage to 1050° C. to 1250° C. and in a second stage to 850° C. to 1050° C. by a high frequency induction heating means, said first and second stages of heating being made under a reduced pressures of 0.1 to 1.0 Torr, and below 0.1 Torr, respectively, so as to coat said substrate with a hafnium compound in the presence of a glow discharge; (ii) a second step which consists in forming mainly hafnium tetraiodide HfI 4 and titanium tetraiodide TiI 4 as source gases, introducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas as the reaction gas, and introducing the mixture gas into said substrate which has been heated to 850° C. to 1050° C. by said high frequency heating means, so as to coat said hafnium compound, which has been formed in said first step, with a solid solution of said hafnium compound and said titanium compound under a reduced pressure of not higher than 0.1 Torr in the presence of a flow discharge; and (iii) third step which consists in forming mainly the titanium tetraiodide TiI 4 as the source gas, intorducing at least one of hydrocarbon gas, nitrogen gas and ammonia gas into said soucce gas, and introducing the mixture gas to said substrate which has been heated to 850° C. to 1050° C. by said high frequency induction heating means so as to coat said solid solution of said hafnium compound and said titanium compound, which has been formed in said second step, with the titanium compound under a reduced pressure of not higher than 0.1 Torr in the presence of a glow discharge.

Claim 27

A method of producing a surface coated hard alloy material as claimed in claim 18, characterized in that the mol% of said HfC to said TiC in said solid solution is adjusted to fall within the range of between 20:80 and 80:20, by adjusting the rate of supply of mainly said hafnium tetraiodide HfT 4 and titanium tetraiodide TiI 4 as the source gases in said second step.