US4243743A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photosensitive compositions
Assignee: Toray Industries Inc
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Filing: 1979-04-11
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Granted: 1981-01-06
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Expires: 1999-04-11
Abstract
Abstract This invention relates to a photosensitive composition comprising a precursor of a heat resistant polymer having carboxylic groups and a compound having a photosensitive olefinic double bond and an amino or quaternary ammonium salt. The photosensitive composition can give highly heat resistant relief patterns with good edge sharpness, good mechanical and chemical properties as well as good insulating properties. The heat resistant relief patterns obtained from the composition of this invention are especially useful as insulating, passivation or protective coatings in semiconductor devices.
Inventors
- 👤 Hiroo Hiramoto
- 👤 Masuichi Eguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:42
CPC Classifications
C; C08; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1003; C08G69/00; C08G69/02; C08G69/26; C08G69/28; C08G73/1007; C08G73/1025; C08G73/14; G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/032; G03F7/037; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/107
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
93 words
A photosensitive composition comprising (1) a polymer [I] containing a repeating unit [II] of the formula ##STR13## wherein R 1 and R 2 each comprise a carbocyclic or heterocyclic nucleus; R 3 is selected from the group consisting of hydrogen, an alkali metal ion and an ammonium ion; n is 1 or 2, and COOR 3 is located in an ortho or peri position with respect to the amide linkage. (2) an organic compound [III] having a photo- di- or polymerizable olefinic double bond and an amino radical or a quaternary ammonium salt.
Claim 2
Dependent Claim
93 words
A photosensitive composition comprising (1) a polymer [I] containing a repeating unit [II] of the formula ##STR13## wherein R 1 and R 2 each comprise a carbocyclic or heterocyclic nucleus; R 3 is selected from the group consisting of hydrogen, an alkali metal ion and an ammonium ion; n is 1 or 2, and COOR 3 is located in an ortho or peri position with respect to the amide linkage. (2) an organic compound [III] having a photo- di- or polymerizable olefinic double bond and an amino radical or a quaternary ammonium salt.
Claim 3
Dependent Claim
12 words
The composition of claim 1 further including a photoinitiator and/or a photosensitizer.
Claim 4
Dependent Claim
17 words
The composition of claim 1, in which the polymer [I] contains two or more different repeating units.
Claim 5
Dependent Claim
13 words
The composition of claim 1, in which the polymer [I] is polyimide precursor.
Claim 6
Dependent Claim
41 words
The composition of claim 1; in which R 1 is selected from the group consisting of phenylene, naphthalene and biphenyl of the formula ##STR14## where M represents O, SO 2 , CH 2 or CO and z is 0 or 1.
Claim 7
Dependent Claim
19 words
The composition of claim 1, in which R 1 is selected from the group consisting of phenylene and benzophenone.
Claim 8
Dependent Claim
21 words
The composition of claim 1, in which R 2 is selected from the group consisting of phenylene, diphenylether, diphenylmethane and diphenylsulfone.
Claim 9
Dependent Claim
63 words
The composition of claim 1, in which the organic compound [III] is ##STR15## wherein R 4 is hydrogen or phenyl; R 5 is hydrogen or alkyl having 1 to 2 carbon atoms; R 6 is an unsubstituted or substituted hydrocarbon radical having 2 to 4 carbon atoms; and each of R 7 and R 8 is alkyl having 1 to 3 carbon atoms.
Claim 10
Dependent Claim
26 words
The composition of claim 1, in which the organic compound [III] is ##STR16## wherein R 9 is hydrogen or alkyl having 1 to 2 carbon atoms.
Claim 11
Dependent Claim
22 words
The composition of claim 1, in which the organic compound [III] is ##STR17## wherein R 10 is hydrogen or CH 3 .
Claim 12
Dependent Claim
26 words
The composition of claim 2, in which the photoinitiator and/or the photosensitizer is selected from the group consisting of Michler's ketone, benzoin ether and 2-tertiarybutyl-9, 10-anthraquinone.
Claim 13
Dependent Claim
11 words
The composition of claim 6, in which R 2 is diphenylether.
Claim 14
Dependent Claim
12 words
The composition of claim 11, in which the photoinitiator is Michler's ketone.
Claim 15
Dependent Claim
24 words
The composition of claim 1, wherein compound [III] is selected from the group consisting of diethylaminoethylmethacrylate, diethylaminoethylacrylate, dimethylaminoethylmethacrylate, dimethylaminoethylacrylate, 2-vinylpyridine, 2-methyl-5-vinylpyridine, allylamine and methallyamine.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-01-06 | 1984-07-07 | 1985-01-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-01-06 | 1988-07-07 | 1989-01-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-01-06 | 1992-07-07 | 1993-01-06 | $7700.00 | Window Closed / Lapsed |