Photovoltaic semiconductor devices and methods of making same

Claim 1

A photovoltaic device comprising a body of cubic symmetry monocrystalline semiconductor material of one conductivity type having a pair of opposite parallel major surfaces, each parallel to a (100) crystallographic plane of said body, a plurality of recesses in said body, each in the form of a quadrangular pyramid with the base of the pyramid coplanar with one of said pair of major surfaces and extending a uniform distance into said body, each of the sides of the recesses being parallel to a (111) plane of said body of monocrystalline semiconductor material, a first thin region of opposite conductivity type in said body along the other of said pair of major surfaces of said body, a second this region of opposite conductivity type in said body along said one major surface of said body, a plurality of third thin regions of opposite conductivity type, each in said body along the sides of said recesses, each of said third thin regions contacting said first and second thin regions, a first conductive layer connected to said second and third thin regions of opposite conductivity type, a second conductive layer connected to said one type conductivity region of said body over a portion of said one major surface.

Claim 11

A method of making a photovoltaic device comprising providing a substrate of cubic symmetry monocrystalline semiconductor material of one conductivity type having a pair of parallel major surfaces, each parallel to a (100) crystallographic plane of said monocrystalline semiconductor material, providing a first etch mask over one of said pair of major surfaces and a second etch mask over the other of said pair of major surfaces, forming in said first etch mask a plurality of first openings to expose areas in a first portion of said one major surface, each first opening being identical in form and being bounded by two pairs of parallel opposed edges in said one major surface, each of said pairs of edges being substantially parallel to a respective <110> direction in said one major surface, each pair of parallel edges of each first opening being spaced apart by a distance slightly greater than the distance between said major surfaces multiplied by √2, etching the exposed areas of said substrate with an anisotropic etchant to form a plurality of apertures each in the form of a quadrangular pyramid with the base of the pyramid being coplanar with said one major surface and extending from said one major surface to said other major surface to form a second opening therein substantially smaller than a respective one of said first openings, each of the sides of said apertures being parallel to a (111) plane of said monocrystalline semiconductor material. removing said first etch mask at least from said first portion of said one major surface, introducing a first dopant of opposite conductivity type into said other major surface to form a first thin region of opposite conductivity type in said substrate along said other major surface, introducing a second dopant of opposite conductivity type into said first portion of said major surface to form a second thin region of opposite conductivity type in said substrate along said first portion of said one major surface, introducing a third dopant of opposite conductivity type into the sides of said apertures to form third thin regions of opposite conductivity type in said substrate along the sides of said apertures, stripping said one major surface, and said other major surface of overlying layers of masking material, depositing a layer of conductive material on said one major surface and the sides of said apertures, patterning said conductive layer to provide a first electrode contacting said regions of opposite conductivity type adjacent said first portion of said one major surface and the sides of said apertures and a second electrode contacting said substrate of one conductivity type at another portion of said one major surface.

Claim 12

A method of making a photovoltaic device comprising providing a substrate of cubic symmetry monocrystalline semiconductor material of one conductivity type having a pair of parallel major surfaces, each parallel to a (100) crystallographic plane of said monocrystalline semiconductor material, providing a first etch mask over one of said pair of major surfaces and a second etch mask over the other of said pair of major surfaces, forming in said first etch mask a plurality of first openings to expose areas in a first portion of said one major surface, each first opening being identical in form and being bounded by two pairs of parallel opposed edges in said one major surface, each of said pairs of edges being substantially parallel to a respective <110> direction in said one major surface, each pair of parallel edges of each first opening being spaced apart by a distance slightly greater than the distance between said major surfaces multiplied by √2, etching the exposed areas of said substrate with an anisotropic etchant to form a plurality of apertures each in the form of a quadrangular pyramid with the base of the pyramid being coplanar with said one major surface and extending from said one major surface to said other major surface to form a second opening therein substantially smaller than a respective one of said first openings, each of the sides of said apertures being parallel to a (111) plane of said monocrystalline semiconductor material. removing said first etch mask at least from said first portion of said one major surface, introducing a first dopant of opposite conductivity type into said other major surface to form a first thin region of opposite conductivity type in said substrate along said other major surface, introducing a second dopant of opposite conductivity type into said first portion of said major surface to form a second thin region of opposite conductivity type in said substrate along said first portion of said one major surface, introducing a third dopant of opposite conductivity type into the sides of said apertures to form third thin regions of opposite conductivity type in said substrate along the sides of said apertures, stripping said one major surface, and said other major surface of overlying layers of masking material, depositing a layer of conductive material on said one major surface and the sides of said apertures, patterning said conductive layer to provide a first electrode contacting said regions of opposite conductivity type adjacent said first portion of said one major surface and the sides of said apertures and a second electrode contacting said substrate of one conductivity type at another portion of said one major surface.

Claim 17

A method of making a photovoltaic device comprising providing a substrate of cubic symmetry monocrystalline semiconductor material of one conductivity type having a pair of parallel major surfaces, each parallel to a (100) cyrstallographic plane of said monocrystalline semiconductor material, providing a first etch mask over one of said pair of surfaces and a second etch mask over the other of said pair of major surfaces, forming in said first etch mask a plurality of openings to expose areas in a first portion of said one major surface, each opening being identical in form and being bounded by two pairs of parallel opposed edges in said one major surface, each of said pairs of edges being substantially parallel to a respective <110> direction in said one major surface, each pair of parallel edges of each opening being spaced apart by a distance slightly less than the distance between said major surfaces multiplied by √2, etching the exposed areas of said substrate with an anisotropic etchant to etch a plurality of recesses each in the form of a quadrangular pyramid with the base of the pyramid being coplanar with said one major surface and the apex thereof being located a small predetermined distance from said other major surface, each of the sides of said apertures being parallel to a (111) plane of said monocrystalline semiconductor material, removing said first etch mask at least from said first portion of said one major surface, introducing a first dopant of opposite conductivity type into said other major surface to form a first thin region of opposite conductivity type in said substrate along said other major surface, introducing a second dopant of opposite conductivity type into said first portion of said one major surface to form a second thin region of opposite conductivity type in said substrate along said first portion of said one major surface, introducing a third dopant of opposite conductivity type into the sides of said recesses to form third thin regions of opposite conductivity type in said substrate along the sides of said recesses, the thickness of said third thin region being greater than said small predetermined distance, stripping said one major surface and said other major surface of overlying layers of masking material, depositing a layer of conductive material on said one major surface and the sides of said recesses, patterning said conductive layer to provide a first electrode contacting said regions of opposite conductivity type adjacent said first portion of said one major surface and the sides of said recesses and a second electrode contacting said substrate of one conductivity type at another portion of said one major surface.

Claim 18

A method of making a photovoltaic device comprising providing a substrate of cubic symmetry monocrystalline semiconductor material of one conductivity type having a pair of parallel major surfaces, each parallel to a (100) cyrstallographic plane of said monocrystalline semiconductor material, providing a first etch mask over one of said pair of surfaces and a second etch mask over the other of said pair of major surfaces, forming in said first etch mask a plurality of openings to expose areas in a first portion of said one major surface, each opening being identical in form and being bounded by two pairs of parallel opposed edges in said one major surface, each of said pairs of edges being substantially parallel to a respective <110> direction in said one major surface, each pair of parallel edges of each opening being spaced apart by a distance slightly less than the distance between said major surfaces multiplied by √2, etching the exposed areas of said substrate with an anisotropic etchant to etch a plurality of recesses each in the form of a quadrangular pyramid with the base of the pyramid being coplanar with said one major surface and the apex thereof being located a small predetermined distance from said other major surface, each of the sides of said apertures being parallel to a (111) plane of said monocrystalline semiconductor material, removing said first etch mask at least from said first portion of said one major surface, introducing a first dopant of opposite conductivity type into said other major surface to form a first thin region of opposite conductivity type in said substrate along said other major surface, introducing a second dopant of opposite conductivity type into said first portion of said one major surface to form a second thin region of opposite conductivity type in said substrate along said first portion of said one major surface, introducing a third dopant of opposite conductivity type into the sides of said recesses to form third thin regions of opposite conductivity type in said substrate along the sides of said recesses, the thickness of said third thin region being greater than said small predetermined distance, stripping said one major surface and said other major surface of overlying layers of masking material, depositing a layer of conductive material on said one major surface and the sides of said recesses, patterning said conductive layer to provide a first electrode contacting said regions of opposite conductivity type adjacent said first portion of said one major surface and the sides of said recesses and a second electrode contacting said substrate of one conductivity type at another portion of said one major surface.