US4212663A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reactants delivery system for optical waveguide manufacturing
Assignee: Corning Glass Works
•
Filing: 1978-01-26
•
Granted: 1980-07-15
•
Expires: 1998-01-26
Abstract
Abstract Apparatus for forming a vapor of material to be hydrolyzed and/or oxidized and entraining the vapor in a carrier gas. The source material, in liquid form, is pumped to a point in the column above a porous packing. As the liquid progresses downward through the packing, it encounters a rising countercurrent of carrier gas. The source material vaporizes and is delivered to vapor deposition by the carrier gas. The source material vaporized in the apparatus may alternatively be delivered to an externally heated tubular reactor, or to any other kind of chemical vapor deposition (CVD) reactor.
Inventors
- 👤 Mohd A. Aslami
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 06:27
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4487; C03; C03B; C03B37/00; C03B37/01; C03B37/012; C03B37/014; C03B37/01413; C03B37/018; C03B37/01807; C23C16/4481; C23C16/4482; C03B2207/00; C03B2207/80; C03B2207/81; C03B2207/85; C03B2207/86
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
172 words
Apparatus for forming particulate material, comprising: vapor deposition means for receiving at least one source material vapor entrained in a carrier gas and directing the vapor to a substrate to form a layer of material having a predetermined composition; means for disposing a substrate in proximity to said vapor deposition means for accumulating said material; a column including a porous packing material disposed therein, said column having an outlet disposed above said packing and in fluid flow communication with said deposition means; a reservoir in fluid communication with said column for receiving liquid source material flowing through said packing; pump means coupled between said reservoir and a point in said column for recirculating said source material through said packing; a source of carrier gas; means for introducing the carrier gas into said column at a point remote from said outlet for causing said carrier gas to flow through said packing; whereby the carrier gas entrains vapor of said source material and transports said vapor from said column outlet to said deposition means.
Claim 2
Dependent Claim
172 words
Apparatus for forming particulate material, comprising: vapor deposition means for receiving at least one source material vapor entrained in a carrier gas and directing the vapor to a substrate to form a layer of material having a predetermined composition; means for disposing a substrate in proximity to said vapor deposition means for accumulating said material; a column including a porous packing material disposed therein, said column having an outlet disposed above said packing and in fluid flow communication with said deposition means; a reservoir in fluid communication with said column for receiving liquid source material flowing through said packing; pump means coupled between said reservoir and a point in said column for recirculating said source material through said packing; a source of carrier gas; means for introducing the carrier gas into said column at a point remote from said outlet for causing said carrier gas to flow through said packing; whereby the carrier gas entrains vapor of said source material and transports said vapor from said column outlet to said deposition means.
Claim 3
Dependent Claim
23 words
Apparatus according to claim 1, wherein said vapor deposition means comprises a flame hydrolysis burner for hydrolyzing said vapor to form a soot.
Claim 4
Dependent Claim
32 words
Apparatus according to claim 1, wherein said means for introducing introduces the carrier gas into said column at a point below said packing, and said column outlet is disposed above said packing.
Claim 5
Dependent Claim
23 words
Apparatus according to claim 3, further including temperature control means for maintaining said liquid source material in said reservoir at a predetermined temperature.
Claim 6
Dependent Claim
23 words
Apparatus according to claim 4, wherein said means for introducing comprises mass flow control means for regulating the flow of the carrier gas.
Claim 7
Dependent Claim
27 words
Apparatus according to claim 5, further including a second packing disposed in said column between the point of introduction of said liquid source material and said outlet.
Claim 8
Dependent Claim
28 words
Apparatus according to claim 6, further including temperature control means disposed in heat transfer relationship with said second packing for maintaining said second packing at a predetermined temperature.
Claim 9
Dependent Claim
23 words
Apparatus according to claim 7, wherein said means for introducing expels carrier gas below the surface of said source material in said reservoir.
Claim 10
Dependent Claim
170 words
Apparatus for forming an optical waveguide blank having a radially varying index of refraction, comprising: vapor deposition means for receiving at least one source material vapor entrained in a carrier gas and directing said vapor towrd a starting member; means for rotatably disposing a substantially cylindrical starting member in proximity to said vapor deposition means for accumulating source material from said deposition means; a reservoir for retaining a quantity of the source material in liquid form; a column disposed above said reservoir and including a porous packing, said column having an outlet disposed above said packing and in fluid flow communication with said deposition means; pump means for withdrawing the source material from the reservoir and discharging the material into said column at a point above the lowermost end of said packing; a source of carrier gas; control means for determining the flow rate of said carrier gas; and means coupling said control means to said column for introducing carrier gas into said packing at a point below said outlet.
Claim 11
Dependent Claim
170 words
Apparatus for forming an optical waveguide blank having a radially varying index of refraction, comprising: vapor deposition means for receiving at least one source material vapor entrained in a carrier gas and directing said vapor towrd a starting member; means for rotatably disposing a substantially cylindrical starting member in proximity to said vapor deposition means for accumulating source material from said deposition means; a reservoir for retaining a quantity of the source material in liquid form; a column disposed above said reservoir and including a porous packing, said column having an outlet disposed above said packing and in fluid flow communication with said deposition means; pump means for withdrawing the source material from the reservoir and discharging the material into said column at a point above the lowermost end of said packing; a source of carrier gas; control means for determining the flow rate of said carrier gas; and means coupling said control means to said column for introducing carrier gas into said packing at a point below said outlet.
Claim 12
Dependent Claim
21 words
Apparatus according to claim 9, wherein said carrier gas is injected into said reservoir below the surface of the source material.
Claim 13
Dependent Claim
23 words
Apparatus according to claim 10, further including temperature control means associated with said reservoir for maintaining the source material at a predetermined temperature.
Claim 14
Dependent Claim
27 words
Apparatus according to claim 9, wherein said vapor deposition means comprises a flame hydrolysis burner, said burner serving to hydrolyze said vapor to form a glass soot.
Claim 15
Dependent Claim
28 words
Apparatus according to claim 11, wherein said control means further comprises a mass flow control for regulating the mass flow rate of said carrier gas into said reservoir.
Claim 16
Dependent Claim
27 words
Apparatus according to claim 13, wherein said packing comprises a multiplicity of discrete ceramic elements, said elements having surfaces which are substantially non-porous to the source material.
Claim 17
Dependent Claim
23 words
Apparatus according to claim 14, further including second packing means disposed within said column and above the discharge point of said pump means.
Claim 18
Dependent Claim
30 words
Apparatus according to claim 15, further including a second temperature control means disposed in heat transfer relation to said second packing for maintaining said second packing at a predetermined temperature.
Claim 19
Dependent Claim
21 words
Apparatus according to claim 16, wherein said second temperature is greater than the temperature of the source material in said reservoir.
Claim 20
Dependent Claim
143 words
Apparatus for use in a vapor deposition system for forming an optical waveguide blank including deposition means for directing a gaseous stream having a source material entrained in a carrier gas to a substrate, said apparatus comprising: a column including a porous packing material disposed therein, said column having an outlet disposed above said packing for fluid flow communication with the deposition means; a reservoir in fluid communication with said column for receiving liquid source material for flowing through said packing; means coupled between said reservoir and said column for recirculating said source material through said packing; and means for introducing the carrier gas into said column remote from said outlet for causing the carrier gas to flow through said packing; whereby the carrier gas entrains vapor of said source material and transports said vapor from said column outlet to said deposition means.
Claim 21
Dependent Claim
143 words
Apparatus for use in a vapor deposition system for forming an optical waveguide blank including deposition means for directing a gaseous stream having a source material entrained in a carrier gas to a substrate, said apparatus comprising: a column including a porous packing material disposed therein, said column having an outlet disposed above said packing for fluid flow communication with the deposition means; a reservoir in fluid communication with said column for receiving liquid source material for flowing through said packing; means coupled between said reservoir and said column for recirculating said source material through said packing; and means for introducing the carrier gas into said column remote from said outlet for causing the carrier gas to flow through said packing; whereby the carrier gas entrains vapor of said source material and transports said vapor from said column outlet to said deposition means.
Claim 22
Dependent Claim
22 words
Apparatus according to claim 18, wherein said deposition means comprises a flame hydrolysis burner for hydrolyzing said vapor to form a soot.
Claim 23
Dependent Claim
31 words
Apparatus according to claim 18, wherein said means for introducing introduces the carrier gas into said column at point below said packing, and said column outlet is disposed above said packing.
Claim 24
Dependent Claim
13 words
Apparatus according to claim 18, wherein said means for recirculating comprises a pump.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-07-15 | 1984-01-14 | 1984-07-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-07-15 | 1988-01-14 | 1988-07-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-07-15 | 1992-01-14 | 1992-07-15 | $7700.00 | Window Closed / Lapsed |