Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
167 words
Article of manufacture comprising at least one substrate supported device, said device comprising (a) an active layer consisting essentially of a semiconductor material having extrinsic properties due to a net doping level, (b) a drain contact on a first surface portion of said active layer, said active layer comprising (1) a first region which is in contact with at least a portion of said drain contact and (2) a second region which, in a direction perpendicular to said active layer, extends from said first region through the remainder of said active layer, net doping level being less in said second region than in said first region, and (c) means for providing said second region with free carriers at a point beyond the edge of said drain contact CHARACTERIZED IN THAT said first region extends, in a direction parallel to said active layer, beyond said edge towards said point for a distance which is at least equal to the thickness of said active layer measured at said edge.
Claim 2
Dependent Claim
167 words
Article of manufacture comprising at least one substrate supported device, said device comprising (a) an active layer consisting essentially of a semiconductor material having extrinsic properties due to a net doping level, (b) a drain contact on a first surface portion of said active layer, said active layer comprising (1) a first region which is in contact with at least a portion of said drain contact and (2) a second region which, in a direction perpendicular to said active layer, extends from said first region through the remainder of said active layer, net doping level being less in said second region than in said first region, and (c) means for providing said second region with free carriers at a point beyond the edge of said drain contact CHARACTERIZED IN THAT said first region extends, in a direction parallel to said active layer, beyond said edge towards said point for a distance which is at least equal to the thickness of said active layer measured at said edge.
Claim 3
Dependent Claim
27 words
Device of claim 1 in which net doping level in said second region is in the range of 10 16 to 3×10 17 per cm 3 .
Claim 4
Dependent Claim
27 words
Device of claim 1 in which net doping level in said first region is in the range of 10 16 to 10 20 per cm 3 .
Claim 5
Dependent Claim
65 words
Device of claim 1 in which net doping level per cm 2 in said first region is at least 1.5 times as great as net doping level per cm 2 in said second region and in which net doping level per cm 3 in said first region is at least 1.5 times as great as net doping level per cm 3 in said second region.
Claim 6
Dependent Claim
18 words
Device of claim 1 in which a buffer layer is interposed between said substrate and said active layer.
Claim 7
Dependent Claim
11 words
Device of claim 1 in which said second region is epitaxial.
Claim 8
Dependent Claim
11 words
Device of claim 6 in which said first region is epitaxial.
Claim 9
Dependent Claim
21 words
Device of claim 1 in which said means is a source contact on a second surface portion of said active layer.
Claim 10
Dependent Claim
34 words
Device of claim 8 in which said active layer comprises a third region which is in contact with said source contact and in which net doping level is greater than in said second region.
Claim 11
Dependent Claim
21 words
Device of claim 9 in which said third region extends beyond the edge of said source contact towards said drain contact.
Claim 12
Dependent Claim
11 words
Device of claim 9 in which said third region is epitaxial.
Claim 13
Dependent Claim
21 words
Device of claim 8 in which said device comprises a gate electrode on a third surface portion of said active layer.
Claim 14
Dependent Claim
19 words
Device of claim 1 in which a doping level has been achieved in said active layer by ion implantation.