US4183545A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rotary vacuum-chuck using no rotary union
Assignee: Advanced Semiconductor Materials America Inc
•
Filing: 1978-07-28
•
Granted: 1980-01-15
•
Expires: 1998-07-28
Abstract
Abstract A vacuum-chuck having no expensive, complex rotary unions in the vacuum lines maintains its vacuum by maintaining the surfaces which rotate with respect to each other in intimate contact with a glabrous, self-lubricating element. The vacuum is communicated to said revolving surfaces through openings in said element.
Inventors
- 👤 John K. Daly
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:01
CPC Classifications
B; B23; B23B; B23B31/00; B23B31/02; B23B31/24; B23B31/30; B23B31/307; Y; Y10; Y10T; Y10T279/00; Y10T279/11
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
209 words
In a rotary vacuum-chuck system having a rotary element with a work surface to which a workpiece is adhered by vacuum means and a fixed element providing support for said rotary element, an improvement for maintaining the vacuum to said work surface while said rotary element is in motion, said improvement comprising: (a) a substantially flat vacuum sealing element emplaced between said rotary element and said fixed element and having a smooth, self-lubricating surface providing low friction, slidable contact support for said rotary element; (b) on the side of said rotary element in contact with said sealing element, two radially spaced annular raised bearing surfaces defining a vacuum channel in close proximity to and concentric with the center of rotation of said rotary element, said vacuum channel being sized such that evacuation thereof improves the sealing contact of said raised bearing surfaces with said sealing element while permitting said rotary element to be rotated easily about its center of rotation, said sealing element having openings communicating with said vacuum channel; (c) means for exhausting the air from said vacuum channel through said openings; and (d) means for communicating the vacuum produced in said vacuum channel to said work surface such that a workpiece will adhere to said work surface.
Claim 2
Dependent Claim
209 words
In a rotary vacuum-chuck system having a rotary element with a work surface to which a workpiece is adhered by vacuum means and a fixed element providing support for said rotary element, an improvement for maintaining the vacuum to said work surface while said rotary element is in motion, said improvement comprising: (a) a substantially flat vacuum sealing element emplaced between said rotary element and said fixed element and having a smooth, self-lubricating surface providing low friction, slidable contact support for said rotary element; (b) on the side of said rotary element in contact with said sealing element, two radially spaced annular raised bearing surfaces defining a vacuum channel in close proximity to and concentric with the center of rotation of said rotary element, said vacuum channel being sized such that evacuation thereof improves the sealing contact of said raised bearing surfaces with said sealing element while permitting said rotary element to be rotated easily about its center of rotation, said sealing element having openings communicating with said vacuum channel; (c) means for exhausting the air from said vacuum channel through said openings; and (d) means for communicating the vacuum produced in said vacuum channel to said work surface such that a workpiece will adhere to said work surface.
Claim 3
Dependent Claim
34 words
The improved rotary vacuum-chuck system of claim 1, having a second vacuum channel sized such that evacuation thereof effectively immobilizes said rotary element and means for exhausting the air from said second vacuum channel.
References Cited (Backward Citations)
US3126768A
Cited
US2366935A
Cited
US2345884A
Cited
US2852264A
Cited
US2907258A
Cited
US2966010A
Cited
US3328042A
Cited
US3437343A
Cited
US3579916A
Cited
US3706412A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-01-14 | 1983-07-16 | 1984-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-01-14 | 1987-07-16 | 1988-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-01-14 | 1991-07-16 | 1992-01-15 | $7700.00 | Window Closed / Lapsed |