US4140814A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma deposition of transparent conductive layers
Assignee: Texas Instruments Inc
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Filing: 1977-12-01
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Granted: 1979-02-20
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Expires: 1997-12-01
Abstract
Abstract A transparent conductive layer of SnO 2 is deposited on a substrate by an RF-plasma assisted chemical vapor reaction of CO 2 with an organic tin compound, such as tetramethyl tin, for example. A CCD optical imager is fabricated, using the method of the invention to form a transparent conductive layer thereon.
Inventors
- 👤 Jaroslav Hynecek
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:33
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/15; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/407; H10F71/00; H10F71/138; H10P; H10P14/00; H10P14/40; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
69 words
A method for the deposition of a transparent conductive layer of tin oxide on a substrate, comprising the step of exposing said substrate to a vaporous or gaseous mixture of carbon dioxide and an organic tin compound, while maintaining reduced pressure and an RF glow discharge in the vicinity of said substrate at an energy level sufficient to cause interaction of said mixture and consequent deposition of tin oxide.
Claim 2
Independent Claim
69 words
A method for the deposition of a transparent conductive layer of tin oxide on a substrate, comprising the step of exposing said substrate to a vaporous or gaseous mixture of carbon dioxide and an organic tin compound, while maintaining reduced pressure and an RF glow discharge in the vicinity of said substrate at an energy level sufficient to cause interaction of said mixture and consequent deposition of tin oxide.
Claim 3
Dependent Claim
17 words
A method as in claim 1 wherein said substrate is maintained at a temperature of 200°-500° C.
Claim 4
Dependent Claim
17 words
A method as in claim 1 wherein the RF power is 1-3 milliwatts per cm 3 .
Claim 5
Dependent Claim
14 words
A method as in claim 3 wherein the pressure is less than 1.0 Torr.
Claim 6
Dependent Claim
20 words
A method as in claim 1 wherein the ratio of CO 2 to organic tin is between 50:1 and 300:1.
Claim 7
Dependent Claim
13 words
A method as in claim 1 wherein said substrate is a CCD imager.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-02-19 | 1982-08-21 | 1983-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-02-19 | 1986-08-21 | 1987-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-02-19 | 1990-08-21 | 1991-02-20 | $7700.00 | Window Closed / Lapsed |