US4100313A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming an optical waveguide
Assignee: RCA Corp
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Filing: 1975-10-28
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Granted: 1978-07-11
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Expires: 1995-10-28
Abstract
Abstract A technique for generating long narrow microstructures based upon the shadowing effect of thick slits placed between a source and a substrate. The method is particularly well suited for forming optical waveguides using a mask having a slit with a width larger than the width of the stripe to be deposited and being thick relative to the width of said slit.
Inventors
- 👤 Jacob Meyer Hammer
- 👤 Clyde Carl Neil
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 08:57
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
154 words
A process for forming an optical waveguide which comprises: (a) positioning an evaporator source for material to be deposited and a substrate upon which material is to be deposited on opposite sides of a mask wherein (i) said material is selected from the group consisting of niobium, titanium, vanadium, chromium, manganese, iron, nickel and cobalt; (ii) said substrate is selected from the group consisting of lithium tantalate and lithium niobate, (iii) said mask has a slit with a width larger than the width of the stripe to be deposited and being thick relative to the width of said slit, and (iv) said evaporator source is at a small acute angle relative to said slit whereby a shadowing effect reduces the effective width of said slit; (b) evaporatively depositing material through said slit to produce a stripe of desired width; and (c) diffusing the deposited material into the substrate whereby an optical waveguide is formed.
Claim 2
Dependent Claim
154 words
A process for forming an optical waveguide which comprises: (a) positioning an evaporator source for material to be deposited and a substrate upon which material is to be deposited on opposite sides of a mask wherein (i) said material is selected from the group consisting of niobium, titanium, vanadium, chromium, manganese, iron, nickel and cobalt; (ii) said substrate is selected from the group consisting of lithium tantalate and lithium niobate, (iii) said mask has a slit with a width larger than the width of the stripe to be deposited and being thick relative to the width of said slit, and (iv) said evaporator source is at a small acute angle relative to said slit whereby a shadowing effect reduces the effective width of said slit; (b) evaporatively depositing material through said slit to produce a stripe of desired width; and (c) diffusing the deposited material into the substrate whereby an optical waveguide is formed.
Claim 3
Dependent Claim
15 words
The process of claim 1, wherein the substrate and said mask are in direct contact.
Claim 4
Dependent Claim
33 words
The process of claim 1, wherein the width of the slit is on the order of tens of microns and the width of the long thin stripe is on the order of microns.
Claim 5
Dependent Claim
16 words
The process of claim 1, wherein two long thin stripes are deposited parallel to each other.
References Cited (Backward Citations)
US2633427A
Cited
US3226255A
Cited
FR1378052A
Cited
US3374111A
Cited
US3272175A
Cited
US3510349A
Cited
US3822929A
Cited
US3936545A
Cited
US3799792A
Cited
US3930065A
Cited
US3967365A
Cited
US4037005A
Cited
US3923373A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-07-10 | 1982-01-09 | 1982-07-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-07-10 | 1986-01-09 | 1986-07-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-07-10 | 1990-01-09 | 1990-07-11 | $7700.00 | Window Closed / Lapsed |