Method for making a solid-state color imaging device having an integral color filter and the device

Claim 3

A method for making a color imaging device as described in claim 1 further comprising repeating steps (A) through (D) at least once to form another set of dyed filter elements in the dye receiving layer in an interlaid pattern with the first set, each repetition of the steps yielding an additional set of dyed filter elements in an interlaid pattern with the prior sets, one set having a common light absorption and transmission characteristic that is different from another set.

Claim 4

A method for making a color imaging device as described in claim 1 wherein said method includes laminating said filter means onto said array of photosensors so that the filter elements are in micro-registration with the underlying sensing area of the photosensors.

Claim 5

A method for making a color imaging device as described in claim 1 wherein steps (A) through (D) are performed three times, each time forming a set of dyed filter elements having a different primary color from each other set.

Claim 8

A method for making a color imaging device as described in claim 5 wherein said method includes laminating said filter means onto said array of photosensors so that the filter elements are in micro-registration with the underlying sensing area of the photosensors.

Claim 9

A method for making a color imaging device as described in claim 5 wherein steps (A) through (D) are performed three times, each time forming a set of dyed filter elements having a different primary color from each other set.

Claim 12

A method for making a color imaging device as described in claim 8 further comprising repeating steps (A) through (D) at least once to form another set of dyed filter elements in the dye receiving layer in an interlaid pattern with the first set, each repetition of the steps yielding an additional set of dyed filter elements in an interlaid pattern with the prior sets, one set having a common light absorption and transmission characteristic that is different from another set.

Claim 13

A method for making a color imaging device as described in claim 8 wherein said method includes laminating said filter means onto said array of photosensors so that the filter elements are in micro-registration with the underlying sensing area of the photosensors.

Claim 14

A method for making a color imaging device as described in claim 8 wherein steps (A) through (D) are performed three times, each time forming a set of dyed filter elements having a different primary color from each other set.

Claim 15

A color imaging device comprising a planar array of charge-handling semiconductive photosensors having sensing areas that are sensitive to radiant energy and have at least one dimension that is less than about 100 micrometers, and superimposed thereon, filter means comprising a plurality of radiation intercepting means defining a planar array of filter elements lying in micro-registration with the sensing areas of said photosensors; said filter means having at least two sets of intercepting means, one set having a common radiation absorption and transmission characteristic that is different from another set; said color imaging device having been made by a method comprising the steps of: superimposing on the array of photosensors the filter means so that filter elements of the intercepting means are in micro-registration with the underlying sensing area of the photosensors, the filter means being formed by a method comprising: A. coating a layer of photoresist over a transparent, polymeric dye receiving layer; B. exposing the photoresist to a pattern representing a set of filter elements and developing the photoresist to obtain window areas in the photoresist layer corresponding to said pattern; C. heating and diffusing heat-transferable dye into the dye receiving layer through the window areas, thus forming dyed filter elements corresponding to said pattern; and D. removing the remaining portions of the photoresist to yield a first set of dyed filter elements in a planar array in the dye receiving layer.

Claim 16

A color imaging device comprising a planar array of charge-handling semiconductive photosensors having sensing areas that are sensitive to radiant energy and have at least one dimension that is less than about 100 micrometers, and superimposed thereon, filter means comprising a plurality of radiation intercepting means defining a planar array of filter elements lying in micro-registration with the sensing areas of said photosensors; said filter means having at least two sets of intercepting means, one set having a common radiation absorption and transmission characteristic that is different from another set; said color imaging device having been made by a method comprising the steps of: superimposing on the array of photosensors the filter means so that filter elements of the intercepting means are in micro-registration with the underlying sensing area of the photosensors, the filter means being formed by a method comprising: A. coating a layer of photoresist over a transparent, polymeric dye receiving layer; B. exposing the photoresist to a pattern representing a set of filter elements and developing the photoresist to obtain window areas in the photoresist layer corresponding to said pattern; C. heating and diffusing heat-transferable dye into the dye receiving layer through the window areas, thus forming dyed filter elements corresponding to said pattern; and D. removing the remaining portions of the photoresist to yield a first set of dyed filter elements in a planar array in the dye receiving layer.

Claim 17

A color imaging device comprising a planar array of charge-handling semiconductive photosensors having sensing areas that are sensitive to radiant energy and have at least one dimension that is less than about 100 micrometers, and superimposed thereon, filter means comprising a plurality of radiation intercepting means defining a planar array of filter elements lying in micro-registration with the sensing areas of said photosensors; said filter means having at least two sets of intercepting means, one set having a common radiation absorption and transmission characteristic that is different from another set; said color imaging device having been made by a method comprising the steps of: forming a transparent, polymeric dye receiving layer on top of the array of photosensors; forming said filter means in the dye receiving layer so that the filter elements are in micro-registration with the underlying sensing area of the photosensors, the filter means being formed by a method comprising: A. coating a layer of photoresist over a transparent, polymeric dye receiving layer; B. exposing the photoresist to a pattern representing a set of filter elements and developing the photoresist to obtain window areas in the photoresist layer corresponding to said pattern; C. heating and diffusing heat-transferable dye into the dye receiving layer through the window areas, thus forming dyed filter elements corresponding to said pattern; D. removing the remaining portions of the photoresist to yield a first set of dyed filter elements in a planar array in the dye receiving layer; and E. repeating steps (A) through (D) at least once to form another set of dyed filter elements in the dye receiving layer in an interlaid pattern with the first set, each repetition of the steps yielding an additional set of dyed filter elements in an interlaid pattern with the prior sets, one set having a common light absorption and transmission characteristic that is different from another set.

Claim 18

A color imaging device comprising a planar array of charge-handling semiconductive photosensors having sensing areas that are sensitive to radiant energy and have at least one dimension that is less than about 100 micrometers, and superimposed thereon, filter means comprising a plurality of radiation intercepting means defining a planar array of filter elements lying in micro-registration with the sensing areas of said photosensors; said filter means having at least two sets of intercepting means, one set having a common radiation absorption and transmission characteristic that is different from another set; said color imaging device having been made by a method comprising the steps of: forming a transparent, polymeric dye receiving layer on top of the array of photosensors; forming said filter means in the dye receiving layer so that the filter elements are in micro-registration with the underlying sensing area of the photosensors, the filter means being formed by a method comprising: A. coating a layer of photoresist over a transparent, polymeric dye receiving layer; B. exposing the photoresist to a pattern representing a set of filter elements and developing the photoresist to obtain window areas in the photoresist layer corresponding to said pattern; C. heating and diffusing heat-transferable dye into the dye receiving layer through the window areas, thus forming dyed filter elements corresponding to said pattern; D. removing the remaining portions of the photoresist to yield a first set of dyed filter elements in a planar array in the dye receiving layer; and E. repeating steps (A) through (D) at least once to form another set of dyed filter elements in the dye receiving layer in an interlaid pattern with the first set, each repetition of the steps yielding an additional set of dyed filter elements in an interlaid pattern with the prior sets, one set having a common light absorption and transmission characteristic that is different from another set.

Claim 19

A color imaging device comprising a planar array of charge-handling semiconductive photosensors having sensing areas that are sensitive to radiant energy and have at least one dimension that is less than about 100 micrometers, and superimposed thereon, filter means comprising a plurality of radiation intercepting means defining a planar array fo filter elements lying in micro-registration with the sensing areas of said photosensors; said filter means having at least two sets of intercepting means, one set having a common radiation absorption and transmission characteristic that is different from another set; said color imaging device having been made by a method comprising the steps of: A. coating a layer of photoresist over a transparent, polymeric dye receiving layer, said dye receiving layer comprising a polymer having a glass transition temperature T g ; B. exposing the photoresist to a pattern representing a set of filter elements and developing the photoresist to obtain window areas in the photoresist layer corresponding to said pattern; C. heating a diffusing heat-transferable dye into the dye receiving layer through the window areas at a temperature that is lower than the T g of said polymer, thus forming dyed filter elements corresponding to said pattern; and D. removing the remaining portions of the photoresist to yield a first set of dyed filter elements in a planar array in the dye receiving layer.

Claim 20

A color imaging device comprising a planar array of charge-handling semiconductive photosensors having sensing areas that are sensitive to radiant energy and have at least one dimension that is less than about 100 micrometers, and superimposed thereon, filter means comprising a plurality of radiation intercepting means defining a planar array fo filter elements lying in micro-registration with the sensing areas of said photosensors; said filter means having at least two sets of intercepting means, one set having a common radiation absorption and transmission characteristic that is different from another set; said color imaging device having been made by a method comprising the steps of: A. coating a layer of photoresist over a transparent, polymeric dye receiving layer, said dye receiving layer comprising a polymer having a glass transition temperature T g ; B. exposing the photoresist to a pattern representing a set of filter elements and developing the photoresist to obtain window areas in the photoresist layer corresponding to said pattern; C. heating a diffusing heat-transferable dye into the dye receiving layer through the window areas at a temperature that is lower than the T g of said polymer, thus forming dyed filter elements corresponding to said pattern; and D. removing the remaining portions of the photoresist to yield a first set of dyed filter elements in a planar array in the dye receiving layer.