US3955013A
Expired / Lapsed
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Novel process for producing a thin film of germanium
Assignee: Grumman Corp
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Filing: 1974-06-21
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Granted: 1976-05-04
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Expires: 1994-06-21
Abstract
Abstract A process is disclosed for producing a thin film of elemental germanium on the surface of a germanate glass composition by means of a focused laser.
Inventors
- 👤 Herbert D. Kivlighn, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 03:18
CPC Classifications
C; C03; C03C; C03C23/00; C03C23/007; C03C17/00; C03C17/06; C03C23/0005; C03C23/0025; C03C3/00; C03C3/12; C03C3/253; C03C2217/00; C03C2217/20; C03C2217/25; C03C2217/263; C03C2217/268; C03C2218/00; C03C2218/30; C03C2218/35; Y; Y10; Y10S; Y10S430/00; Y10S430/146; Y10S438/00; Y10S438/967
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
76 words
A process for the preparation of a thin film of elemental germanium on the surface of a selected area of a germanate glass composition which includes at least 60 mole percent of germanium dioxide, said method consisting essentially of heating a selected area of said germanate glass composition with a laser beam of effective wave length and power in the presence of a reducing atmosphere until formation of said thin film of elemental germanium is complete.
Claim 2
Dependent Claim
76 words
A process for the preparation of a thin film of elemental germanium on the surface of a selected area of a germanate glass composition which includes at least 60 mole percent of germanium dioxide, said method consisting essentially of heating a selected area of said germanate glass composition with a laser beam of effective wave length and power in the presence of a reducing atmosphere until formation of said thin film of elemental germanium is complete.
Claim 3
Dependent Claim
13 words
A process as defined in claim 1 wherein said reducing gas is hydrogen.
Claim 4
Dependent Claim
76 words
A process as defined in claim 1 wherein said germanate glass composition is an oxygen deficient germanate glass which is prepared by a process which consists essentially of melting together a mixture which consists essentially of 0.85 to 0.95 moles of powdered germanium dioxide with a minor non-equimolar amount of silicon carbide at a temperature of between about 1200°C and 1600°C in a container free of platinum and then allowing the melt to cool and solidify.
Claim 5
Dependent Claim
15 words
A process as defined in claim 1 wherein the layer of elemental germanium is amorphous.
Claim 6
Dependent Claim
29 words
A process as defined in claim 1 wherein a carbon dioxide laser is employed at a wave length of about 10.6 μm and a power of about 3 watts.
Claim 7
Dependent Claim
50 words
A process for forming a semiconducting circuit pattern which consists essentially of selectively heating a germanate glass composition with a laser beam of effective wave length and power in the presence of a reducing atmosphere in a configuration that corresponds to said circuit pattern until said circuit pattern is formed.
Claim 8
Dependent Claim
50 words
A process for forming a semiconducting circuit pattern which consists essentially of selectively heating a germanate glass composition with a laser beam of effective wave length and power in the presence of a reducing atmosphere in a configuration that corresponds to said circuit pattern until said circuit pattern is formed.
Claim 9
Dependent Claim
79 words
A process as defined in claim 1 wherein said germanate glass composition is an oxygen deficient germanate glass which is prepared by a process which consists essentially of melting together a mixture which consists essentially of 0.85 to 0.95 moles of powdered germanium dioxide and from 0.15 moles to about 0.05 moles of silicon carbide at a temperature of between about 1200°C and 1600°C in a container free of platinum and then allowing the melt to cool and solidify.
Claim 10
Dependent Claim
80 words
A process for the preparation of a thin film of elemental germanium on the surface of a selected area of a germanate glass composition which includes at least 60 mole percent of germanium dioxide, said method consisting essentially of heating a selected area of said germanate glass composition with a laser beam in the presence of a reducing atmosphere until said selected area is heated to a temperature of 350°-800°C to cause formation of a thin film of elemental germanium.
Claim 11
Dependent Claim
80 words
A process for the preparation of a thin film of elemental germanium on the surface of a selected area of a germanate glass composition which includes at least 60 mole percent of germanium dioxide, said method consisting essentially of heating a selected area of said germanate glass composition with a laser beam in the presence of a reducing atmosphere until said selected area is heated to a temperature of 350°-800°C to cause formation of a thin film of elemental germanium.
Claim 12
Dependent Claim
18 words
A process as defined in claim 8 wherein said selected area is heated to a temperature of 450°-750°C.
Claim 13
Dependent Claim
18 words
A process as defined in claim 8 wherein said selected area is heated to a temperature of 400°-500°C.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-05-04 | 1979-11-03 | 1980-05-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-05-04 | 1983-11-03 | 1984-05-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-05-04 | 1987-11-03 | 1988-05-04 | $7700.00 | Window Closed / Lapsed |