Strain gauge apparatus

Claim 2

Signal generating apparatus responsive to strain in a given region of a body member, said apparatus comprising: a. a body member having a substrate surface formed along the exterior thereof in the region from which a signal is desired, b. a piezoelectric film affixed upon said substrate surface, said piezoelectric film being made of a crystalline material having a predetermined crystal lattice structure characteristic, c. output signal coupling means for direct coupling of an electrical signal generated by the piezoelectrically active properties of said piezoelectric film between selected spatially separated portions of said piezoelectric film, d. said output signal coupling means comprising an arrangement of first and second electrodes in spaced relationship in the thickness dimension the the piezoelectric film, e. said body member being made of a conductor material and forming said first electrode, f. a conductor disposed adjacent to and in signal coupling relationship to the outer face of the piezoelectric film, said conductor forming said second electrode, g. insulating film means cooperative with said piezoelectric film to obviate possible short circuit effects between the conductor and the body member which may be caused by portions of said conductor extending into minute vacancies which may be present as imperfections in the piezoelectric film, h. said insulating film means comprising an insulating film interposed between the outer face of the piezoelectric film and the adjacent conductor, and i. the thickness of said piezoelectric film being no greater than 1.5 microns and the thickness of said insulating film being of no more than about 500 Angstroms.

Claim 3

Signal generating apparatus responsive to strain in a given region of a body member, said apparatus comprising: a. a body member having a substrate surface formed along the exterior thereof in the region from which a signal is desired, b. a piezoelectric film affixed to said substrate surface, said piezoelectric film being made of a crystalline material having a predetermined crystal lattice structure characteristic, c. output signal coupling means for direct coupling of an electric signal generated by the piezoelectrically active properties of said piezoelectric film between selected spatially separated portions of said piezoelectric film, d. said output signal coupling means comprising an arrangement of first and second electrodes in spaced relationship in the thickness dimension of the piezoelectric film, e. said body member being made of a conductor material and forming said first electrode, f. a conductor disposed adjacent to and in signal coupling relationship to the outer face of the piezoelectric film, said conductor forming said second electrode, g. insulating film means cooperative with said piezoelectric film to obviate possible short circuit effects between the conductor and the body member which may be caused by portions of said conductor extending into minute vacancies which may be present as imperfections in the piezoelectric film, h. said insulating film means comprising an insulating film interposed between the substrate surface of the body member and the piezoelectric film, and i. the thickness of said piezoelectric film being no greater than 1.5 microns and the thickness of said insulating film being of no more than about 500 Angstroms.

Claim 4

Signal generating apparatus responsive to strain in a given region of a body member, said apparatus comprising: a. a body member having a substrate surface formed along the exterior thereof in the region from which a signal is desired, b. a piezoelectric film affixed to said substrate surface, said piezoelectric film being made of a crystalline material having a predetermined crystal lattice structure characteristic, c. output signal coupling means for direct coupling of an electric signal generated by the piezoelectrically active properties of said piezoelectric film between selected spatially separated portions of said piezoelectric film, d. said output signal coupling means comprising an arrangement of first and second electrodes in spaced relationship in the thickness dimension of the piezoelectric film, e. said body member being made of a conductor material and forming said first electrode, f. a conductor disposed adjacent to and in signal coupling relationship to the outer face of the piezoelectric film, said conductor forming said second electrode, g. insulating film means cooperative with said piezoelectric film to obviate possible short circuit effects between the conductor and the body member which may be caused by portions of said conductor extending into minute vacancies which may be present as imperfections in the piezoelectric film, h. said insulating film means comprising an insulating film interposed between the substrate surface of the body member and the piezoelectric film, and i. the thickness of said piezoelectric film being no greater than 1.5 microns and the thickness of said insulating film being of no more than about 500 Angstroms.

Claim 5

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of insulator material and an outer film layer made of piezoelectric material, c. said inner insulator film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner insulator film layer as a stratum of solid-state material in molecularly bonded relationship to the body member, d. said outer piezoelectric film layer being deposited onto the outer surface of the inner insulator film layer by a vapor deposit-type process to effect the formation of the outer piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the inner insulator film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer piezoelectric film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the outer piezoelectric film layer disposed therebetween, and f. said inner insulator film layer sealing minute vacancies which may be present as imperfections in said outer piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 6

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of insulator material and an outer film layer made of piezoelectric material, c. said inner insulator film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner insulator film layer as a stratum of solid-state material in molecularly bonded relationship to the body member, d. said outer piezoelectric film layer being deposited onto the outer surface of the inner insulator film layer by a vapor deposit-type process to effect the formation of the outer piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the inner insulator film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer piezoelectric film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the outer piezoelectric film layer disposed therebetween, and f. said inner insulator film layer sealing minute vacancies which may be present as imperfections in said outer piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 7

Apparatus in accordance with claim 3, wherein: said insulator material out of which said inner insulator film layer is made is characterized by a hardness in the upper half of the mho scale.

Claim 8

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of insulator material and an outer film layer made of piezoelectric material, c. said inner insulator film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner insulator film layer as a stratum of solid-state material in molecularly bonded relationship to the body member,

Claim 9

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of insulator material and an outer film layer made of piezoelectric material, c. said inner insulator film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner insulator film layer as a stratum of solid-state material in molecularly bonded relationship to the body member,

Claim 10

d. said outer piezoelectric film layer being deposited onto the outer face of the inner insulator film layer by a sputtering-type process to effect the formation of the outer piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the inner insulator film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer piezoelectric film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the outer piezoelectric film layer disposed therebetween, and f. said inner insulator film layer sealing minute vacancies which may be present as imperfections in said outer piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 11

d. said outer piezoelectric film layer being deposited onto the outer face of the inner insulator film layer by a sputtering-type process to effect the formation of the outer piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the inner insulator film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer piezoelectric film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the outer piezoelectric film layer disposed therebetween, and f. said inner insulator film layer sealing minute vacancies which may be present as imperfections in said outer piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 12

Apparatus in accordance with claim 5, wherein: a. said insulator material out of which said inner insulator film layer is made is characterized by a hardness in the upper half of the mho scale.

Claim 13

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of insulator material and an outer film layer made of piezoelectric material, c. said inner insulator film layer deposited onto the body member by a sputtering-type process to effect the formation of the inner insulator film layer as a stratum of solid-state material in molecularly bonded relationship to the body member, d. said outer piezoelectric film layer being deposited onto the outer face of the inner insulator film layer by a sputtering-type process to effect the formation of the outer piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the inner surface insulator film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer piezoelectric film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the outer piezoelectric film layer disposed therebetween, and f. said inner insulator film layer sealing minute vacancies which may be present as imperfections in said outer piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 14

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of insulator material and an outer film layer made of piezoelectric material, c. said inner insulator film layer deposited onto the body member by a sputtering-type process to effect the formation of the inner insulator film layer as a stratum of solid-state material in molecularly bonded relationship to the body member, d. said outer piezoelectric film layer being deposited onto the outer face of the inner insulator film layer by a sputtering-type process to effect the formation of the outer piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the inner surface insulator film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer piezoelectric film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the outer piezoelectric film layer disposed therebetween, and f. said inner insulator film layer sealing minute vacancies which may be present as imperfections in said outer piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 15

Apparatus in accordance with claim 7, wherein: a. said insulator material out of which said inner insulator film layer is made is characterized by a hardness in the upper half of the mho scale.

Claim 16

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of insulator material and an outer film layer made of piezoelectric material, c. said inner insulator film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner insulator film layer as a stratum of solid-state material in molecularly bonded relationship to the body member, d. said outer piezoelectric film layer being deposited onto the outer face of the inner insulator film layer by a vapor deposit-type process to effect the formation of the outer piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the inner insulator film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer piezoelectric film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the outer piezoelectric tric film layer disposed therebetween, and f. said inner insulator film layer sealing minute vacancies which may be present as imperfections in said outer piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 17

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of insulator material and an outer film layer made of piezoelectric material, c. said inner insulator film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner insulator film layer as a stratum of solid-state material in molecularly bonded relationship to the body member, d. said outer piezoelectric film layer being deposited onto the outer face of the inner insulator film layer by a vapor deposit-type process to effect the formation of the outer piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the inner insulator film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer piezoelectric film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the outer piezoelectric tric film layer disposed therebetween, and f. said inner insulator film layer sealing minute vacancies which may be present as imperfections in said outer piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 18

Apparatus in accordance with claim 9, wherein: a. said insulator material out of which said inner insulator film layer is made is characterized by a hardness in the upper half of the mho scale.

Claim 19

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator film layer being deposited onto the outer face of the inner piezoelectric film layer by a vapor deposit-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer insulator film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the inner piezoelectric film layer disposed therebetween, and f. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 20

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator film layer being deposited onto the outer face of the inner piezoelectric film layer by a vapor deposit-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer insulator film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the inner piezoelectric film layer disposed therebetween, and f. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 21

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoing the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator layer being deposited onto the outer face of the inner piezoelectric film layer by a sputtering-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer insulator film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the inner piezoelectric film layer disposed therebetween, and f. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 22

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoing the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator layer being deposited onto the outer face of the inner piezoelectric film layer by a sputtering-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer insulator film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the inner piezoelectric film layer disposed therebetween, and f. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 23

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator layer being deposited onto the outer face of the inner piezoelectric film layer by a sputtering-type process to effect the formation of the outer insulator layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer insulator film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the inner piezoelectric film layer disposed therebetween, and f. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 24

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator layer being deposited onto the outer face of the inner piezoelectric film layer by a sputtering-type process to effect the formation of the outer insulator layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer insulator film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the inner piezoelectric film layer disposed therebetween, and f. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 25

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of soid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator film layer being deposited onto the outer face of the inner piezoelectric film layer by a vapor deposit-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer insulator film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the inner piezoelectric film layer disposed therebetween, and f. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 26

Signal generating apparatus responsive to strains occurring in a given region of a body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to strain is desired, b. a dual layered arrangement of soid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator film layer being deposited onto the outer face of the inner piezoelectric film layer by a vapor deposit-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. a pair of electrodes comprising said body member forming one electrode of the pair and a conductor element affixed to the outer surface of said outer insulator film layer forming the other electrode, said pair of electrodes being operative to pick off an electrical potential generated by the portion of the inner piezoelectric film layer disposed therebetween, and f. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film layer to obviate presence of a low impedance electrical path between the body member and the conductor element, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals.

Claim 27

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member have a substrate surface formed along said exterior surface in said given region at which response to said shear wave mode of strain is desired, b. a piezoelectric film affixed to said substrate surface, said piezoelectric film being of a crystalline material having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions thereof which are spaced in a direction parallel to the plane of the film in response to shear wave mode of strain having a component acting in a direction parallel to the plane of the film, c. an insulator film disposed over the outer face of said piezoelectric film, d. first and second electrodes comprising first and second conductors disposed contiguous to the outer face of said insulator film, said first and second conductors being spaced apart in a direction parallel to the plane of the film, e. said insulating film being cooperative with said piezoelectric film to obviate possible short circuit effects between either of the conductors and the body member which may be caused by portions of a conductor extending into minute vacancies which may be present as imperfections in the piezoelectric film, and f. the thickness of said piezoelectric film being no greater than 1.5 microns and the thickness of said insulating film being no more than about 500 Angstroms.

Claim 28

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member have a substrate surface formed along said exterior surface in said given region at which response to said shear wave mode of strain is desired, b. a piezoelectric film affixed to said substrate surface, said piezoelectric film being of a crystalline material having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions thereof which are spaced in a direction parallel to the plane of the film in response to shear wave mode of strain having a component acting in a direction parallel to the plane of the film, c. an insulator film disposed over the outer face of said piezoelectric film, d. first and second electrodes comprising first and second conductors disposed contiguous to the outer face of said insulator film, said first and second conductors being spaced apart in a direction parallel to the plane of the film, e. said insulating film being cooperative with said piezoelectric film to obviate possible short circuit effects between either of the conductors and the body member which may be caused by portions of a conductor extending into minute vacancies which may be present as imperfections in the piezoelectric film, and f. the thickness of said piezoelectric film being no greater than 1.5 microns and the thickness of said insulating film being no more than about 500 Angstroms.

Claim 29

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode of strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to shear wave mode of strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator film layer being deposited onto the outer face of the inner piezoelectric film layer by a vapor deposit-type process to effect the formation of the outer film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. first and second electrodes spaced in a direction parallel to the plane of the film layer and each being electrically coupled to the outer face of the outer insulator film layer, f. said crystalline piezoelectric material of which the inner piezoelectric film layer is made having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions therein spaced apart in a direction parallel to the plane of the film layer in response to a sheave wave mode of strain having a component acting in a direction parallel to the plane of the film layer, and g. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film to obviate presence of a low impedance electrical path between either of the electrodes and the body member, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals for purposes of coupling the signal generated within the inner piezoelectric film layer between the positions therein adjacent to the first and second electrodes into such electrodes.

Claim 30

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode of strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to shear wave mode of strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator film layer being deposited onto the outer face of the inner piezoelectric film layer by a vapor deposit-type process to effect the formation of the outer film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. first and second electrodes spaced in a direction parallel to the plane of the film layer and each being electrically coupled to the outer face of the outer insulator film layer, f. said crystalline piezoelectric material of which the inner piezoelectric film layer is made having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions therein spaced apart in a direction parallel to the plane of the film layer in response to a sheave wave mode of strain having a component acting in a direction parallel to the plane of the film layer, and g. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film to obviate presence of a low impedance electrical path between either of the electrodes and the body member, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals for purposes of coupling the signal generated within the inner piezoelectric film layer between the positions therein adjacent to the first and second electrodes into such electrodes.

Claim 31

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode of strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to shear wave mode of strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator layer being deposited onto the outer face of the inner piezoelectirc film layer by a sputtering-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. first and second electrodes spaced in a direction parallel to the plane of the film layer and each being electrically coupled to the outer face of the outer insulator film layer, f. said crystalline piezoelectric material of which the inner piezoelectric film layer is made having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions therein spaced apart in a direction parallel to the plane of the film layer in response to a shear wave mode of strain having a component acting in a direction parallel to the plane of the film layer, and g. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film to obviate presence of a low impedance electrical path between either of the electrodes and the body member, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals for purposes of coupling the signal generated within the inner piezoelectric film layer between the positions therein adjacent to the first and second electrodes into such electrodes.

Claim 32

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode of strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to shear wave mode of strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a vapor deposit-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator layer being deposited onto the outer face of the inner piezoelectirc film layer by a sputtering-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. first and second electrodes spaced in a direction parallel to the plane of the film layer and each being electrically coupled to the outer face of the outer insulator film layer, f. said crystalline piezoelectric material of which the inner piezoelectric film layer is made having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions therein spaced apart in a direction parallel to the plane of the film layer in response to a shear wave mode of strain having a component acting in a direction parallel to the plane of the film layer, and g. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film to obviate presence of a low impedance electrical path between either of the electrodes and the body member, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals for purposes of coupling the signal generated within the inner piezoelectric film layer between the positions therein adjacent to the first and second electrodes into such electrodes.

Claim 33

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode of strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to shear wave mode of strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator layer being deposited onto the outer face of the inner piezoelectric film layer by a sputtering-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. first and second electrodes spaced in a direction parallel to the plane of the film layer and each being electrically coupled to the outer face of the outer insulator film layer, f. said crystalline piezoelectric material of which the inner piezoelectric film layer is made having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions therein spaced apart in a direction parallel to the plane of the film layer in response to a shear wave mode of strain having a component acting in a direction parallel to the plane of the film layer, and g. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film to obviate presence of a low impedance electrical path between either of the electrodes and the body member, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals for purposes of coupling the signal generated within the inner piezoelectric film layer between the positions therein adjacent to the first and second electrodes into such electrodes.

Claim 34

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode of strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to shear wave mode of strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator layer being deposited onto the outer face of the inner piezoelectric film layer by a sputtering-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. first and second electrodes spaced in a direction parallel to the plane of the film layer and each being electrically coupled to the outer face of the outer insulator film layer, f. said crystalline piezoelectric material of which the inner piezoelectric film layer is made having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions therein spaced apart in a direction parallel to the plane of the film layer in response to a shear wave mode of strain having a component acting in a direction parallel to the plane of the film layer, and g. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film to obviate presence of a low impedance electrical path between either of the electrodes and the body member, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals for purposes of coupling the signal generated within the inner piezoelectric film layer between the positions therein adjacent to the first and second electrodes into such electrodes.

Claim 35

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode of strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to shear wave mode of strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator film layer being deposited onto the outer face of the inner piezoelectric film layer by a vapor deposit-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. first and second electrodes spaced in a direction parallel to the plane of the film layer and each being electrically coupled to the outer face of the outer insulator film layer, f. said crystalline piezoelectric material of which the inner piezoelectric film layer is made having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions therein spaced apart in a direction parallel to the plane of the film layer in response to a shear wave mode of strain having a component acting in a direction parallel to the plane of the film layer, and g. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film to obviate presence of a low impedance electrical path between either of the electrodes and the body member, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals for purposes of coupling the signal generated within the inner piezoelectric film layer between the positions therein adjacent to the first and second electrodes into such electrodes.

Claim 36

Signal generating apparatus responsive to strains occurring in a given region of a body member, and further of a type adapted to be responsive to a shear wave mode of strain having a component acting in a direction parallel to the exterior surface of the body member, said apparatus comprising: a. a body member of a conductive material having a zone of its exterior surface adapted to receive in molecularly bonded relationship thereto a deposit of a different solid-state material, said zone adjoining the region of the body member from which a signal responsive to shear wave mode of strain is desired, b. a dual layered arrangement of solid-state films affixed to the body member on said zone prepared for receiving solid-state material, said dual layered arrangement comprising an inner film layer made of crystalline piezoelectric material and an outer film layer made of insulator material, c. said inner piezoelectric film layer being deposited onto the body member by a sputtering-type process to effect the formation of the inner piezoelectric film layer as a stratum of crystalline piezoelectric material in molecularly bonded relationship to the body member, d. said outer insulator film layer being deposited onto the outer face of the inner piezoelectric film layer by a vapor deposit-type process to effect the formation of the outer insulator film layer as a stratum of solid-state material in molecularly bonded relationship to said inner piezoelectric film layer, e. first and second electrodes spaced in a direction parallel to the plane of the film layer and each being electrically coupled to the outer face of the outer insulator film layer, f. said crystalline piezoelectric material of which the inner piezoelectric film layer is made having a predetermined crystal lattice structure characteristic so chosen to generate a piezoelectric signal between positions therein spaced apart in a direction parallel to the plane of the film layer in response to a shear wave mode of strain having a component acting in a direction parallel to the plane of the film layer, and g. said outer insulator film layer sealing minute vacancies which may be present as imperfections in said inner piezoelectric film to obviate presence of a low impedance electrical path between either of the electrodes and the body member, whereby said dual layered arrangement composed of said inner and outer film layers constitutes a high internal impedance source of piezoelectric signals for purposes of coupling the signal generated within the inner piezoelectric film layer between the positions therein adjacent to the first and second electrodes into such electrodes.