US3935331A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Preparation of olefin SO2 copolymer electron beam resist films and use of same for recording
Assignee: RCA Corp
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Filing: 1975-01-09
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Granted: 1976-01-27
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Expires: 1995-01-09
Abstract
Abstract In preparing an electron beam resist film of a copolymer of an olefin and SO 2 , the steps of removing insoluble particles, drying the films under high vacuum and storing them in a moisture-free atmosphere are required to prevent cracking of the films during development.
Inventors
- 👤 Eugene Samuel Poliniak
- 👤 Howard George Scheible
- 👤 Richard Joseph Himics
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:56
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
96 words
A method of preparing an electron beam recording medium comprising a film of a copolymer of SO 2 and an olefin on a substrate which comprises a. dissolving said copolymer in a solvent, b. filtering the resultant solution through a filter having apertures on the order of 0.2 micron or smaller, c. applying a copolymer film from said solution onto said substrate, d. drying said film in a vacuum of at least 10 - 6 torr until said solvent is removed, and e. maintaining said dried film moisture-free until it is exposed to an electron beam.
Claim 2
Independent Claim
96 words
A method of preparing an electron beam recording medium comprising a film of a copolymer of SO 2 and an olefin on a substrate which comprises a. dissolving said copolymer in a solvent, b. filtering the resultant solution through a filter having apertures on the order of 0.2 micron or smaller, c. applying a copolymer film from said solution onto said substrate, d. drying said film in a vacuum of at least 10 - 6 torr until said solvent is removed, and e. maintaining said dried film moisture-free until it is exposed to an electron beam.
Claim 3
Dependent Claim
18 words
A method according to claim 1 wherein the copolymer is a copolymer of 1-methylcyclopentene and SO 2 .
Claim 4
Dependent Claim
19 words
A method according to claim 1 wherein the copolymer film is from about 0.3 to about 1.5 microns thick.
Claim 5
Dependent Claim
18 words
A method according to claim 3 wherein drying is continued for from about 12 to about 18 hours.
Claim 6
Independent Claim
117 words
A method of recording information in the form of a relief pattern which comprises a. dissolving a copolymer of SO 2 and an olefin in a solvent, b. filtering the resultant solution through a filter having apertures on the order of 0.2 micron or smaller, c. applying a copolymer film from said solution onto a substrate, d. drying said film in a vacuum of at least 10 - 6 torr until said solvent is removed, e. maintaining said dried film moisture-free until it is exposed to an electron beam, f. exposing said film to a modulated beam of electrons, and g. developing said film by dissolving the exposed portions in a solvent to form said relief pattern.
Claim 7
Independent Claim
117 words
A method of recording information in the form of a relief pattern which comprises a. dissolving a copolymer of SO 2 and an olefin in a solvent, b. filtering the resultant solution through a filter having apertures on the order of 0.2 micron or smaller, c. applying a copolymer film from said solution onto a substrate, d. drying said film in a vacuum of at least 10 - 6 torr until said solvent is removed, e. maintaining said dried film moisture-free until it is exposed to an electron beam, f. exposing said film to a modulated beam of electrons, and g. developing said film by dissolving the exposed portions in a solvent to form said relief pattern.
Claim 8
Dependent Claim
18 words
A method according to claim 5 wherein said copolymer is a copolymer of 1-methylcyclopentene and SO 2 .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-01-26 | 1979-07-28 | 1980-01-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-01-26 | 1983-07-28 | 1984-01-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-01-26 | 1987-07-28 | 1988-01-27 | $7700.00 | Window Closed / Lapsed |