US3921092A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Resonant load power supply with phase locked loop
Assignee: Applied Materials Inc
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Filing: 1974-05-22
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Granted: 1975-11-18
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Expires: 1994-05-22
Abstract
Abstract Power supply for delivering radio frequency power to a resonant load utilizing a phase locked loop to control the phase and frequency of the power delivered by the supply to the load.
Inventors
- 👤 Douglas S Schatz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:16
CPC Classifications
H; H05; H05B; H05B6/00; H05B6/02; H05B6/04; H02; H02M; H02M7/00; H02M7/42; H02M7/44; H02M7/48; H02M7/53; H02M7/537; H02M7/538; H02M7/53803; H02M7/53806; H03; H03L; H03L7/00; H03L7/02; Y; Y02; Y02B; Y02B70/00; Y02B70/10
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
212 words
In a power supply for delivering power to a resonant load comprising a vapor source work coil for inducing a current in a material to be vaporized and a capacitive element connected electrically in series with the coil: A. a voltage controlled oscillator for providing an output signal having a frequency determined by a control signal; B. means responsive to the oscillator signal for delivering power to the load at the frequency of the oscillator signal; C. a phase detector for monitoring the phases of the voltage delivered to the load and the voltage developed across the capacitive element and providing output signals corresponding to the relative phases of sAid voltages; D. means responsive to the phase detector output signals for providing a signal having an average magnitude corresponding to the relative phases of the voltage delivered to the load and the voltage across the capacitive element; and E. means for comparing the average magnitude of the last named signal with a reference signal having a level corresponding to a predetermined difference in the monitored phases and varying the voltage of the control signal applied to the oscillator in accordance with deviations of the average magnitude from the level of the reference signal to maintain the oscillator signal at a predetermined frequency.
Claim 2
Dependent Claim
212 words
In a power supply for delivering power to a resonant load comprising a vapor source work coil for inducing a current in a material to be vaporized and a capacitive element connected electrically in series with the coil: A. a voltage controlled oscillator for providing an output signal having a frequency determined by a control signal; B. means responsive to the oscillator signal for delivering power to the load at the frequency of the oscillator signal; C. a phase detector for monitoring the phases of the voltage delivered to the load and the voltage developed across the capacitive element and providing output signals corresponding to the relative phases of sAid voltages; D. means responsive to the phase detector output signals for providing a signal having an average magnitude corresponding to the relative phases of the voltage delivered to the load and the voltage across the capacitive element; and E. means for comparing the average magnitude of the last named signal with a reference signal having a level corresponding to a predetermined difference in the monitored phases and varying the voltage of the control signal applied to the oscillator in accordance with deviations of the average magnitude from the level of the reference signal to maintain the oscillator signal at a predetermined frequency.
Claim 3
Dependent Claim
137 words
In a power supply for delivering operating power to a resonant load: A. a controlled oscillator for providing a radio frequency output signal having a frequency determined by a control signal; B. a resonant load comprising a vapor source work coil for inducing current in a material to be vaporized and a capacitive element connected electrically in series with the work coil; C. means responsive to the oscillator signal for delivering radio frequency power to the load at a frequency of the oscillator signal; D. means for monitoring a phase relationship in the power delivered to the load to detect deviations in the frequency of the power from the resonant frequency of the load; and E. means responsive to the monitored phase relationship for adjusting the control signal to maintain the oscillator signal at a predetermined frequency.
Claim 4
Dependent Claim
137 words
In a power supply for delivering operating power to a resonant load: A. a controlled oscillator for providing a radio frequency output signal having a frequency determined by a control signal; B. a resonant load comprising a vapor source work coil for inducing current in a material to be vaporized and a capacitive element connected electrically in series with the work coil; C. means responsive to the oscillator signal for delivering radio frequency power to the load at a frequency of the oscillator signal; D. means for monitoring a phase relationship in the power delivered to the load to detect deviations in the frequency of the power from the resonant frequency of the load; and E. means responsive to the monitored phase relationship for adjusting the control signal to maintain the oscillator signal at a predetermined frequency.
Claim 5
Dependent Claim
78 words
means for applying a first input signal to the phase detector corresponding in phase to the voltage across a capacitive element in the load, the phase of the voltage across the capacitive element being in quadrature with the phase of the voltage delivered to the load when the oscillator is operating at the resonant frequency; and D. means responsive to the monitored phase relationship for adjusting the control signal to maintain the oscillator signal at a predetermined frequency.
Claim 6
Dependent Claim
78 words
means for applying a first input signal to the phase detector corresponding in phase to the voltage across a capacitive element in the load, the phase of the voltage across the capacitive element being in quadrature with the phase of the voltage delivered to the load when the oscillator is operating at the resonant frequency; and D. means responsive to the monitored phase relationship for adjusting the control signal to maintain the oscillator signal at a predetermined frequency.
Claim 7
Dependent Claim
15 words
The power supply of claim 2 wherein the controlled oscillator is a voltage controlled oscillator.
Claim 8
Dependent Claim
90 words
In a power supply for delivering power to a load resonant at a predetermined frequency: A. a controlled oscillator for providing an output signal having a frequency determined by a control signal; B. means responsive to the oscillator signal for delivering power to the load at the frequency of the oscillator signal; C. means for monitoring a phase relationship in the power delivered to the load to detect deviations in the frequency of the power from the resonant frequency of the load, said means for monitoring the phase relationship including
Claim 9
Dependent Claim
90 words
In a power supply for delivering power to a load resonant at a predetermined frequency: A. a controlled oscillator for providing an output signal having a frequency determined by a control signal; B. means responsive to the oscillator signal for delivering power to the load at the frequency of the oscillator signal; C. means for monitoring a phase relationship in the power delivered to the load to detect deviations in the frequency of the power from the resonant frequency of the load, said means for monitoring the phase relationship including
Claim 10
Dependent Claim
25 words
The power supply of claim 1 further including means for adjusting the level of the reference signal and thereby the frequency of the oscillator signal.
Claim 11
Dependent Claim
47 words
The power supply of claim 1 wherein the level of the reference signal corresponds to a 90* difference in phase between the load voltage and the voltage across the capacitive element, whereby the frequency of the oscillator signal is maintained at the resonant frequency of the load.
Claim 12
Dependent Claim
19 words
The power supply of claim 2 wherein the oscillator signal is maintained at the resonant frequency of the load.
References Cited (Backward Citations)
US3826993A
Cited
US3816690A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-11-17 | 1979-05-19 | 1979-11-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-11-17 | 1983-05-19 | 1983-11-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-11-17 | 1987-05-19 | 1987-11-18 | $7700.00 | Window Closed / Lapsed |