US3901770A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for the production of microscopically small metal or metal alloy structures
Assignee: Siemens AG
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Filing: 1974-01-25
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Granted: 1975-08-26
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Expires: 1994-01-25
Abstract
Abstract This invention deals with the deposition of a microscopically small metal or metal alloy structure in which a relatively thin metal or metal alloy such as a nickel-iron alloy is vapor deposited upon a carrier after which a photoresist layer is applied over the thin layer. Channels in the form desired in the ultimate pattern are then produced using the conventional photographic technique, to leave the desired pattern exposed in the previously deposited thin layer. A thin layer of gold is then applied to the exposed layer and a thicker metal or metal alloy layer is then galvanically deposited on the gold layer. The remaining photoresist layer is then removed, followed by the removal of the remaining thin layer of metal or metal alloy. The process may also include the deposition of a thin layer of gold over the thicker layer of alloy.
Inventors
- 👤 Burkhard Littwin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:11
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/108; G; G11; G11C; G11C19/00; G11C19/02; G11C19/08; H01; H01B; H01B5/00; H01B5/14; H01F; H01F41/00; H01F41/32; H01F41/34; H05K1/00; H05K1/02; H05K1/09; H05K3/02; H05K3/06; H05K3/067; H10; H10D; H10D84/00; H10D84/01; H10W; H10W20/00; H10W20/40; H05K1/03; H05K1/0306; H05K2203/00; H05K2203/07; H05K2203/0703; H05K2203/0723; H05K2203/073; H05K3/061; H05K3/062; H05K3/38; H05K3/388
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
64 words
A METHOD FOR THE PRODUCTION OF MICROCOPIALLY SMALL METAL OR METAL ALLOY STRUCTURES COMPRISING VAPOR DEPOSITING A THIN CONTINUOUS LAYER OF METAL OR METAL ALLOY ON A SUBSTRATE, APPLYING A PHOTORESIST LAYER OVER THE THUS DEPOSITE LAYER, FORMING CHANNELS IN SAID PHOTORESIST LAYER CORRESPONDING TO THE DESIRED PATTERN THEREBY EXPOSING SAID CONTINUOUS LAYER IN THE CHANNELS, GALVANICALLY DEPOSITING A THIN GOLD LAYER ON THE
Claim 2
Independent Claim
64 words
A METHOD FOR THE PRODUCTION OF MICROCOPIALLY SMALL METAL OR METAL ALLOY STRUCTURES COMPRISING VAPOR DEPOSITING A THIN CONTINUOUS LAYER OF METAL OR METAL ALLOY ON A SUBSTRATE, APPLYING A PHOTORESIST LAYER OVER THE THUS DEPOSITE LAYER, FORMING CHANNELS IN SAID PHOTORESIST LAYER CORRESPONDING TO THE DESIRED PATTERN THEREBY EXPOSING SAID CONTINUOUS LAYER IN THE CHANNELS, GALVANICALLY DEPOSITING A THIN GOLD LAYER ON THE
Claim 3
Dependent Claim
13 words
The method of claim 1 in which said metal is a nickel-iron alloy.
Claim 4
Dependent Claim
25 words
The method of claim 1 in which said thin continuous layer of metal or metal alloy has a thickness of about 100 to 500 Angstroms.
Claim 5
Dependent Claim
19 words
The method of claim 1 in which The second layer of gold has a thickness of several hundred Angstroms.
Claim 6
Independent Claim
115 words
A method for the production of microscopically small metal structures which comprises vapor depositing a thin continuous layer of a nickel-iron alloy onto a substrate, applying a photoresist layer over the thus deposited layer, forming channels in said photoresist layer corresponding to the desired pattern thereby exposing said continous layer in said channels, galvanically depositing a first thin layer of gold over the exposed portions of said layer, galvanically depositing a thicker layer of nickel-iron alloy over said first thin layer of gold, removing the remaining photoresist layer, treating the remaining structure in a slightly acid gold bath to replace said thin nickel-iron layer with a gold layer, and etching away the last-named gold layer.
Claim 7
Independent Claim
115 words
A method for the production of microscopically small metal structures which comprises vapor depositing a thin continuous layer of a nickel-iron alloy onto a substrate, applying a photoresist layer over the thus deposited layer, forming channels in said photoresist layer corresponding to the desired pattern thereby exposing said continous layer in said channels, galvanically depositing a first thin layer of gold over the exposed portions of said layer, galvanically depositing a thicker layer of nickel-iron alloy over said first thin layer of gold, removing the remaining photoresist layer, treating the remaining structure in a slightly acid gold bath to replace said thin nickel-iron layer with a gold layer, and etching away the last-named gold layer.
Claim 8
Dependent Claim
21 words
The method of claim 5 in which the gold etching is carried out by means of a dilute potassium cyanide solution.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-08-25 | 1979-02-24 | 1979-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-08-25 | 1983-02-24 | 1983-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-08-25 | 1987-02-24 | 1987-08-26 | $7700.00 | Window Closed / Lapsed |