US3887450A
Expired / Lapsed
US
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Photopolymerizable compositions containing polymeric binding agents
Assignee: Dynachem Corp
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Filing: 1972-12-14
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Granted: 1975-06-03
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Expires: 1992-12-14
Abstract
Abstract In a photopolymerizable composition which comprises an addition polymer, an initiation system, and a polymerizable inhibitor, the improvement of using a preformed macromolecular binding agent which is a copolymer of a first monomer of a styrene-type material or a non-acidic vinyl compound and an unsaturated carboxyl-containing monomer, wherein the ratio of the first monomer to the unsaturated carboxyl-containing monomer is sufficient to render the binding agent soluble in a dilute alkaline solution. The composition may be developed in an alkaline aqueous solution and the resist formed thereby is impervious to conventional plating and etching solutions.
Inventors
- 👤 Michael N Gilano
- 👤 Richard E Beaupre
- 👤 Melvin A Lipson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:00
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/0073; H05K3/0076; G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/032; G03F7/033; H05K2203/00; H05K2203/12; H05K2203/122; H05K2203/124; H05K3/02; H05K3/06; H05K3/061; H05K3/064; H05K3/38; H05K3/389; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/111; Y10S430/114; Y10S430/117; Y10S430/118
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
133 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100*C., and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerization inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of: a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula:
Claim 2
Dependent Claim
133 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100*C., and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerization inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of: a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula:
Claim 3
Dependent Claim
133 words
A PHOTOPOLYMERIZABLE COMPOSITION COMPRISING: A. FROM 10 TO 60 PARTS BY WEIGHT OF AN ADDITION POLYMERIZABLE MATERIAL CONSISTING ESSENTIALLY OF AND BEING SOLEY ONE OR MORE NON-GASEOUS COMPOUNDS, CONTAINING AT LEAST TWO TERMINAL ETHYLENIC GROUPS, HAVING A BOILING POINT ABOVE 100*C., AND BEING SELECTED FROM THE GROUP CONSISTING OF AN UNSTATURATED ESTER OF A POLYOL, AN UNSATURATED AMIDE, AND A VINYL ESTER; B. FROM 0.001 TO 10 PARTS BY WEIGHT OF A PHOTO-INITATED FREE-RADICAL GENERATING ADDITION POLYMERIZING INITIATING SYSTEM; C. FROM 0.001 TO 5 PARTS BY WEIGHT OF A PERFORMED MACROMOPOLYMERIZATION INHIBITOR; AND D. FROM 40 TO 90 PARTS BY WEIGHT OF A PREFORMED MACROMOLECULAR POLYMERIC BINDING AGENT WHICH IS A POLYMER OF A FIRST MONOMERIC MATERIAL WHICH CONTAINS ONE OR MORE NON-ACIDIC VINYL COMPOUNDS SELECTED FROM THE GROUP HAVING THE GENERAL FORMULA:
Claim 4
Dependent Claim
133 words
A PHOTOPOLYMERIZABLE COMPOSITION COMPRISING: A. FROM 10 TO 60 PARTS BY WEIGHT OF AN ADDITION POLYMERIZABLE MATERIAL CONSISTING ESSENTIALLY OF AND BEING SOLEY ONE OR MORE NON-GASEOUS COMPOUNDS, CONTAINING AT LEAST TWO TERMINAL ETHYLENIC GROUPS, HAVING A BOILING POINT ABOVE 100*C., AND BEING SELECTED FROM THE GROUP CONSISTING OF AN UNSTATURATED ESTER OF A POLYOL, AN UNSATURATED AMIDE, AND A VINYL ESTER; B. FROM 0.001 TO 10 PARTS BY WEIGHT OF A PHOTO-INITATED FREE-RADICAL GENERATING ADDITION POLYMERIZING INITIATING SYSTEM; C. FROM 0.001 TO 5 PARTS BY WEIGHT OF A PERFORMED MACROMOPOLYMERIZATION INHIBITOR; AND D. FROM 40 TO 90 PARTS BY WEIGHT OF A PREFORMED MACROMOLECULAR POLYMERIC BINDING AGENT WHICH IS A POLYMER OF A FIRST MONOMERIC MATERIAL WHICH CONTAINS ONE OR MORE NON-ACIDIC VINYL COMPOUNDS SELECTED FROM THE GROUP HAVING THE GENERAL FORMULA:
Claim 5
Dependent Claim
133 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100*C., and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerization inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of: a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula:
Claim 6
Dependent Claim
133 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100*C., and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerization inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of: a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula:
Claim 7
Dependent Claim
112 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of trimethylolpropane triacrylate and tetraethyleneglycol diacrylate; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerizable inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of styrene and monobutyl maleate, wherein the ratio of the styrene to the monobutyl maleate is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10 percent of water-soluble base.
Claim 8
Dependent Claim
112 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of trimethylolpropane triacrylate and tetraethyleneglycol diacrylate; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerizable inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of styrene and monobutyl maleate, wherein the ratio of the styrene to the monobutyl maleate is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10 percent of water-soluble base.
Claim 9
Dependent Claim
30 words
The photopolymerizable composition of claim 3 wherein the photo-initiated free-radical generating addition polymerizing initiating system is an admixture of benzophenone and 4,4''-bis-(dimethylamino)-benzophenone and the thermal-addition polymerizable inhibitor is 2,2''-methylene-bis(4-ethyl-6-tert-butyl phenol).
Claim 10
Dependent Claim
25 words
The photopolymerizable composition of claim 3 wherein the ratio of the styrene to monobutyl maleate in the binding agent is from about 35:65 to 70:30.
Claim 11
Dependent Claim
110 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of pentaerythritol acrylates; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerizable inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of styrene and monobutyl maleate, wherein the ratio of the styrene to the monobutyl maleate is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10 percent of a water-soluble base.
Claim 12
Dependent Claim
110 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of pentaerythritol acrylates; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerizable inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of styrene and monobutyl maleate, wherein the ratio of the styrene to the monobutyl maleate is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10 percent of a water-soluble base.
Claim 13
Dependent Claim
30 words
The photopolymerizable composition of claim 6 wherein the photo-initiated free-radical generating addition polymerizing initiating system is an admixture of benzophenone and 4,4''-bis(dimethylamino)-benzophenone and the thermal-addition polymerizable inhibitor is 2,2''-methylene-bis(4-ethyl-6-tertbutyl phenol).
Claim 14
Dependent Claim
25 words
The photopolymerizable composition of claim 6 wherein the ratio of the styrene to monobutyl maleate in the binding agent is from about 35:65 to 70:30.
Claim 15
Dependent Claim
112 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of pentaerythritol acrylates; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerizable inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of vinyl acetate and crotonic acid, wherein the ratio of the vinyl acetate to the crotonic acid is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10 percent of a water-soluble base.
Claim 16
Dependent Claim
112 words
A photopolymerizable composition comprising: A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of pentaerythritol acrylates; B. from 0.001 to 10 parts by weight of a photo-initiated free-radical generating addition polymerizing initiating system; C. from 0.001 to 5 parts by weight of a thermal-addition polymerizable inhibitor; and D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of vinyl acetate and crotonic acid, wherein the ratio of the vinyl acetate to the crotonic acid is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10 percent of a water-soluble base.
Claim 17
Dependent Claim
30 words
The photopolymerizable composition of claim 9 wherein the photo-initiated free-radical generating addition polymerizing imitating system is an admixture of benzophenone and 4,4''-bis-(dimethylamino)-benzophenone and the thermal-addition polymerizable inHibitor is 2,2''-methylene-bis(4-ethyl-6-tert-butyl phenol).
Claim 18
Dependent Claim
17 words
The photopolymerizable composition of claim 9 wherein the vinyl acetate-crotonic acid ratio is from 70:30 to 95:5.
Claim 19
Dependent Claim
16 words
The composition of claim 1 wherein the copolymer is of styrene and an unsaturated carboxyl-containing monomer.
Claim 20
Dependent Claim
13 words
The composition of claim 1 wherein the unsaturated carboxyl-containing monomer is methacrylic acid.
Claim 21
Dependent Claim
13 words
The composition of claim 1 wherein the unsaturated carboxyl-containing monomer is acrylic acid.
References Cited (Backward Citations)
US2893868A
Cited
US3718473A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-06-02 | 1978-12-02 | 1979-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-06-02 | 1982-12-02 | 1983-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-06-02 | 1986-12-02 | 1987-06-03 | $7700.00 | Window Closed / Lapsed |