Abstract 1. A POLYCRYSTALLINE SILICON PRESSURE SENSOR COMPRISING: A. A SUBSTRATE SUPPORT MEMBER HAVING A FLAT UPPER SURFACE, A FLEXIBLE INNER SECTION, AND A RIGID PERIPHERAL SECTION, RELATIVELY THICK COMPARED WITH THE FLEXIBLE SECTION, DOWNWARDLY DISPOSED TO FORM A SUPPORT FOR THE FLEXIBLE SECTION, THE MEMBER BEING OF A MATERIAL ON WHICH POLYCRYSTALLINE SILICON IS CAPABLE OF BEING DEPOSITED; B. A FIRST LAYER OF POLYCRYSTALLINE SILICON FORMED OVER THE FLAT UPPER SURFACE, SUFFICIENTLY THIN TO ENABLE FLEXING WITH THE FLEXIBLE INNER SECTION OF THE MEMBER; AND C. AT LEAST ONE PIEZORESISTIVE PRESSURE SENSITIVE ELEMENT OF A FIRST CONDUCTIVITY TYPE, FORMED THROUGH THE TOP SURFACE OF THE FIRST LAYER OVER THE FLEXIBLE INNER SECTION AND ESTENDING TO THE PERIPHERAL SECTION.
A POLYCRYSTALLINE SILICON PRESSURE SENSOR COMPRISING: A. A SUBSTRATE SUPPORT MEMBER HAVING A FLAT UPPER SURFACE, A FLEXIBLE INNER SECTION, AND A RIGID PERIPHERAL SECTION, RELATIVELY THICK COMPARED WITH THE FLEXIBLE SECTION, DOWNWARDLY DISPOSED TO FORM A SUPPORT FOR THE FLEXIBLE SECTION, THE MEMBER BEING OF A MATERIAL ON WHICH POLYCRYSTALLINE SILICON IS CAPABLE OF BEING DEPOSITED; B. A FIRST LAYER OF POLYCRYSTALLINE SILICON FORMED OVER THE FLAT UPPER SURFACE, SUFFICIENTLY THIN TO ENABLE FLEXING WITH THE FLEXIBLE INNER SECTION OF THE MEMBER; AND C. AT LEAST ONE PIEZORESISTIVE PRESSURE SENSITIVE ELEMENT OF A FIRST CONDUCTIVITY TYPE, FORMED THROUGH THE TOP SURFACE OF THE FIRST LAYER OVER THE FLEXIBLE INNER SECTION AND ESTENDING TO THE PERIPHERAL SECTION.
Claim 2
Dependent Claim
117 words
A POLYCRYSTALLINE SILICON PRESSURE SENSOR COMPRISING: A. A SUBSTRATE SUPPORT MEMBER HAVING A FLAT UPPER SURFACE, A FLEXIBLE INNER SECTION, AND A RIGID PERIPHERAL SECTION, RELATIVELY THICK COMPARED WITH THE FLEXIBLE SECTION, DOWNWARDLY DISPOSED TO FORM A SUPPORT FOR THE FLEXIBLE SECTION, THE MEMBER BEING OF A MATERIAL ON WHICH POLYCRYSTALLINE SILICON IS CAPABLE OF BEING DEPOSITED; B. A FIRST LAYER OF POLYCRYSTALLINE SILICON FORMED OVER THE FLAT UPPER SURFACE, SUFFICIENTLY THIN TO ENABLE FLEXING WITH THE FLEXIBLE INNER SECTION OF THE MEMBER; AND C. AT LEAST ONE PIEZORESISTIVE PRESSURE SENSITIVE ELEMENT OF A FIRST CONDUCTIVITY TYPE, FORMED THROUGH THE TOP SURFACE OF THE FIRST LAYER OVER THE FLEXIBLE INNER SECTION AND ESTENDING TO THE PERIPHERAL SECTION.