Positioning device

Claim 2

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: at least a pair of tracks disposed in spaced relationship to each other, a beam disposed in spaced and perpendicular relationship to the tracks and disposed between the tracks and movable along the tracks in the spaced and perpendicular relationship to the tracks, first motor means disposed on the beam in spaced but cooperative relationship with one of the tracks for cooperating with that track to produce with that track a motor for providing a controlled movement of the beam along that track in the spaced and perpendicular relationship to the track, and second motor means disposed on the beam in spaced but cooperative relationship with the other one of the tracks for cooperating with that track to produce with that track a motor for providing a controlled movement of the beam along that track in the spaced and perpendicular relationship to that track, the first and second motor means being constructed to receive first polyphase signals and being disposed relative to their associated tracks to provide identical displacements of the beam relative to the tracks at the opposite ends without any rotation of the beam relative to the tracks, third motor means disposed on the beam in spaced but cooperative relationship with the beam and supporting the output member and cooperating with the beam to produce with the beam a motor for providing a controlled movement of such second means along the beam in the spaced but cooperative relationship with the beam and for providing a movement of the output member with such means, first signal means operatively coupled to the first and second motor means for introducing the first polyphase signals to the first and second motor means to energize the first and second motor means, and second signal means operatively coupled to the third motor means for introducing second polyphase signals to the third motor means to energize the third motor means.

Claim 3

In the system set forth in claim 1, each track being constructed to define a grid, the first and second motor means having a plurality of members displaced in phase relative to one another and to the grids on the tracks and energizable in a particular sequence by the first polyphase signals to provide a controlled movement of the beam along the tracks and the beam being constructed to define a grid and the third motor means having a plurality of members displaced in phase relative to one another and to the grid on the beam and Being energizable in a particular sequence by the second polyphase signals to provide a controlled movement of the output member along the beam.

Claim 4

In the system set forth in claim 1, each of the tracks in the pair defining a grid structure and the first motor means and the second motor means having elements for interacting with the grid structure of the associated tracks to define motors for providing a displacement of the first and second motor means and the beam along the tracks, the elements in the first motor means being displaced in phase relative to each other and to the grid structure of the associated track and the elements in the second motor means being displaced in phase relative to each other and to the grid structure of the associated track to provide for the controlled displacement of the first and second motor means and the beam along the tracks in accordance with the introduction of the first polyphase signals, the beam defining a grid structure and the third motor means having elements for interacting with the grid structure of the beam to define a motor for providing a displacement of the third motor means and the output member along the beam, the elements in the third motor means being displaced in phase relative to each other and to the grid structure of the beam to provide for the controlled displacement of the third motor means and the output member along the beam in accordance with the introduction of the second polyphase signals.

Claim 5

In the system set forth in claim 3, the tracks having magnetic characteristics and the first and second motor means having magnetic characteristics for interacting with the tracks to produce a force for displacement of the first and second motor means and the beam along the tracks and the beam having magnetic characteristics and the third means having magnetic characteristics for interacting with the beam to produce a force for displacement of the second means and the output member along the beam.

Claim 6

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: at least a pair of tracks disposed in spaced relationship to each other, a beam disposed in spaced and perpendicular relationship to the tracks and disposed between the tracks and movable along the tracks in the spaced relationship to the tracks, first means disposed in spaced but cooperative relationship with one of the tracks and operatively coupled to the beam and defining a motor with that track and energizable to drive the beam along the track in the spaced relationship to the track in accordance with such energizing, second means disposed in spaced but cooperative relationship to one of the tracks and cooperatively coupled to the beam and defining a motor with that track and energizable to drive the beam along the track in the spaced relationship to the track in accordance with such energizing, the first and second means being constructed and disposed relative to their associated tracks to provide substantially identical displacements of the first and second means along their associated tracks to maintain the beam in perpendicular relationship to the tracks, third means operatively coupled to the output member and disposed in spaced but cooperative relationship with the beam and defining a motor with the beam and energizable to drive the output member along the beam in the spaced relationship to the beam in accordance with such energizing, fourth means for introducing first polyphase signals to the first and second means to provide an energizing of the first and second means for driving the beam along the tracks, and fifth means for introducing second polyphase signals to the third means to provide an energizing of the third means for driving the output member along the beam.

Claim 7

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: at least a pair of tracks disposed in spaced relationship to each other, a beam disposed in spaced and perpendicular relationship to the tracks and disposed between the tracks and movable along the tracks in the spaced relationship to the tracks, first means disposed in spaced but cooperative relationship with one of the tracks and operatively coupled to the beam and defining a motor with that track and energizable to drive the beam along the track in the spaced relationship to the track in accordance with such energizing, second means disposed in spaced but cooperative relationship to one of the tracks and cooperatively coupled to the beam and defining a motor with that track and energizable to drive the beam along the track in the spaced relationship to the track in accordance with such energizing, the first and second means being constructed and disposed relative to their associated tracks to provide substantially identical displacements of the first and second means along their associated tracks to maintain the beam in perpendicular relationship to the tracks, third means operatively coupled to the output member and disposed in spaced but cooperative relationship with the beam and defining a motor with the beam and energizable to drive the output member along the beam in the spaced relationship to the beam in accordance with such energizing, fourth means for introducing first polyphase signals to the first and second means to provide an energizing of the first and second means for driving the beam along the tracks, and fifth means for introducing second polyphase signals to the third means to provide an energizing of the third means for driving the output member along the beam.

Claim 8

In the system set forth in claim 5, the first means being interactive with its associated track for determining the position of the bEam relative to the track while driving the beam along the track and the second means being interactive with its associated track for determining the position of the beam relative to the track while driving the beam along the track and the third means being interactive with the beam for determining the position of the output member along the beam while driving the output member along the beam.

Claim 9

In the system set forth in claim 5, the tracks being in the form of magnetic grids and the first means being constructed with magnetic properties for cooperation with the magnetic grid on its associated track and provided with a plurality of elements displaced in phase in a particular relationship to the grid and to one another and energizable by the first polyphase signals in a particular sequence to provide displacements of the beam along the tracks and the second means being constructed with magnetic properties for cooperation with the magnetic grid on its associated tracks and provided with a plurality of elements displaced in phase in a particular relationship to the grid and to one another and energizable by the first polyphase signals in a particular sequence and the beam being in the form of a magnetic grid and the third means being constructed with magnetic properties for cooperation with the magnetic grid on the beam and provided with a plurality of elements displaced in phase in a particular relationship to the grid and to one another and energizable by the second polyphase signals in a particular sequence to provide displacements of the output member along the beam.

Claim 10

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: at least a pair of tracks disposed in spaced and parallel relationship to each other, a beam disposed between the tracks in contiguous and perpendicular relationship to the tracks and disposed between the tracks for independent displacement along the tracks in such contiguous and perpendicular relationship, a plurality of first means provided on the tracks at spaced positions along the tracks to define a grid, second means disposed in spaced but contiguous relationship to one of the tracks and in operatively coupled relationship to one end of the beam to drive the beam, the second means having a plurality of elements displaced in phase in a particular relationship to the first means on that track and energizable by first polyphase signals in a particular sequence and cooperative with the first means, when energized, for interacting with the first means to produce arbitrary displacements between the first means and the second means along the track in such contiguous relationship, third means disposed in spaced but contiguous relationship to the other one of the tracks and in operatively coupled relationship to the other end of the beam to drive the beam, the third means having a plurality of elements displaced in phase in a particular relationship to the first means in that track and energizable by the first polyphase signals in the particular sequence and cooperative with the first means, when energized, for interacting with the first means to produce arbitrary displacements between the first means and the third means along the track in such contiguous relationship, the second and third means being constructed and disposed relative to their associated tracks to provide substantially identical displacements of the second and third means along their associated tracks to maintain the beam in perpendicular relationship to the tracks, a plurality of fourth means provided on the beam at spaced positions along the beam to define a grid, fifth means provided in spaced but contiguous relationship to the beam and in operatively coupled relationship to the output member, the fifth means having a plurality of elements displaced in phase in a particular relationship to the fourth means on the beam and energizable by second polyphase signals in a particular sequence and cooperative with the fourth means, when energized, for interacting with the fourth means to produce arbitrary displacements between the third means and the fourth means along the beam in such contiguous relationship, sixth means for introducing the first polyphase signals to the second and third means to energize the pluralities of elements in the second and third means in the particular sequence, and seventh means for introducing the second polyphase signals to the fifth means to energize the plurality of elements in the fifth means in the particular sequence.

Claim 11

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: at least a pair of tracks disposed in spaced and parallel relationship to each other, a beam disposed between the tracks in contiguous and perpendicular relationship to the tracks and disposed between the tracks for independent displacement along the tracks in such contiguous and perpendicular relationship, a plurality of first means provided on the tracks at spaced positions along the tracks to define a grid, second means disposed in spaced but contiguous relationship to one of the tracks and in operatively coupled relationship to one end of the beam to drive the beam, the second means having a plurality of elements displaced in phase in a particular relationship to the first means on that track and energizable by first polyphase signals in a particular sequence and cooperative with the first means, when energized, for interacting with the first means to produce arbitrary displacements between the first means and the second means along the track in such contiguous relationship, third means disposed in spaced but contiguous relationship to the other one of the tracks and in operatively coupled relationship to the other end of the beam to drive the beam, the third means having a plurality of elements displaced in phase in a particular relationship to the first means in that track and energizable by the first polyphase signals in the particular sequence and cooperative with the first means, when energized, for interacting with the first means to produce arbitrary displacements between the first means and the third means along the track in such contiguous relationship, the second and third means being constructed and disposed relative to their associated tracks to provide substantially identical displacements of the second and third means along their associated tracks to maintain the beam in perpendicular relationship to the tracks, a plurality of fourth means provided on the beam at spaced positions along the beam to define a grid, fifth means provided in spaced but contiguous relationship to the beam and in operatively coupled relationship to the output member, the fifth means having a plurality of elements displaced in phase in a particular relationship to the fourth means on the beam and energizable by second polyphase signals in a particular sequence and cooperative with the fourth means, when energized, for interacting with the fourth means to produce arbitrary displacements between the third means and the fourth means along the beam in such contiguous relationship, sixth means for introducing the first polyphase signals to the second and third means to energize the pluralities of elements in the second and third means in the particular sequence, and seventh means for introducing the second polyphase signals to the fifth means to energize the plurality of elements in the fifth means in the particular sequence.

Claim 12

In the system set forth in claim 8, the beam being adjustable relative to the tracks to compensate for differences in the relative positions of the tracks.

Claim 13

In the system set forth in claim 9, the first means having magnetic characteristics and the second means having magnetic characteristics for interacting with the first means on the associated track to produce a force for displacements between the first means and the second means along the tracks in accordance with the phase characteristics of the first polyphase signals and the third means having magnetic characteristics for interacting with the first means on the associated track to produce a force for displacements between the first means and third means along the tracks in accordance with the characteristics of the first polyphase signals and the fourth means having magnetic characteristics and the fifth means having magnetic characteristics for interacting with the fourth means to produce a force for displacements between the fourth means and the fifth means along the beam in accordance with the phase characteristics of the second polyphase signals.

Claim 14

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: a pair of tracks disposed in spaced relationship to each other, a beam spaced from the tracks and disposed in spaced and contiguous and perpendicular relationship to the tracks and disposed between the tracks and movable along the tracks and including first means disposed at one end of the beam and defining a motor with one of the tracks for producing an interaction with that track in accordance with the introduction of first polyphase signals to the first means to drive the beam along the track in such spaced and contiguous and perpendicular relationship and for simultaneously obtaining a determination of the position of the beam along the track and further including second means disposed at the other end of the beam and defining a motor with the other track for producing an interaction with such other track to drive such beam along such other track in such contiguous and perpendicular relationship in accordance with the introduction of the first polyphase signals to the second means and for simultaneously obtaining a determination of the beam along such other track, the first and second means being constructed to receive the first polyphase signals and being disposed relative to their associated tracks to simultaneously and indentically energize the motors defined by the first and second means and the pair of tracks and to provide substantially identical displacements of the beam along the associated tracks and thereby maintain the beam in perpendicular relationship to the tracks, third means movable along the beam and disposed in spaced but contiguous relationship to the beam and coupled to the output member and defining a motor with the beam for providing an interaction with the beam to drive the output member along the tracks in such spaced but contiguous relationship in accordance with the introduction of second polyphase signals to the third means and for simultaneously obtaining a determination of the position of the output member along the beam, fourth means for introducing the first polyphase signals to the first and second means to produce a simultaneous and identical energizing of The first and second means for driving the beam along the tracks in perpendicular relationship to the tracks, and fifth means for introducing the second polyphase signals to the third means to produce an energizing of the third means for driving the output member along the tracks.

Claim 15

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: a pair of tracks disposed in spaced relationship to each other, a beam spaced from the tracks and disposed in spaced and contiguous and perpendicular relationship to the tracks and disposed between the tracks and movable along the tracks and including first means disposed at one end of the beam and defining a motor with one of the tracks for producing an interaction with that track in accordance with the introduction of first polyphase signals to the first means to drive the beam along the track in such spaced and contiguous and perpendicular relationship and for simultaneously obtaining a determination of the position of the beam along the track and further including second means disposed at the other end of the beam and defining a motor with the other track for producing an interaction with such other track to drive such beam along such other track in such contiguous and perpendicular relationship in accordance with the introduction of the first polyphase signals to the second means and for simultaneously obtaining a determination of the beam along such other track, the first and second means being constructed to receive the first polyphase signals and being disposed relative to their associated tracks to simultaneously and indentically energize the motors defined by the first and second means and the pair of tracks and to provide substantially identical displacements of the beam along the associated tracks and thereby maintain the beam in perpendicular relationship to the tracks, third means movable along the beam and disposed in spaced but contiguous relationship to the beam and coupled to the output member and defining a motor with the beam for providing an interaction with the beam to drive the output member along the tracks in such spaced but contiguous relationship in accordance with the introduction of second polyphase signals to the third means and for simultaneously obtaining a determination of the position of the output member along the beam, fourth means for introducing the first polyphase signals to the first and second means to produce a simultaneous and identical energizing of The first and second means for driving the beam along the tracks in perpendicular relationship to the tracks, and fifth means for introducing the second polyphase signals to the third means to produce an energizing of the third means for driving the output member along the tracks.

Claim 16

In the system set forth in claim 11, the tracks being in the form of grids and the first and second means being provided with magnetic properties and being disposed in cooperative relationship with the grids on the respective tracks to provide arbitrary movements of the first and the second means and the beam along the tracks and the beam being in the form of a grid and the third means being provided with magnetic properties and being disposed in cooperative relationship with the grid on the beam to provide arbitrary movements of the third means and the output member along the beam.

Claim 17

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: at least a pair of tracks disposed in spaced relationship to each other, a beam disposed between the tracks in perpendicular relationship to the tracks and in contiguous but displaced relationship to the tracks for movement along the tracks in such perpendicular and contiguous but displaced relationship to the tracks, first means supported by the beam in contiguous but displaced relationship to one of the tracks and defining a motor with that track for interacting with that track to produce an independent movement of the beam along that track in accordance with the introduction of first polyphase signals to the first means, second means supported by the beam in contiguous but displaced relationship to the other one of the tracks and defining a motor with such other track for interacting with that track to produce an independent movement of the beam along that track in accordance with the introduction of the first polyphase signals to the second means, the first and second means having constructed to receive the first polyphase signals for energizing the first and second means and being disposed relative to their associated tracks to obtain simultaneous and identical movements of the beam along the first and second tracks in accordance with the introduction of the first polyphase signals and to maintain the beam in perpendicular relationship to the tracks, third means disposed in contiguous but displaced relationship to the beam and coupled to the output member and defining a motor with the beam for interacting with the beam to produce an independent movement of the output member along the beam in such contiguous but displaced relationship in accordance with the introduction of second polyphase signals to the third means, fourth means disposed on the beam and included in the first means and cooperative with the associated track for maintaining the beam in contiguous but displaced relationship to the track, fifth means disposed on the beam and included in the second means and cooperative with the associated track for maintaining the beam in contiguous but displaced relationship to such track, sixth means included in the third means and cooperative with the beam for maintaining the third means in contiguous but displaced relationship to the beam, seventh means for introducing the first polyphase signals to the first and second means to produce simultaneous and identical movements of the first and second means along their associated tracks, and eighth means for introducing the second polyphase signals to the third means to produce a movement of the third means along the beam.

Claim 18

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: at least a pair of tracks disposed in spaced relationship to each other, a beam disposed between the tracks in perpendicular relationship to the tracks and in contiguous but displaced relationship to the tracks for movement along the tracks in such perpendicular and contiguous but displaced relationship to the tracks, first means supported by the beam in contiguous but displaced relationship to one of the tracks and defining a motor with that track for interacting with that track to produce an independent movement of the beam along that track in accordance with the introduction of first polyphase signals to the first means, second means supported by the beam in contiguous but displaced relationship to the other one of the tracks and defining a motor with such other track for interacting with that track to produce an independent movement of the beam along that track in accordance with the introduction of the first polyphase signals to the second means, the first and second means having constructed to receive the first polyphase signals for energizing the first and second means and being disposed relative to their associated tracks to obtain simultaneous and identical movements of the beam along the first and second tracks in accordance with the introduction of the first polyphase signals and to maintain the beam in perpendicular relationship to the tracks, third means disposed in contiguous but displaced relationship to the beam and coupled to the output member and defining a motor with the beam for interacting with the beam to produce an independent movement of the output member along the beam in such contiguous but displaced relationship in accordance with the introduction of second polyphase signals to the third means, fourth means disposed on the beam and included in the first means and cooperative with the associated track for maintaining the beam in contiguous but displaced relationship to the track, fifth means disposed on the beam and included in the second means and cooperative with the associated track for maintaining the beam in contiguous but displaced relationship to such track, sixth means included in the third means and cooperative with the beam for maintaining the third means in contiguous but displaced relationship to the beam, seventh means for introducing the first polyphase signals to the first and second means to produce simultaneous and identical movements of the first and second means along their associated tracks, and eighth means for introducing the second polyphase signals to the third means to produce a movement of the third means along the beam.

Claim 19

In the system set forth in claim 13, the fourth, fifth and sixth means constituting hydrostatic air bearings.

Claim 20

In the system set forth in claim 13, the first and second means being energizable and being cooperative with the associated tracks to provide a determination of the position of the first and second meaNs and the beam along the associated tracks and the third means being energizable and being cooperative with the beam to provide a determination of the position of the third means and the output member along the beam.

Claim 21

In a system for providing a controlled indication of displacement of an output member along first and second coordinate axes, the combination of: at least a pair of tracks disposed in spaced relationship to each other, a beam disposed between the tracks in spaced and perpendicular relationship to the tracks and movable along the tracks in the spaced and perpendicular relationship to the tracks, first means operatively coupled to the beam for movement with the beam and disposed in spaced but contiguous relationship to one of the tracks and cooperative with that track to define a reluctance motor with the track for producing an interaction between the first means and the track in accordance with the introduction of first polyphase signals to the first means to provide a displacement of the beam and the first means along the track, and second means operatively coupled to the beam for movement with the beam and disposed in spaced but contiguous relationship to the other one of the tracks and cooperative with that track to define a reluctance motor with that track for producing an interaction between the second means and the track in accordance with the introduction of the first polyphase signals to the second means to provide a displacement of the beam and the second means along that track, and the first and second means being constructed and being disposed relative to their associated tracks to provide substantially identical displacements of the first and second means along their associated tracks and to maintain the output member in perpendicular relationship to the tracks, and third means operatively coupled to the output member and disposed in spaced but contiguous relationship to the beam and cooperative with the beam to define a reluctance motor with the beam for producing an interaction between the second means and the beam in accordance with the introduction of second polyphase signals to the third means to provide a displacement of the third means and the output member along the beam, fourth means for introducing the first polyphase signals to the first and second means to produce identical displacements of the first and second means along their associated tracks in accordance with the characteristics of the first polyphase signals, and fifth means for introducing the second polyphase signals to the third means to produce a displacement of the third means along the beam in accordance with the characteristics of the second polyphase signals.

Claim 22

In a system for providing a controlled indication of displacement of an output member along first and second coordinate axes, the combination of: at least a pair of tracks disposed in spaced relationship to each other, a beam disposed between the tracks in spaced and perpendicular relationship to the tracks and movable along the tracks in the spaced and perpendicular relationship to the tracks, first means operatively coupled to the beam for movement with the beam and disposed in spaced but contiguous relationship to one of the tracks and cooperative with that track to define a reluctance motor with the track for producing an interaction between the first means and the track in accordance with the introduction of first polyphase signals to the first means to provide a displacement of the beam and the first means along the track, and second means operatively coupled to the beam for movement with the beam and disposed in spaced but contiguous relationship to the other one of the tracks and cooperative with that track to define a reluctance motor with that track for producing an interaction between the second means and the track in accordance with the introduction of the first polyphase signals to the second means to provide a displacement of the beam and the second means along that track, and the first and second means being constructed and being disposed relative to their associated tracks to provide substantially identical displacements of the first and second means along their associated tracks and to maintain the output member in perpendicular relationship to the tracks, and third means operatively coupled to the output member and disposed in spaced but contiguous relationship to the beam and cooperative with the beam to define a reluctance motor with the beam for producing an interaction between the second means and the beam in accordance with the introduction of second polyphase signals to the third means to provide a displacement of the third means and the output member along the beam, fourth means for introducing the first polyphase signals to the first and second means to produce identical displacements of the first and second means along their associated tracks in accordance with the characteristics of the first polyphase signals, and fifth means for introducing the second polyphase signals to the third means to produce a displacement of the third means along the beam in accordance with the characteristics of the second polyphase signals.

Claim 23

In the system set forth in claim 16, the tracks having magnetic properties and the first means being provided with magnetic properties for cooperating with the associated track to define a magnetic reluctance motor and the second means being provided with magnetic properties for cooperating with the associated track to define a magnetic reluctance motor and the beam having magnetic properties and the third means being provided with magnetic properties for cooperating with the beam to define a magnetic reluctance motor.

Claim 24

In the system set forth in claim 17, the tracks defining a magnetic grid and the first means having a plurality of elements displaced by a particular phase relationship from one another and from the grids on the tracks with properties of becoming energized in a particular sequence in accordance with the introduction of the first polyphase signals to the elements and of producing magnetic lines of force, when energized, for driving the first means along its associated track and the second means having a plurality of elements displaced by a particular phase relationship from one another and from the grids on the track with properties of becoming energized in a particular sequence in accordance with the introduction of the First polyphase signals to the elements and of producing magnetic lines of force, when energized, for driving the second means along its associated track and the third means having a plurality of elements displaced by a particular phase relationship from one another and from the grids on the beam with properties of becoming energized in a particular sequence in accordance with the introduction of the second polyphase signals to the elements and of producing magnetic lines of force, when energized, for driving the third means along the beam.

Claim 25

In the system set forth in claim 18, the grids on the tracks and on the beam being magnetic and the first and second means including permanent magnets and magnetic elements disposed in contiguous relationship to the grids on the tracks and including windings on the magnetic elements and the magnetic elements being magnetized by the permanent magnets and by the fluxes produced by currents flowing through the windings in accordance with the introduction of the first polyphase signals to the first and second means and the grids on the tracks being magnetized in accordance with the magnetizing of the magnetic elements and the third means including permanent magnets and magnetic elements disposed in contiguous relationship to the grid on the beam and including windings on the magnetic elements and the magnetic elements in the third means being magnetized by the permanent magnets in the third means and by the fluxes produced by currents flowing through the windings in accordance with the introduction of the second polyphase signals to the third means and the grid on the beam being magnetized in accordance with the magnetizing of the magnetic elements in the third means.

Claim 26

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: a plurality of tracks disposed in spaced relationship to one another, a beam disposed between the tracks in spaced and perpendicular relationship to the tracks and movable along the tracks in the spaced and perpendicular relationship to the tracks, a plurality of first means each disposed on the beam in cooperative relationship with an individual one of the tracks in the plurality and defining a motor with the individual track for providing a controlled movement of the beam along the individual track in the spaced and perpendicular relationship to the individual track, each of the first means being constructed to simultaneously receive first polyphase signals to provide the controlled movement of the beam along the individual tracks, the first means in the plurality being constructed and disposed relative to their associated tracks to provide substantially identical displacements of the first means along their associated tracks in accordance with the introduction of the first polyphase signals and to maintain the beam in perpendicular relationship to the tracks, second means disposed on the beam is spaced but cooperative relationship with the beam and supporting the output member and defining a motor with the beam for providing a controlled movement of such means along the beam in spaced relationship with the beam in accordance with the introduction of second polyphase signals to the second means and for providing a movement of the output member with such means, third means for introducing the first polyphase signals to the first means in the plurality to produce the controlled movements of the beam along the tracks in perpendicular relationship to the tracks, fourth means for introducing the second polyphase signals to the second means to obtain the controlled movement of the output member along the beam, fifth means disposed at particular positions on the beam for determining the stress on the beam at such positions, and sixth means responsive to the stresses indicated by the fifth means for adjusting the forces produced by the individual ones of the first means on the beam at the associaTed ones of the tracks to provide particular stresses on the beam at the particular positions to maintain the beam in perpendicular relationship to the tracks.

Claim 27

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: a plurality of tracks disposed in spaced relationship to one another, a beam disposed between the tracks in spaced and perpendicular relationship to the tracks and movable along the tracks in the spaced and perpendicular relationship to the tracks, a plurality of first means each disposed on the beam in cooperative relationship with an individual one of the tracks in the plurality and defining a motor with the individual track for providing a controlled movement of the beam along the individual track in the spaced and perpendicular relationship to the individual track, each of the first means being constructed to simultaneously receive first polyphase signals to provide the controlled movement of the beam along the individual tracks, the first means in the plurality being constructed and disposed relative to their associated tracks to provide substantially identical displacements of the first means along their associated tracks in accordance with the introduction of the first polyphase signals and to maintain the beam in perpendicular relationship to the tracks, second means disposed on the beam is spaced but cooperative relationship with the beam and supporting the output member and defining a motor with the beam for providing a controlled movement of such means along the beam in spaced relationship with the beam in accordance with the introduction of second polyphase signals to the second means and for providing a movement of the output member with such means, third means for introducing the first polyphase signals to the first means in the plurality to produce the controlled movements of the beam along the tracks in perpendicular relationship to the tracks, fourth means for introducing the second polyphase signals to the second means to obtain the controlled movement of the output member along the beam, fifth means disposed at particular positions on the beam for determining the stress on the beam at such positions, and sixth means responsive to the stresses indicated by the fifth means for adjusting the forces produced by the individual ones of the first means on the beam at the associaTed ones of the tracks to provide particular stresses on the beam at the particular positions to maintain the beam in perpendicular relationship to the tracks.

Claim 28

In the system set forth in claim 20, each of the tracks in the plurality defining a grid structure and each of the first means having a plurality of elements for interacting with the grid structure of the associated track to provide a displacement of each of the first means and the beam along the associated track, the elements in each of the first means being displaced in phase in a particular relationship to each other and the grid structure of the associated track to provide for the displacement of the first means and the beam along the track in accordance with the introduction of the first polyphase signals to the first means, the beam defining a grid structure and the second means having a plurality of elements for interacting with the grid structure of the beam to provide a displacement of the second means along the beam, the elements in the second means being displaced in phase in a particular relationship to each other and to the grid to provide for the displacement of the second means along the beam in accordance with the introduction of the second polyphase signals to the second means.

Claim 29

In the system set forth in claim 21, the tracks having magnetic characteristics and each of the first means having magnetic characteristics for interacting with the associated track to produce a force for displacement of the first means and the beam along the track in accordance with the introduction of the first polyphase signals to the first means and the beam having magnetic characteristics and the second means having magnetic characteristics for interacting with the beam to produce a force for displacement of the second means along the beam in accordance with the introduction of the second polyphase signals to the second means.

Claim 30

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: at least a first pair of tracks disposed in spaced relationship to each other along a first coordinate axis, a first beam disposed between the first pair of tracks in spaced and perpendicular relationship to the first tracks and movable along the tracks in the spaced and perpendicular relationship to the tracks, first means disposed in spaced relationship to the first tracks and operatively coupled to the first beam and defining motors with the tracks when energized to drive the beam along the tracks in accordance with the introduction of first polyphase signals to the first means to produce such energizing, at least a second pair of tracks disposed in spaced relationship to each other along a second coordinate axis and in perpendicular relationship to the first tracks, a second beam disposed between the second pair of tracks in spaced and perpendicular relationship to the second tracks and movable along the second tracks in the spaced and perpendicular relationship to the tracks and disposed in crossing and perpendicular relationship with the first beam, seocnd means disposed in spaced relationship to the second tracks and operatively coupled to the second beam and defining motors with the second tracks when energized to drive the second beam along the second tracks in accordance with the introduction of second polyphase signals to the second means to produce such energizing, third means disposed in spaced relationship with the first beam at a position adjacent to the crossing relationship between the first and second beams and operatively coupled to the output member and defining a motor with the first beam when energized in accordance with the introduction of the second polyphase signals to the third means to produce such energizing, fourth means disposed in spaced relationship with the second beam at a position adjacent to the crossing relationship between the first and second beams and operativeLy coupled to the output member and defining a motor with the second beam when energized in accordance with the introduction of the first polyphase signals in the fourth means to produce such energizing, fifth means for introducing the first polyphase signals to the first and fourth means to drive the first beam along the first pair of tracks and the output member along the second beam on a synchronized basis, and sixth means for introducing the second polyphase signals to the second and third means to drive the second beam along the second pair of tracks and the output member along the first beam on a synchronized basis.

Claim 31

In a system for providing a controlled movement of an output member along first and second coordinate axes, the combination of: at least a first pair of tracks disposed in spaced relationship to each other along a first coordinate axis, a first beam disposed between the first pair of tracks in spaced and perpendicular relationship to the first tracks and movable along the tracks in the spaced and perpendicular relationship to the tracks, first means disposed in spaced relationship to the first tracks and operatively coupled to the first beam and defining motors with the tracks when energized to drive the beam along the tracks in accordance with the introduction of first polyphase signals to the first means to produce such energizing, at least a second pair of tracks disposed in spaced relationship to each other along a second coordinate axis and in perpendicular relationship to the first tracks, a second beam disposed between the second pair of tracks in spaced and perpendicular relationship to the second tracks and movable along the second tracks in the spaced and perpendicular relationship to the tracks and disposed in crossing and perpendicular relationship with the first beam, seocnd means disposed in spaced relationship to the second tracks and operatively coupled to the second beam and defining motors with the second tracks when energized to drive the second beam along the second tracks in accordance with the introduction of second polyphase signals to the second means to produce such energizing, third means disposed in spaced relationship with the first beam at a position adjacent to the crossing relationship between the first and second beams and operatively coupled to the output member and defining a motor with the first beam when energized in accordance with the introduction of the second polyphase signals to the third means to produce such energizing, fourth means disposed in spaced relationship with the second beam at a position adjacent to the crossing relationship between the first and second beams and operativeLy coupled to the output member and defining a motor with the second beam when energized in accordance with the introduction of the first polyphase signals in the fourth means to produce such energizing, fifth means for introducing the first polyphase signals to the first and fourth means to drive the first beam along the first pair of tracks and the output member along the second beam on a synchronized basis, and sixth means for introducing the second polyphase signals to the second and third means to drive the second beam along the second pair of tracks and the output member along the first beam on a synchronized basis.

Claim 32

In the system set forth in claim 23, the third means being interactive with the first beam for determining the position of the output member along the first coordinate axis and the fourth means being interactive with the second beam for determining the position of the output member along the second coordinate axis.

Claim 33

In the system set forth in claim 24, the first tracks being in the form of magnetic grids and the first means being constructed with magnetic properties when energized by the first polyphase signals for cooperation with the grids on the first tracks to provide displacement of the first beam along the first tracks in accordance with such energizing and the second tracks being in the form of magnetic grids and the second means being constructed with magnetic properties when energized by the second polyphase signals for cooperation with the grids on the second tracks to provide displacement of the second beam along the second tracks in accordance with such energizing.

Claim 34

In the system set forth in claim 24, the first beam being in the form of a magnetic grid and the third means being constructed with magnetic properties when energized by the second polyphase signals for cooperation with the grid on the first beam to provide displacement of the third means in accordance with such energizing and the second means being in the form of a magnetic grid and the fourth means being constructed with magnetic properties when energized by the first polyphase signals for cooperation with the grid on the second beam to provide displacement of the fourth means in accordance with such energizing.

Claim 35

In a system for providing a controlled movement of an output member along first and second coordinate axes having a perpendicular relationship to each other, the combination of: at least a first pair of tracks disposed in spaced relationship to each other along the first coordinate axis, a first beam disposed between the first pair of tracks in spaced and perpendicualr relationship to the first pair of tracks and movable along the tracks in the spaced and perpendicular relationship to the tracks, at least a second pair of tracks disposed in spaced relationship to each other along the second coordinate axis, a second beam disposed between the second pair of tracks in spaced and perpendicular relationship to the second pair of tracks and in intersecting relationship with the first beam and movable along the tracks in the spaced and perpendicular relationship to the tracks, first means disposed on the first beam in cooperative relationship with the first pair of tracks for providing a controlled displacement of the beam along the first pair of tracks in the spaced and perpendicular relationship to the tracks in accordance with the introduction of first polyphase signals to the first means, second means disposed on the second beam in cooperative relationship with the second pair of tracks for providing a controlled displacement of the beam along the second pair of tracks in the spaced and perpendicular relationship to the tracks in accordance with the introduction of second polyphase signals to the second means, an output member, and third and fourth means respectively disposed on individual ones of the first and second beams in spaced relationship to the other one of the first aNd second beams for providing a controlled displacement of the output member(s) along the first and second beams in accordance with the respective introduction of the second and first signals to the third and fourth means.

Claim 36

In a system for providing a controlled movement of an output member along first and second coordinate axes having a perpendicular relationship to each other, the combination of: at least a first pair of tracks disposed in spaced relationship to each other along the first coordinate axis, a first beam disposed between the first pair of tracks in spaced and perpendicualr relationship to the first pair of tracks and movable along the tracks in the spaced and perpendicular relationship to the tracks, at least a second pair of tracks disposed in spaced relationship to each other along the second coordinate axis, a second beam disposed between the second pair of tracks in spaced and perpendicular relationship to the second pair of tracks and in intersecting relationship with the first beam and movable along the tracks in the spaced and perpendicular relationship to the tracks, first means disposed on the first beam in cooperative relationship with the first pair of tracks for providing a controlled displacement of the beam along the first pair of tracks in the spaced and perpendicular relationship to the tracks in accordance with the introduction of first polyphase signals to the first means, second means disposed on the second beam in cooperative relationship with the second pair of tracks for providing a controlled displacement of the beam along the second pair of tracks in the spaced and perpendicular relationship to the tracks in accordance with the introduction of second polyphase signals to the second means, an output member, and third and fourth means respectively disposed on individual ones of the first and second beams in spaced relationship to the other one of the first aNd second beams for providing a controlled displacement of the output member(s) along the first and second beams in accordance with the respective introduction of the second and first signals to the third and fourth means.

Claim 37

In a system set forth in claim 27, the first and second pairs of tracks having magnetic characteristics for respectively interacting with the first and second means in accordance with the respective introduction of the first and second polyphase signals to the first and second means to produce a force for displacement of the first means and the first beam along the first pair of tracks and to produce a force for displacement of the second means and the second beam along the second pair of tracks.

Claim 38

In the system set forth in claim 28, the first and second beams having magnetic characteristics for respective interacting with the third and fourth means in accordance with the respective introduction of the second and first polyphase signals to the third and fourth means to produce forces for displacement of the third and fourth means and the output member along the first and second beams to maintain the output member at the position of intersection of the first and second beams.

Claim 39

In the system set forth in claim 1, a plurality of tracks being disposed in spaced relationship to each other and in perpendicular relationship to the beam along the length of the beam and individual means corresponding to the first and second means being provided on the beam in association with individual ones of such tracks for cooperating with its associated track to produce with the associated track a motor for providing a controlled movement of the beam along the associated track in the spaced and perpendicular relationship to the associated track and being constructed to receive the first polyphase signals to provide identical displacements of the beam along the tracks and the first signal means introducing the first polyphase signals to the tracks in the plurality.

Claim 40

In the system set forth in claim 13, a plurality of tracks being disposed in spaced and parallel relationship to each other and in perpendicular relationship to the beam along the length of the beam and individual means corresponding to the first and second means being provided on the beam in association with individual ones of such tracks and defining a motor with its associated track for interacting with the associated track to produce an independent movement of the beam along the associated track in accordance with the introduction of the first polyphase signals to such individual means and the seventh means providing for the introduction of the first polyphase signals to such individual means.

Claim 41

In the system set forth in claim 7, a plurality of tracks being disposed in spaced and parallel relationship to each other and in perpendicular relationship to the beam along the length of the beam and in the form of magnetic grids and individual means corresponding to the first and second means being provided on the beam in association with individual ones of such tracks and being provided with magnetic properties and with a plurality of elements displaced in phase in a particular relationship to the grid on the associated track and to one another and energizable by the first polyphase signals in a particular sequence to provide displacements of the beam along the tracks and the fourth means providing for the introduction of the first polyphase signals to such individual means.

Claim 42

In the system set forth in claim 16, a plurality of tracks being disposed in spaced and parallel relationship to each other and in perpendicular relationship to the beam along the length of the beam and individual means corresponding to the first and second means being provided on the beam in association with individual ones of such tracks and cooperative with the associated track to define a reluctance motor with the associated track for producing an interaction between such individual means and the associateD tracks in accordance with the introduction of the first polyphase signals to the individual means to provide a displacement of such individual means and the beam along the associated tracks and the fourth means providing for the introduction of the first polyphase signals to such individual means.

Claim 43

In the system set forth in claim 11, a plurality of tracks being disposed in spaced and parallel relationship to each other and in perpendicular relationship to the beam along the length of the beam and individual means corresponding to the first and second means being provided on the beam in association with individual ones of such tracks and being supported by the beam in contiguous but displaced relationship to the associated ones of the tracks for interacting with the associated track to produce an independent movement of the beam along the associated track in accordance with the introduction of the first polyphase signals to such individual means and the fourth means providing for the introduction of the first polyphase signals to such individual means.