US3840391A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for the preparation of thin films by ultra-sonically vaporing solutions into an aerosol
Assignee: Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
•
Filing: 1971-10-20
•
Granted: 1974-10-08
•
Expires: 1991-10-20
Abstract
Abstract Thin films of metal, metallic compounds or other materials are prepared by ultrasonic atomization of a solution which is intended to form the material to be deposited, the aerosol which is thus produced being transported by a carrier gas and deposited on a heated substrate.
Inventors
- 👤 J Spitz
- 👤 J Viguie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:34
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/54; B; B05; B05B; B05B17/00; B05B17/04; B05B17/06; B05B17/0607; B05B17/0615; G03F1/68
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
83 words
PROCESS FOR THE EVAPORATION OF A THIN LAYER ON A METALLIC BASE BY PROJECTING ON A HEATED SUBSTRATE AN AEROSOL OF A SOLUTION INCULDING THE MATERIALS TO BE DEPOSITED ON CONTACT WITH THE HEATED SUBSTRATE, THE STEPS OF FORMING AN AEROSOL BY ATOMIZING THE SOLUTION BY ULTRA-SONIC WAVES, DIRECTING THIS AEROSOL TOWARD THE HEATED SUBSTRATE BY A CARRIER GAS, CONTROLLING THE QUANTITY OF AEROSOL PRODUCED BY THE POWER OF THE ULTRA-SONIC WAVES, REGULATING THE SIZE OF THE DROPLETS OF THE AEROSOL BY THE
Claim 2
Dependent Claim
83 words
PROCESS FOR THE EVAPORATION OF A THIN LAYER ON A METALLIC BASE BY PROJECTING ON A HEATED SUBSTRATE AN AEROSOL OF A SOLUTION INCULDING THE MATERIALS TO BE DEPOSITED ON CONTACT WITH THE HEATED SUBSTRATE, THE STEPS OF FORMING AN AEROSOL BY ATOMIZING THE SOLUTION BY ULTRA-SONIC WAVES, DIRECTING THIS AEROSOL TOWARD THE HEATED SUBSTRATE BY A CARRIER GAS, CONTROLLING THE QUANTITY OF AEROSOL PRODUCED BY THE POWER OF THE ULTRA-SONIC WAVES, REGULATING THE SIZE OF THE DROPLETS OF THE AEROSOL BY THE
Claim 3
Dependent Claim
23 words
A method according to claim 1, wherein an additional flow of carrier gas is injected between the atomization zone and the deposition zone.
Claim 4
Dependent Claim
23 words
A method according to claim 1, wherein the solution is atomized by ultrasonic waves at a frequency of the order of 1 megacycle.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-10-07 | 1978-04-08 | 1978-10-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-10-07 | 1982-04-08 | 1982-10-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-10-07 | 1986-04-08 | 1986-10-08 | $7700.00 | Window Closed / Lapsed |