US3785507A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Die sorting system
Assignee: Teledyne Inc
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Filing: 1972-08-16
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Granted: 1974-01-15
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Expires: 1992-08-16
Abstract
Abstract A wafer of semiconductor devices is tested to determine the quality of each device. The test data with respect to each die is electro-optically encoded and photographically recorded in a pattern corresponding to the die pattern on the wafer. Upon completion of the testing and recording operations the wafer is scored, mounted on a flexible pressure sensitive adhesive web and broken so as to separate the dies from one another while maintaining their original orientation. The dice and their respective test record are then mounted on a common frame, side by side, so that each die and its test data are readily matched. The frame is then mounted on a die sorting mechanism comprised of an XY indexing table which indexes the wafer die by die through a removal station and the film indexed through an electro optical reader where the test data is read out to designate the die to a selected delivery station.
Inventors
- 👤 M Wiesler
- 👤 V Martinonis
- 👤 J Macintyre
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:27
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0611; B; B07; B07C; B07C5/00; B07C5/34; B07C5/3412; B07C5/344; G; G01; G01R; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; G01R31/2851; G01R31/2893; H10W; H10W46/00; G01R31/302; G01R31/308; G01R31/311; H10W46/601; Y; Y10; Y10T; Y10T29/00; Y10T29/53; Y10T29/53274
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
164 words
An apparatus for removing closely packed semiconductor dice from a web having an adhesive coating on one side thereof, the semiconductor releasably mounted to the adhesive coating, said apparatus comprising: a. a needle mounted for reciprocating movement perpendicular to the plane of the web and located proximate to a side of the web opposite the side having the adhesive coating, said needle operating to engage and disengage a selected portion of the web, the engaged portion of the web being in a plane which is displaced from the plane of a disengaged portion of the web; b. a collet mounted in registration with said needle and located proximate to the semiconductor dice, said needle and collet mounted on opposite sides of the web; and c. guide means spatially interposed between said collet and web, said guide means formed with a through hole concentric with said collet; d. means mounted to said collet for removing a semiconductor die from the engaged portion of the web.
Claim 2
Independent Claim
164 words
An apparatus for removing closely packed semiconductor dice from a web having an adhesive coating on one side thereof, the semiconductor releasably mounted to the adhesive coating, said apparatus comprising: a. a needle mounted for reciprocating movement perpendicular to the plane of the web and located proximate to a side of the web opposite the side having the adhesive coating, said needle operating to engage and disengage a selected portion of the web, the engaged portion of the web being in a plane which is displaced from the plane of a disengaged portion of the web; b. a collet mounted in registration with said needle and located proximate to the semiconductor dice, said needle and collet mounted on opposite sides of the web; and c. guide means spatially interposed between said collet and web, said guide means formed with a through hole concentric with said collet; d. means mounted to said collet for removing a semiconductor die from the engaged portion of the web.
Claim 3
Dependent Claim
21 words
The apparatus as claimed in claim 1 including indexing means for moving the web with respect to said needle and collet.
Claim 4
Dependent Claim
14 words
The apparatus as claimed in claim 1 wherein said removing means is vacuum means.
Claim 5
Dependent Claim
138 words
Apparatus for removing closely packed semiconductor dice or the like from an adhesive coated web, comprising: a. a needle mounted for reciprocating movement perpendicular to the plane of said web and located to the side of said web opposite said dice, whereby individual dice may be pushed away from the plane of said web; b. a collet disposed in alignment with said needle on the same side of said web as said dice and movable to and away therefrom; c. guide means spatially interposed between said collet and web, said guide means formed with a through hole concentric with said collet; d. said collet being connected to a vacuum source and adapted to remove a die from the web displaced by said needle; and e. means for producing relative movement between said web and said needle and collet.
Claim 6
Dependent Claim
138 words
Apparatus for removing closely packed semiconductor dice or the like from an adhesive coated web, comprising: a. a needle mounted for reciprocating movement perpendicular to the plane of said web and located to the side of said web opposite said dice, whereby individual dice may be pushed away from the plane of said web; b. a collet disposed in alignment with said needle on the same side of said web as said dice and movable to and away therefrom; c. guide means spatially interposed between said collet and web, said guide means formed with a through hole concentric with said collet; d. said collet being connected to a vacuum source and adapted to remove a die from the web displaced by said needle; and e. means for producing relative movement between said web and said needle and collet.
Claim 7
Dependent Claim
13 words
Apparatus according to claim 4 including actuating means for singly reciprocating said collet.
Claim 8
Dependent Claim
21 words
Apparatus according to claim 4 including actuating means for cyclically moving said collet and needle to and away from said web.
Claim 9
Dependent Claim
129 words
Apparatus for removing closely packed semi-conductor dice or the like from an adhesive coated web, comprising: a. a needle mounted for reciprocating movement perpendicular to the plane of said web and located to the side of said web opposite said dice, whereby individual dice may be pushed away from the plane of said web; b. a plurality of collets disposed on the same side of said web as said dice and movable to and away therefrom; c. indexing means for bringing each of said collets into position in line with said needle; d. said collet being connected to a vacuum source and adapted to remove a die from the web displaced by said needle; and e. means for producing relative movement between said web and said needle and collet.
Claim 10
Dependent Claim
129 words
Apparatus for removing closely packed semi-conductor dice or the like from an adhesive coated web, comprising: a. a needle mounted for reciprocating movement perpendicular to the plane of said web and located to the side of said web opposite said dice, whereby individual dice may be pushed away from the plane of said web; b. a plurality of collets disposed on the same side of said web as said dice and movable to and away therefrom; c. indexing means for bringing each of said collets into position in line with said needle; d. said collet being connected to a vacuum source and adapted to remove a die from the web displaced by said needle; and e. means for producing relative movement between said web and said needle and collet.
Claim 11
Dependent Claim
19 words
Apparatus according to claim 7 wherein said indexing means is a rotatable turret supporting said collets in radial array.
Claim 12
Dependent Claim
23 words
Apparatus according to claim 7 including a plurality of deposit stations arrayed about said turret to receive said dies according to predetermined instructions.
Claim 13
Dependent Claim
128 words
Apparatus for removing closely packed semiconductor dice or the like from an adhesive coated web, comprising: a. a needle mounted for reciprocating movement perpendicular to the plane of said weB and located to the side of said web opposite said dice, whereby individual dice may be pushed away from the plane of said web; b. collets means disposed on the same side of said web as said dice and movable to and away therefrom; c. indexing means for bringing said collets means into position in line with said needle; d. said collet means being connected to a vacuum source and adapted to remove a die from the web displaced by said needle; and e. means for producing relative movement between said web and said needle and collet means.
Claim 14
Dependent Claim
128 words
Apparatus for removing closely packed semiconductor dice or the like from an adhesive coated web, comprising: a. a needle mounted for reciprocating movement perpendicular to the plane of said weB and located to the side of said web opposite said dice, whereby individual dice may be pushed away from the plane of said web; b. collets means disposed on the same side of said web as said dice and movable to and away therefrom; c. indexing means for bringing said collets means into position in line with said needle; d. said collet means being connected to a vacuum source and adapted to remove a die from the web displaced by said needle; and e. means for producing relative movement between said web and said needle and collet means.
References Cited (Backward Citations)
US2386076A
Cited
US3581911A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-01-14 | 1977-07-16 | 1978-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-01-14 | 1981-07-16 | 1982-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-01-14 | 1985-07-16 | 1986-01-15 | $7700.00 | Window Closed / Lapsed |