US3738928A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputter coating apparatus with end feed
Assignee: Flachglas Wernberg GmbH
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Filing: 1972-03-31
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Granted: 1973-06-12
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Expires: 1992-03-31
Abstract
Abstract A sputter-coating apparatus comprises an elongated chamber provided at one end with a loading door and having internally a plurality of pairs of guide rails between which vertical platelike workpieces are stood. A carriage is horizontally displaceable above the workpieces and is provided with a plurality of suspended sputter-coating cathodes connected together as a rack whose lower end is guided between the lower rails. All of the rails are formed as U-section channels to receive the workpieces between their flanks, which are provided with adjustable spacers in order to maintain an exact positioning of the workpieces.
Inventors
- 👤 H Glaser
- 👤 H Beckmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:34
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/34
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
134 words
A sputter-coating apparatus comprising: a gastight chamber; suction means connected to said chamber for at least partially evacuating same; at least one upper horizontal rail in said chamber; at least one lower horizontal rail in said chamber below and parallel to said upper rail, a sheetlike workpiece being retainable in an upright position between said upper rail and said lower rail; means forming with said lower rail a lower guide; a horizontally displaceable carriage in said chamber above said upper rail; a rack of sputter-coating electrodes having an upper end attached to said carriage and a lower end engaged with said guide; and means for displacing said carriage horizontally in said chamber with said lower end riding along said guide and thereby moving said electrodes past said sheetlike workpiece while sputtering a coating thereon.
Claim 2
Dependent Claim
134 words
A sputter-coating apparatus comprising: a gastight chamber; suction means connected to said chamber for at least partially evacuating same; at least one upper horizontal rail in said chamber; at least one lower horizontal rail in said chamber below and parallel to said upper rail, a sheetlike workpiece being retainable in an upright position between said upper rail and said lower rail; means forming with said lower rail a lower guide; a horizontally displaceable carriage in said chamber above said upper rail; a rack of sputter-coating electrodes having an upper end attached to said carriage and a lower end engaged with said guide; and means for displacing said carriage horizontally in said chamber with said lower end riding along said guide and thereby moving said electrodes past said sheetlike workpiece while sputtering a coating thereon.
Claim 3
Dependent Claim
49 words
The apparatus defined in claim 1 wherein said means forming said guide is another such lower rail parallel to the first-mentioned lower rail, said apparatus including another such upper rail parallel to the first-mentioned upper rail, another such sheetlike workpiece being retained between the second-mentioned upper and lower rails.
Claim 4
Dependent Claim
37 words
The apparatus defined in claim 2, wherein said rails are formed as channels having flanks, each workpiece being received between the flanks of one of the upper rails and between the flanks of the corresponding lower rail.
Claim 5
Dependent Claim
46 words
The apparatus defined in claim 3 wherein said chamber has a top, bottom, side, and end walls, one of said end walls being provided with a door, said upper rails being suspended from said top wall, and said lower rails being supported on said bottom wall.
Claim 6
Dependent Claim
27 words
The apparatus defined in claim 3 wherein said rails are provided with spacing means on their flanks for snugly engaging the faces of a workpiece received therebetween.
Claim 7
Dependent Claim
20 words
The apparatus defined in claim 5 wherein said spacing means are displaceable transverse to the longitudinal axis of said rails.
Claim 8
Dependent Claim
53 words
The apparatus defined in claim 3 wherein each electrode rack includes a plurality of elongated vertical electrodes and upper and lower cross members interconnecting said electrodes at said upper and lower ends of said rack, said lower cross member being provided with a plurality of rollers engaging the flanks of said lower rails.
Claim 9
Dependent Claim
14 words
The apparatus defined in claim 7 wherein said rollers are rotatable about vertical axes.
Claim 10
Dependent Claim
30 words
The apparatus defined in claim 3 wherein each said lower rail is provided with a plurality of rollers rotatable about respective parallel horizontal axes, said workpieces resting on said rollers.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-06-11 | 1976-12-11 | 1977-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-06-11 | 1980-12-11 | 1981-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-06-11 | 1984-12-11 | 1985-06-12 | $7700.00 | Window Closed / Lapsed |