Method of forming microelements
Abstract
Abstract A METHOD OF FORMING MICROELEMENTS OF A GIVEN CONFIGURATION BY PRODUCING IN VACUUM A NUMBER OF SEPARATE ION BEAMS OF MATERIALS, EACH BEAM BEING DIRECTED ONE AT A TIME TO A COMMON PATH. EACH BEAM IS INTENSITY CONTROLLED AND IS ELECTROSTATICALLY FOCUSED ONTO A COMMON WORK PIECE. THE FOCUSED BEAM IS DEFLECTED LATERALLY TO TRACE OUT A TWO-DIMENSIONAL ASPECT OF THE CONFIGURATION OF THEMICROELEMENT, THE IONS BEING DISCHARGED ALONG THE TRACE TO WRITE-IN THE MICROELEMENT, MULTIPLE LAYERS BEING FORMED, IF DESIRED BY DEPOSITNG MATERIAL ON TOP OFPREVIOUSLY DISCHARGED IONS. THE METHOD IS PREFERABLY PERFORMED ELECTRONICALLY IN ACCORDANCE WITH A SEQUENCE OF INSTRUCTIONS DETERMINING THE PARAMETERS FOR A GIVEN TYPE OF MICROELEMENT.
Inventors
- 👤 T Hirschfeld
Bibliographic Details
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