US3719487A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for producing microstructures
Assignee: Telefunken Patentverwertungs GmbH
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Filing: 1970-09-16
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Granted: 1973-03-06
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Expires: 1990-09-16
Abstract
Abstract A PHOTOGRAPHIC PROCESS FOR PRODUCING MICROSTRUCTURES, I.E., STRUCTURES WITH MICRON OR SUBMICRON DIMENSIONS, ON A SUBSTRATUM IN ALIGNMENT WITH EACH OTHER. AFTER A FIRST MICROSTRUCTURE HAS BEEN APPLIED TO THE SUBSTRATUM, AN IMAGE OF THE FIRST MICROSTRUCTURE IS FORMED THROUGH A LENS, AND A PHOTOMASK OF A SECOND MICROSTRUCTURE IS ALIGNED WITH THE FIRST MICROSTRUCTURE IN THE PLANE OF THE FIRST MICROSTRUCTURES''S IMAGE. THE SECOND MICROSTRUCTURE IS THEN IMAGED THROUGH THE LENS ONTO A LIGHT-SENSITIVE LAYER ON THE SUBSTRATUM TO PRODUCE THE SECOND MICROSTRUCTURE ON THE SUBSTRATUM IN ALIGNMENT WITH THE FIRST MICROSTRUCTURE. D R A W I N G
Inventors
- 👤 H Schutze
- 👤 K Hennings
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 10:06
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-03-05 | 1976-09-04 | 1977-03-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-03-05 | 1980-09-04 | 1981-03-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-03-05 | 1984-09-04 | 1985-03-06 | $7700.00 | Window Closed / Lapsed |