Patent JPS53106346A successfully refreshed from Google Patents.
US3717563A
Expired / Lapsed
US
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Method of adhering gold to an insulating layer on a semiconductor substrate
Assignee: International Business Machines Corp
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Filing: 1971-06-09
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Granted: 1973-02-20
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Expires: 1991-06-09
Abstract
Abstract A DEPOSITED FILM OF GOLD IS ADHERED TO A LAYER OF SILICON DIOXIDE BY A DEPOSITED FILM OF BETA TANTALUM. AFTER THE GOLD IS DEPOSITED ON THE BETA TANTALUM, A SECOND FILM OF BETA TANTALUM IS DEPOSITED ON THE GOLD. THIS FORMS A COMPOSITE SANDWICH ADHERING THE GOLD TO THE SILICON DIOXIDE WITHOUT DECREASING THE CONDUCTIVITY OF THE GOLD AND ALLOWING ANOTHER LAYER OF SILICON DIOXIDE TO BE ADHERED TO THE SECOND FILM OF BETA TANTALUM. D R A W I N G
Inventors
- 👤 M Revitz
- 👤 F Turene
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 00:23
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/40; H10P14/412; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4432
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-02-20 | 1976-08-21 | 1977-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-02-20 | 1980-08-21 | 1981-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-02-20 | 1984-08-21 | 1985-02-20 | $7700.00 | Window Closed / Lapsed |