US3708403A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Self-aligning electroplating mask
Assignee: Individual
•
Filing: 1971-09-01
•
Granted: 1973-01-02
•
Expires: 1991-09-01
Abstract
Abstract A self-aligning electroplating mask and a method of electroplating using a self-aligning mask is disclosed. A layer of metal, for example, titanium, is deposited on a substrate. On top of the titanium film is deposited a film of a second metal such as platinum. The platinum metal is etched to expose the titanium. The exposed titanium is oxidized to provide a selfaligning mask. The titanium oxide mask enables a subsequent electroplating step to deposit a metal such as gold on top of the remaining platinum film. Then the titanium oxide mask is removed.
Inventors
- 👤 T Koger
- 👤 L Terry
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:01
CPC Classifications
C; C25; C25D; C25D5/00; C25D5/02
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
22 words
A method as described in claim 1 whereby said oxide is formed by baking said substrate in air at an elevated temperature.
Claim 2
Dependent Claim
25 words
A method as described in claim 1 including the step of etching said metal oxide film and said first metal underneath said metal oxide film.
Claim 3
Dependent Claim
18 words
A method as described in claim 1 whereby said first metal film is deposited on a silicon substrate.
Claim 4
Independent Claim
118 words
A method of electroplating one metal on a selective portion of another metal involving the use of a self-aligning mask, comprising the steps of: providing a silicon substrate having an upper surface; depositing a film of titanium on said upper surface of said silicon substrate; depositing a film of platinum on said titanium film; removing a portion of said platinum film to expose a portion of said titanium layer; oxidizing said exposed titanium portion to form an oxide film by baking said exposed titanium in air at an elevated temperature; electroplating a film of gold on the remaining portion of said platinum film; and removing said titanium oxide film and said titanium film underlying said titanium oxide film.
References Cited (Backward Citations)
US3035990A
Cited
GB1007662A
Cited
US3192135A
Cited
US3294653A
Cited
US3197391A
Cited
US3388048A
Cited
US3634204A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-01-02 | 1976-07-03 | 1977-01-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-01-02 | 1980-07-03 | 1981-01-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-01-02 | 1984-07-03 | 1985-01-02 | $7700.00 | Window Closed / Lapsed |