US3695910A
Expired / Lapsed
US
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Method of applying a multilayer antireflection coating to a substrate
Assignee: ANTHONY W LOUDERBACK
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Filing: 1970-05-28
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Granted: 1972-10-03
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Expires: 1990-05-28
Abstract
Abstract A METHOD FOR VACUUM DEPOSITING ANTIREFLECTION LAYERS ON A SUBSTRATE USING AN ELECTRON BEAM IS DISCLOSED. ALL COATING MATERIALS ARE PLACED IN THE VACUUM CHAMBER. A METALLIC OXIDE ID EVAPORATED ONTO THE SUBSTRATE AS A FIRST LAYER. A MIXTURE OF AT LEAST TWO OXIDES IS EVAPORATED ONTO THE FIRST LAYER AND OXYGEN IS DIRECTED FROM AN OXYGEN SOURCE TO THE ELECTRON BEAM DURING THE EVAPORATION OF THE SECOND LAYER. THE METALLIC FLUORIDE IS THEN EVAPORATED ONTO THE SECOND LAYER.
Inventors
- 👤 Anthony W Louderback
- 👤 Morris A Zook Jr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 09:40
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/34; C03C17/3411; C03C17/3429; C03C17/3447; C03C17/3452; C23; C23C; C23C14/00; C23C14/02; G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/113; G02B1/115
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-10-03 | 1976-04-03 | 1976-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-10-03 | 1980-04-03 | 1980-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-10-03 | 1984-04-03 | 1984-10-03 | $7700.00 | Window Closed / Lapsed |