Patent EP0158198A1 successfully refreshed from Google Patents.
US3682729A
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Method of changing the physical properties of a metallic film by ion beam formation and devices produced thereby
Assignee: International Business Machines Corp
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Filing: 1969-12-30
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Granted: 1972-08-08
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Expires: 1989-12-30
Abstract
Abstract A DEPOSITED METALLIC FILM ON A SUBSTRATE IS BOMBARDED WITH HIGH ENERGY IONS HAVING AN ENERGY OF AT LEAST 10 KEV. WITH THE IONS BEING SELECTED FROM THE GROUP OF IONS RANGING BETWEEN HELIUM AND ARGON. THE SELECTED IONS DEPEND UPON THE METAL FORMING THE FILM AND THE THICKNESS OF THE FILM. THIS BOMBARDMENT REDUCES THE YIELD STRESS OF THE FILM IN ANY AREA IN WHICH THE IONS STRIKE AND IS PARTICULARLY USEFUL TO FORM METALLIC LANDS ON S SEMICONDUCTOR SUBSTRATE.
Inventors
- 👤 Thomas F Gukelberger Jr
- 👤 Walter J Kleinfelder
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:30
CPC Classifications
H; H10; H10P; H10P30/00; H10P30/20; C; C08; C08K; C08K5/00; C08K5/04; C08K5/10; C08K5/11; C08K5/54; C08L; C08L83/00; C08L83/04; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H10D; H10D64/00; H10D64/01; H10D64/011; H10P34/00; H10P95/00; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; Y; Y10; Y10S; Y10S148/00; Y10S148/051; Y10S148/106; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-08-08 | 1976-02-07 | 1976-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-08-08 | 1980-02-07 | 1980-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-08-08 | 1984-02-07 | 1984-08-08 | $7700.00 | Window Closed / Lapsed |