US3655438A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming silicon oxide coatings in an electric discharge
Assignee: International Standard Electric Corp
•
Filing: 1969-10-20
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Granted: 1972-04-11
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Expires: 1989-10-20
Abstract
Abstract This is a method of depositing a coherent solid layer of an oxide of silicon deposited upon a surface of a substrate by establishing a glow discharge adjacent to said surface in an atmosphere containing a gaseous compound of the element or elements comprising the material.
Inventors
- 👤 Henley Frank Sterling
- 👤 Richard Charles George Swann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:03
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/507; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682; H10P14/694; H10P14/6943; H10P14/69433
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
30 words
A method as claimed in claim 1 wherein said source of oxygen is provided by a substance selected from the group consisting of nitrous oxide, carbon dioxide, and water vapor.
Claim 2
Dependent Claim
13 words
A method as claimed in claim 1 wherein said substrate surface is unheated.
Claim 3
Dependent Claim
35 words
A method as claimed in claim 1 wherein said discharge is initiated by exciting said gaseous atmosphere with an applied electric field, said electric field being applied by an alternating voltage at an R.F. frequency.
Claim 4
Dependent Claim
31 words
A method as claimed in claim 1 wherein said discharge is initiated by exciting said gaseous atmosphere with an applied electric field, said electric field being applied by a capacitance means.
Claim 5
Dependent Claim
76 words
A method as claimed in claim 1 wherein said oxide of silicon is silicon dioxide in which silane and nitrous oxide are flowed through a reaction chamber formed by a 1 inch diameter dielectric tube at a rate of 1 ml/min. and 3 ml/min., respectively, and at a pressure of 0.4 torr, and in which the discharge is established by an electric field applied by a voltage alternating at a frequency of 1 megacycle per second.
Claim 6
Dependent Claim
15 words
A method as claimed in claim 1 wherein said oxide of silicon is silicon monoxide.
References Cited (Backward Citations)
US3049488A
Cited
US3108900A
Cited
US3275408A
Cited
US3177100A
Cited
US3337438A
Cited
US3473959A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-04-11 | 1975-10-11 | 1976-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-04-11 | 1979-10-11 | 1980-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-04-11 | 1983-10-11 | 1984-04-11 | $7700.00 | Window Closed / Lapsed |