US3649502A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for supported discharge sputter-coating of a substrate
Assignee: Precision Instrument Co
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Filing: 1969-08-14
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Granted: 1972-03-14
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Expires: 1989-08-14
Abstract
Abstract A SUPPORTED DISCHARGE SPUTTER COATING APPARATUS IS PROVIDED WITH THE TARGET LOCATED BETWEEN THE CENTER OF A HIGHLY IONIZED PLASMA AND THE SUBSTRATE OT BE COATED.
Inventors
- 👤 Lawrence Herte
- 👤 Sheldon D Softky
- 👤 Nicholas D Schoenberger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 10:13
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C14/354; C23C14/358; C23C14/3407
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-03-14 | 1975-09-13 | 1976-03-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-03-14 | 1979-09-13 | 1980-03-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-03-14 | 1983-09-13 | 1984-03-14 | $7700.00 | Window Closed / Lapsed |