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US3629577A Expired / Lapsed US ⏱️ 0.0 years remaining

Method and apparatus for producing a stereo image by electron microscopy

Assignee: Siemens AG
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Filing: 1969-09-22
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Granted: 1971-12-21
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Expires: 1989-09-22
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Abstract

Abstract For producing a stereo image, for example of a crystalline object, by electron beam microscopy, any chosen surface area of the object is rotated about a central axis defined by the direction of the electron beam. The amount of rotation is such that after a subsequent tilting of the object about a second axis intersecting the central axis, the image intensity of the surface area is the same in the starting position as in the end position of the tilting displacement. Respective individual pictures are taken in these two object positions.

Inventors

  • 👤 Ulrich Weber
  • 👤 Jurgen Gullasch

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 15:36
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/20

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 119 words
The method of producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures, which comprises exposing the object to be imaged to a beam of electrons whose direction defines a central axis, rotating the object surface area to be photographed about said central axis, then tilting the object an angular amount equal to the stereo angle about a second axis intersecting said central axis, the rotation about said central axis being in an angular amount at which the image brightness of said area is the same in the starting and end positions respectively of the tilting, and taking first and second pictures of the object when said electron-irradiated surface area is in said two positions respectively.
Claim 2
Independent Claim 119 words
The method of producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures, which comprises exposing the object to be imaged to a beam of electrons whose direction defines a central axis, rotating the object surface area to be photographed about said central axis, then tilting the object an angular amount equal to the stereo angle about a second axis intersecting said central axis, the rotation about said central axis being in an angular amount at which the image brightness of said area is the same in the starting and end positions respectively of the tilting, and taking first and second pictures of the object when said electron-irradiated surface area is in said two positions respectively.
Claim 3
Independent Claim 100 words
The method of producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures, which comprises exposing the objects to be imaged to a beam of electrons whose direction defines a central axis, adjusting an adjustable axis to be parallel to or in coincident relation with the normal of the object surface area to be photographed, said adjustable axis being noncoincident with said central axis, and rotating said object surface area about saiD adjustable axis an angular amount equal to the stereo angle, said angular amount corresponding to the angle formed between said central and said adjustable axes.
Claim 4
Independent Claim 100 words
The method of producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures, which comprises exposing the objects to be imaged to a beam of electrons whose direction defines a central axis, adjusting an adjustable axis to be parallel to or in coincident relation with the normal of the object surface area to be photographed, said adjustable axis being noncoincident with said central axis, and rotating said object surface area about saiD adjustable axis an angular amount equal to the stereo angle, said angular amount corresponding to the angle formed between said central and said adjustable axes.
Claim 5
Dependent Claim 66 words
The method according to claim 1, which comprises rotationally adjusting the object about a third axis for obtaining a surface brightness intensity, sufficient to permit said pictures to record a stereoscopic image before said object surface area is rotated about said central axis, said third axis passing through the intersection of said central and second axes and extending transversely to each of said latter two axes.
Claim 6
Dependent Claim 19 words
The method according to claim 1, wherein said central axis and said second axis are perpendicular to each other.
Claim 7
Dependent Claim 20 words
The method according to claim 4, which comprises mounting said object on the intersection of said central and second axes.
Claim 8
Dependent Claim 44 words
The method according to claim 1, which comprises rotationally adjusting the object about a third axis for obtaining a desired surface brightness intensity, sufficient to permit said pictures to record a stereoscopic image before said object surface area is rotated about said central axis.
Claim 9
Dependent Claim 355 words
In apparatus for producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures having means for producing an electron beam in a direction defining a central axis, a device for holding a specimen object on said central axis, and means for photographically taking individual pictures of the electron-illuminated object, the improvement according to which said device comprises a cardanic joint assembly, of gimbal structures, having three cardanic journal axes of which one is coincident with said central axis, said three axes having a common intersection on said central axis, an object support mounted on said assembly near said intersection for holding the object on said intersection, whereby said device permits rotating any chosen surface area of the object about said central axis and then tilting the object through the stereo angle about one of said other axes between two picture-taking positions in which the chosen area has substantially the same brightness, said gimbal structures comprising a quadrangular frame at whose center point said intersection is located, said frame having two coaxial pivot pins protruding from opposite frame sides, a first U-shaped gimbal member on whose two legs said respective pivot pins are mounted to permit rotation of said frame about one of said cardanic journal axes, two further pivot pins protruding from the other two sides respectively of said frame and defining another one of said journal axes, a second U-shaped gimbal member fastened to said other pivot pins for rotation about said other journal axis, said object support being fastened to said second gimbal member, a slider displaceable transversely of said central axis, an axle mounted on said slider and having an axis perpendicular to the slider displacement direction, said axle being rotatable about its axis, said first gimbal member being fastened to said axle to rotate together therewith, a second slider on which said first slider is displaceable, and a third slider on which said second slider is displaceable, the displacement directions of said three sliders extending at an angle of 90* to each other, whereby respective translatory adjustments are applicable to said object support relative to said central axis.
Claim 10
Dependent Claim 355 words
In apparatus for producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures having means for producing an electron beam in a direction defining a central axis, a device for holding a specimen object on said central axis, and means for photographically taking individual pictures of the electron-illuminated object, the improvement according to which said device comprises a cardanic joint assembly, of gimbal structures, having three cardanic journal axes of which one is coincident with said central axis, said three axes having a common intersection on said central axis, an object support mounted on said assembly near said intersection for holding the object on said intersection, whereby said device permits rotating any chosen surface area of the object about said central axis and then tilting the object through the stereo angle about one of said other axes between two picture-taking positions in which the chosen area has substantially the same brightness, said gimbal structures comprising a quadrangular frame at whose center point said intersection is located, said frame having two coaxial pivot pins protruding from opposite frame sides, a first U-shaped gimbal member on whose two legs said respective pivot pins are mounted to permit rotation of said frame about one of said cardanic journal axes, two further pivot pins protruding from the other two sides respectively of said frame and defining another one of said journal axes, a second U-shaped gimbal member fastened to said other pivot pins for rotation about said other journal axis, said object support being fastened to said second gimbal member, a slider displaceable transversely of said central axis, an axle mounted on said slider and having an axis perpendicular to the slider displacement direction, said axle being rotatable about its axis, said first gimbal member being fastened to said axle to rotate together therewith, a second slider on which said first slider is displaceable, and a third slider on which said second slider is displaceable, the displacement directions of said three sliders extending at an angle of 90* to each other, whereby respective translatory adjustments are applicable to said object support relative to said central axis.
Claim 11
Dependent Claim 314 words
In apparatus for producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures having means for producing an electron beam in a direction defining a central axis, a device for holding a specimen object on said central axis, and means for photographically taking individual pictures of the electron-illuminated object, the improvement according to which said device comprises a cardanic joint assembly of gimbal structures, having three cardanic journal axes of which one is coincident with said central axis, said thrEe axes having a common intersection on said central axis, an object support mounted on said assembly near said intersection for holding the object on said intersection, whereby said device permits rotating any chosen surface area of the object about said central axis and then tilting the object through the stereo angle about one of said other axes between two picture-taking positions in which the chosen area has substantially the same brightness, two sliders displaceable in respective directions perpendicular to each other, one of said sliders carrying said object support and being mounted and displaceable upon the other slider, a rotatable circular disc structure to which said other slider is fixedly attached to be rotationally adjustable together therewith, said rotatable discs being mounted on said cardanic assembly, said cardanic assembly comprising a first U-shaped bracket on whose bottom said rotatable disc structure is mounted, a second U-shaped bracket having two leg portions with respective coaxial pivot pins, said first bracket having two leg portions connnected with said respective pivot pins to be rotatable about their common axis, and an angle piece (W) and a pivot pin protruding from one leg of said angle piece and having a pivot axis coincident with one of said two cardanic journal axes other than said central axis, said second bracket (H3) being journaled on said latter pivot pin to be rotatable about said one journal axis.
Claim 12
Dependent Claim 314 words
In apparatus for producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures having means for producing an electron beam in a direction defining a central axis, a device for holding a specimen object on said central axis, and means for photographically taking individual pictures of the electron-illuminated object, the improvement according to which said device comprises a cardanic joint assembly of gimbal structures, having three cardanic journal axes of which one is coincident with said central axis, said thrEe axes having a common intersection on said central axis, an object support mounted on said assembly near said intersection for holding the object on said intersection, whereby said device permits rotating any chosen surface area of the object about said central axis and then tilting the object through the stereo angle about one of said other axes between two picture-taking positions in which the chosen area has substantially the same brightness, two sliders displaceable in respective directions perpendicular to each other, one of said sliders carrying said object support and being mounted and displaceable upon the other slider, a rotatable circular disc structure to which said other slider is fixedly attached to be rotationally adjustable together therewith, said rotatable discs being mounted on said cardanic assembly, said cardanic assembly comprising a first U-shaped bracket on whose bottom said rotatable disc structure is mounted, a second U-shaped bracket having two leg portions with respective coaxial pivot pins, said first bracket having two leg portions connnected with said respective pivot pins to be rotatable about their common axis, and an angle piece (W) and a pivot pin protruding from one leg of said angle piece and having a pivot axis coincident with one of said two cardanic journal axes other than said central axis, said second bracket (H3) being journaled on said latter pivot pin to be rotatable about said one journal axis.
Claim 13
Dependent Claim 304 words
In apparatus for producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures having means for producing an electron beam in a direction defining a central axis, a device for holding a specimen object on said central axis, and means for photographically taking individual pictures of the electron-illuminated object, the improvement according to which said device comprises a cardanic joint assembly of gimbal structures, having three cardanic journal axes of which one is coincident with said central axis, said three axes having a common intersection on said central axis, an object support mounted on said assembly near said intersection for holding the object on said intersection, whereby said device permits rotating any chosen surface area of the object about said central axis and then tilting the object through the stereo angle about one of said other axes between two picture-taking positions in which the chosen area has substantially the same brightness, two sliders displaceable in respective directions perpendicular to each other, one of said sliders carrying said object support and being mounted and displaceable upon the other slider, a rotatable circular disc structure to which said other slider is fixedly attached to be rotationally adjustable together therewith, said rotatable discs being mounted on said cardanic assembly, said cardanic assembly comprising a first U-shaped bracket on whose bottom said rotatable disc structure is mounted, a second U-shaped bracket having two leg portions with respective coaxial pivot pins, said first bracket having two leg portions connected with said respective pivot pins to be rotatable about their common axis, a mounting structure, and a pivot pin connected with said mounting structure and having an axis defining one of said cardanic journal axes other than said central axis, said second bracket (H3) being journaled on said pivot pin for rotation about said one journal axis.
Claim 14
Dependent Claim 304 words
In apparatus for producing electron-microscopic stereo images by sequentially taking pairs of stereoscopically coordinated individual pictures having means for producing an electron beam in a direction defining a central axis, a device for holding a specimen object on said central axis, and means for photographically taking individual pictures of the electron-illuminated object, the improvement according to which said device comprises a cardanic joint assembly of gimbal structures, having three cardanic journal axes of which one is coincident with said central axis, said three axes having a common intersection on said central axis, an object support mounted on said assembly near said intersection for holding the object on said intersection, whereby said device permits rotating any chosen surface area of the object about said central axis and then tilting the object through the stereo angle about one of said other axes between two picture-taking positions in which the chosen area has substantially the same brightness, two sliders displaceable in respective directions perpendicular to each other, one of said sliders carrying said object support and being mounted and displaceable upon the other slider, a rotatable circular disc structure to which said other slider is fixedly attached to be rotationally adjustable together therewith, said rotatable discs being mounted on said cardanic assembly, said cardanic assembly comprising a first U-shaped bracket on whose bottom said rotatable disc structure is mounted, a second U-shaped bracket having two leg portions with respective coaxial pivot pins, said first bracket having two leg portions connected with said respective pivot pins to be rotatable about their common axis, a mounting structure, and a pivot pin connected with said mounting structure and having an axis defining one of said cardanic journal axes other than said central axis, said second bracket (H3) being journaled on said pivot pin for rotation about said one journal axis.
Claim 15
Dependent Claim 69 words
Apparatus according to claim 9, comprising slider means displaceable in a direction transverse to said central axis, an axle (A5) mounted on said slider means and extending therefrom in a direction parallel to said central axis, said axle being adjustable by said slider means to a position coaxial with said central axis, said mounting structure being connected to said axle so as to be rotatable about said central axis.
Claim 16
Dependent Claim 60 words
An apparatus according to claim 10, said slider means comprising a top slider (S5) carrying said axle, And a bottom slider (S4) on which said top slider is displaceable in a direction perpendicular to the displacement direction of said top slider, said bottom slider being operable to impart translatory displacements to said axle (A5) relative to said central axis (Z).

References Cited (Backward Citations)

US2360677A Cited
US3086112A Cited
US3435210A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-12-20 1975-06-21 1975-12-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-12-20 1979-06-21 1979-12-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-12-20 1983-06-21 1983-12-21 $7700.00 Window Closed / Lapsed

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