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US3617816A Expired / Lapsed US ⏱️ 0.0 years remaining

Composite metallurgy stripe for semiconductor devices

Assignee: International Business Machines Corp
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Filing: 1970-02-02
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Granted: 1971-11-02
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Expires: 1990-02-02
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Abstract

Abstract A metallurgy interconnection system for semiconductor devices made up of laminar stripes, each having a layer of gold disposed between layers of tantalum.

Inventors

  • 👤 Jacob Riseman
  • 👤 Paul A Totta

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 20:03
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/90; H10W20/00; H10W20/40; H10W20/41; H10W20/425; H10W20/44; H10W20/4403; H10W20/4432; H10W72/20; H10W70/00; H10W70/60; H10W72/251; H10W72/29; H10W72/921; H10W72/923; H10W72/941; H10W72/942

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 35 words
The metallurgy system of claim 1 which further includes an ohmic contact layer of material selected from the group consisting of palladium silicide and platinum silicide disposed in intimate electrical contact with said semiconductor body.
Claim 2
Dependent Claim 29 words
The metallurgy system of claim 1 which includes a plurality of interconnected layers of conductive stripes disposed between a plurality of insulating layers providing a complex multilayer circuit network.
Claim 3
Dependent Claim 75 words
A semiconductor device comprising, a semiconductor body, an insulating layer disposed on the top surface of said body, and, a network of conductive stripes bonded to said insulating layer, and in electrical contact with said semiconductor body, each of said conductive stripes comprised of a layer of Au disposed between layers of Ta an insulating layer of amorphous inorganic material overlying said network of conductive stripes, said stripes being highly resistant to corrosion and electromigration.
Claim 4
Dependent Claim 31 words
The semiconductor device of claim 4 which includes terminal solder mounds disposed on the surface of the upper insulating layer and in electrical contact to said underlying network of conductive stripes.
Claim 5
Dependent Claim 28 words
The semiconductor device of claim 4 which includes a beam lead terminal which makes electrical contact to said conductive stripes through a via hold in said insulating layer.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-11-01 1975-05-03 1975-11-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-11-01 1979-05-03 1979-11-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-11-01 1983-05-03 1983-11-02 $7700.00 Window Closed / Lapsed

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