US3617359A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for the vapor deposition of metals
Assignee: Texas Instruments Inc
•
Filing: 1969-01-13
•
Granted: 1971-11-02
•
Expires: 1989-01-13
Abstract
Abstract A method of vapor depositing metal on a substrate by reducing titanium and chromium halides with hydrogen under controlled conditions to chemically vapor deposit titanium and chromium alloys on the substrate. Best results are obtained when the halides are introduced into the deposition chamber as a gaseous mixture with an inert gas carrier.
Inventors
- 👤 Gene F Wakefield
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:05
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/08
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
17 words
The method of claim 1 wherein said gaseous mixture of halides comprises titanium trichloride and chromium dichloride.
Claim 2
Dependent Claim
34 words
A method according to claim 1 wherein said heated chamber comprises two compartments and one of said compartments contains titanium or a titanium-chromium alloy and the other compartment contains chromium or a chromium-titanium alloy.
Claim 3
Dependent Claim
40 words
A method according to claim 3 wherein the amount of titanium halide gas entering each of said compartments is regulated by varying the size and number of holes in a divider plate located at the entrance to said two compartments.
Claim 4
Dependent Claim
12 words
The method of claim 3 wherein said titanium halide is titanium tetrachloride.
Claim 5
Dependent Claim
35 words
The method of claim 3 wherein one compartment of said heated chamber contains a mixture of titanium and chromium or an alloy of titanium and chromium and the other compartment contains titanium or a titanium-chromium.
References Cited (Backward Citations)
US2885310A
Cited
US2887407A
Cited
US3188230A
Cited
US3252823A
Cited
US3190771A
Cited
US3265521A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-11-01 | 1975-05-03 | 1975-11-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-11-01 | 1979-05-03 | 1979-11-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-11-01 | 1983-05-03 | 1983-11-02 | $7700.00 | Window Closed / Lapsed |