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US3615465A Expired / Lapsed US ⏱️ 0.0 years remaining

Photoetching of metal-oxide layers

Assignee: National Aeronautics and Space Administration
•
Filing: 1969-06-13
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Granted: 1971-10-26
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Expires: 1989-06-13
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Abstract

Abstract Techniques for the selective removal of conductive coatings from nonconductive base materials are disclosed. The invention contemplates the use of conventional photofabrication techniques to expose precisely defined regions of a coating, typically a metal-oxide, which are to be removed followed by the application of a metallic element and water and an acid. After the metaloxide coating, the slurry of the metallic element and water and the acid are brought in contact with each other, a reaction occurs whereby the metal-oxide coating is reduced to elemental metal. The reaction is allowed to continue for a short time only whereby the elemental metal is but superficially attacked and is followed by an acid wash to remove the exposed elemental metal coating.

Inventors

  • 👤 Hans B Bullinger

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 12:58
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0005; G03F7/0007

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 22 words
The process of claim 1 wherein said resulting tin layer is removed by contacting the same with an aqueous hydrochloric acid solution.
Claim 2
Dependent Claim 31 words
The process of claim 2 wherein said reaction of said tin oxide with said zinc and hydrochloric acid is terminated by application of a water wash to the resulting tin layer.
Claim 3
Dependent Claim 35 words
The process of claim 3 wherein the step of chemically removing said resulting tin layer comprises applying an aqueous hydrochloric acid solution stepwise at one area of the surface of said layer at a time.
Claim 4
Dependent Claim 40 words
The process of claim 4 wherein said exposed portions of said tin oxide coating are contacted with zinc, water and hydrochloric acid by application of an aqueous slurry of zinc powder, followed by application of an aqueous hydrochloric acid solution.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-10-25 1975-04-26 1975-10-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-10-25 1979-04-26 1979-10-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-10-25 1983-04-26 1983-10-26 $7700.00 Window Closed / Lapsed

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