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US3611071A Expired / Lapsed US ⏱️ 0.0 years remaining

Inversion prevention system for semiconductor devices

Assignee: International Business Machines Corp
•
Filing: 1969-04-10
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Granted: 1971-10-05
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Expires: 1989-04-10
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Abstract

Abstract A passivated coated semiconductor device in which a phosphosilicate layer, included to retard inversion in P-type areas or enhancement in N-type areas of the device, is supplemented by a negatively charged electrode to prevent inherent but undesirable positive mobile charges accumulated during fabrication or originated by an overlying encapsulating layer from passing through the phosphosilicate layer and reaching the P-type areas, where they could cause inversion.

Inventors

  • 👤 Benjamin Agusta

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 18:50
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; H10D; H10D99/00; H10P; H10P95/00

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 21 words
A device according to claim 1 wherein said thermal oxide material includes a phosphosilicate and wherein said semiconductor material comprises silicon.
Claim 2
Dependent Claim 58 words
A device according to claim 1 further comprising: removable means for applying heat of a magnitude sufficient to heat said device to a temperature between 100* C. and 300* C., simultaneously with the application of a potential to said conductive electrode for a period of time sufficient to remove ionic contaminants from the surface of said semiconductor material.

References Cited (Backward Citations)

US3436612A Cited
US3454844A Cited
US3470609A Cited
US3473032A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-10-04 1975-04-05 1975-10-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-10-04 1979-04-05 1979-10-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-10-04 1983-04-05 1983-10-05 $7700.00 Window Closed / Lapsed

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