US3596228A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fluid actuated contactor
Assignee: International Business Machines Corp
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Filing: 1969-05-29
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Granted: 1971-07-27
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Expires: 1989-05-29
Abstract
Abstract A constant impedance or impedance matched fluid actuated contactor for electrical components, especially integrated circuit semiconductor chips, is provided. The contactor has a flexible dielectric membrane, on one side of which is a resilient, electrically conductive ground plane. On the other side of the dielectric membrane is a plurality of electrically conductive lines adapted to contact the electrical component. The membrane is mounted on a pressure chamber, and a pressurized fluid is utilized to move the dielectric membrane and the electrically conductive lines carried thereon into contacting engagement with the electrical component.
Inventors
- 👤 Frank W Reed Jr
- 👤 William J Ryan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:42
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/0735; H; H01; H01H; H01H3/00; H01H3/22; H01H3/24; H05; H05K; H05K3/00; H05K3/30; H05K3/32; H05K3/325; H10; H10W; H10W72/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
97 words
A contactor for an electrical component comprising: a. a flexible dielectric membrane, b. a plurality of electrically conductive lines on one side of said dielectric membrane and adapted to contact said electrical component, c. a resilient, electrically conductive ground plane on the other side of said dielectric membrane, formed to move with said membrane and covering the ground plane side of said membrane along said electrically conductive lines, and d. fluid pressure-applying means operatively engaging said flexible dielectric membrane from the ground plane side to urge said electrically conductive lines into contacting engagement with said electrical component.
Claim 2
Dependent Claim
97 words
A contactor for an electrical component comprising: a. a flexible dielectric membrane, b. a plurality of electrically conductive lines on one side of said dielectric membrane and adapted to contact said electrical component, c. a resilient, electrically conductive ground plane on the other side of said dielectric membrane, formed to move with said membrane and covering the ground plane side of said membrane along said electrically conductive lines, and d. fluid pressure-applying means operatively engaging said flexible dielectric membrane from the ground plane side to urge said electrically conductive lines into contacting engagement with said electrical component.
Claim 3
Dependent Claim
22 words
The contactor of claim 1 in which said fluid pressure-applying means comprises air and means for increasing the pressure of the air.
Claim 4
Dependent Claim
44 words
a resilient, electrically conductive ground plane disposed on said dielectric membrane inside said chamber, formed to move with said membrane and covering the entire ground plane side of said membrane at a region of the contactor in which said semiconductor chip is contacted, and
Claim 5
Dependent Claim
44 words
a resilient, electrically conductive ground plane disposed on said dielectric membrane inside said chamber, formed to move with said membrane and covering the entire ground plane side of said membrane at a region of the contactor in which said semiconductor chip is contacted, and
Claim 6
Dependent Claim
15 words
a resilient electrically conductive ground plane disposed on said dielectric membrane inside said chamber, and
Claim 7
Dependent Claim
15 words
a resilient electrically conductive ground plane disposed on said dielectric membrane inside said chamber, and
Claim 8
Dependent Claim
86 words
a plurality of electrically conductive lines disposed on said dielectric membrane outside said chamber and having recesses at their end portions into which said contact pads may rest, for automatically positioning said semiconductor chip with its contact pads in engaging relationship with at least some of the plurality of electrically conductive lines, b. a fluid in said pressure chamber, and c. means for increasing the pressure of said fluid to move said electrically conductive lines on said dielectric membrane into contacting engagement with said semiconductor chip.
Claim 9
Dependent Claim
86 words
a plurality of electrically conductive lines disposed on said dielectric membrane outside said chamber and having recesses at their end portions into which said contact pads may rest, for automatically positioning said semiconductor chip with its contact pads in engaging relationship with at least some of the plurality of electrically conductive lines, b. a fluid in said pressure chamber, and c. means for increasing the pressure of said fluid to move said electrically conductive lines on said dielectric membrane into contacting engagement with said semiconductor chip.
Claim 10
Dependent Claim
55 words
a plurality of electrically conductive lines disposed on said dielectric membrane outside said chamber and adapted to contact said semiconductor chip, b. a fluid in said pressure chamber, and c. means for increasing the pressure of said fluid to move said electrically conductive lines on said dielectric membrane into contacting engagement with said semiconductor chip.
Claim 11
Dependent Claim
55 words
a plurality of electrically conductive lines disposed on said dielectric membrane outside said chamber and adapted to contact said semiconductor chip, b. a fluid in said pressure chamber, and c. means for increasing the pressure of said fluid to move said electrically conductive lines on said dielectric membrane into contacting engagement with said semiconductor chip.
Claim 12
Dependent Claim
23 words
The contactor of claim 1 in which said fluid pressure-applying means comprises a liquid coolant and means for applying pressure to the coolant.
Claim 13
Dependent Claim
33 words
The conductor of claim 1 additionally comprising: e. at least one circuit element mounted on said flexible dielectric membrane and electrically connected to at least one of said plurality of electrically conductive lines.
Claim 14
Dependent Claim
15 words
A contactor for a semiconductor chip comprising: a. a pressure chamber having a cover comprising:
Claim 15
Dependent Claim
15 words
A contactor for a semiconductor chip comprising: a. a pressure chamber having a cover comprising:
Claim 16
Dependent Claim
11 words
The contactor of claim 5 in which said fluid is air.
Claim 17
Dependent Claim
13 words
The contactor of claim 5 in which the fluid is a liquid coolant.
Claim 18
Dependent Claim
33 words
The contactor of claim 5 additionally comprising: g. at least one circuit element mounted on the flexible dielectric membrane and electrically connected to at least one of the plurality of electrically conductive lines.
Claim 19
Dependent Claim
120 words
A contactor for a semiconductor chip having a plurality of contact pads comprising: a. a flexible dielectric membrane, b. a resilient, electrically conductive ground plane on one side of said dielectric membrane, c. a plurality of electrically conductive lines on the other side of said dielectric membrane and having recesses at end portions of at least some of said plurality of electrically conductive lines into which said contact pads may rest for automatically positioning said semiconductor chip in contacting relationship with at least some of said plurality of electrically conductive lines, and d. fluid pressure-applying means operatively engaging said flexible dielectric membrane from the ground plane side to urge said electrically conductive lines into contacting engagement with said contact pads.
Claim 20
Dependent Claim
120 words
A contactor for a semiconductor chip having a plurality of contact pads comprising: a. a flexible dielectric membrane, b. a resilient, electrically conductive ground plane on one side of said dielectric membrane, c. a plurality of electrically conductive lines on the other side of said dielectric membrane and having recesses at end portions of at least some of said plurality of electrically conductive lines into which said contact pads may rest for automatically positioning said semiconductor chip in contacting relationship with at least some of said plurality of electrically conductive lines, and d. fluid pressure-applying means operatively engaging said flexible dielectric membrane from the ground plane side to urge said electrically conductive lines into contacting engagement with said contact pads.
Claim 21
Dependent Claim
103 words
A contactor for an electrical component comprising: a. a flexible dielectric membrane, b. a resilient, electrically conductive ground plane on one side of said dielectric membrane, c. a plurality of electrically conductive lines on the other side of said dielectric membrane and adapted to contact said electrical component, d. fluid pressure-applying means operatively engaging said flexible dielectric membrane from the ground plane side to urge said electrically conductive lines into contacting engagement with said electrical component, and e. at least one semiconductor chip mounted on said flexible dielectric membrane and electriCally connected to at least one of said plurality of electrically conductive lines.
Claim 22
Dependent Claim
103 words
A contactor for an electrical component comprising: a. a flexible dielectric membrane, b. a resilient, electrically conductive ground plane on one side of said dielectric membrane, c. a plurality of electrically conductive lines on the other side of said dielectric membrane and adapted to contact said electrical component, d. fluid pressure-applying means operatively engaging said flexible dielectric membrane from the ground plane side to urge said electrically conductive lines into contacting engagement with said electrical component, and e. at least one semiconductor chip mounted on said flexible dielectric membrane and electriCally connected to at least one of said plurality of electrically conductive lines.
Claim 23
Dependent Claim
148 words
A contactor for an electrical component comprising: a. a first flexible dielectric membrane, b. a resilient, electrically conductive ground plane on one side of said dielectric membrane, c. a plurality of electrically conductive lines on the other side of said dielectric membrane and adapted to contact said electrical component, d. fluid pressure-applying means operatively engaging said flexible dielectric membrane from the ground plane side to urge said electrically conductive lines into contacting engagement with said electrical component, e. a second flexible dielectric membrane on the other side of said ground plane from said first flexible dielectric membrane, and f. an electrically conductive line on the other side of said second flexible dielectric membrane from said ground plane and having a terminal portion passing through said second flexible dielectric membrane, said ground plane and said first flexible dielectric membrane, the terminal portion being adapted to engage said electrical component.
Claim 24
Dependent Claim
148 words
A contactor for an electrical component comprising: a. a first flexible dielectric membrane, b. a resilient, electrically conductive ground plane on one side of said dielectric membrane, c. a plurality of electrically conductive lines on the other side of said dielectric membrane and adapted to contact said electrical component, d. fluid pressure-applying means operatively engaging said flexible dielectric membrane from the ground plane side to urge said electrically conductive lines into contacting engagement with said electrical component, e. a second flexible dielectric membrane on the other side of said ground plane from said first flexible dielectric membrane, and f. an electrically conductive line on the other side of said second flexible dielectric membrane from said ground plane and having a terminal portion passing through said second flexible dielectric membrane, said ground plane and said first flexible dielectric membrane, the terminal portion being adapted to engage said electrical component.
Claim 25
Dependent Claim
21 words
A contactor for a semiconductor chip having a plurality of contact pads comprising: a. a pressure chamber having a cover comprising:
Claim 26
Dependent Claim
21 words
A contactor for a semiconductor chip having a plurality of contact pads comprising: a. a pressure chamber having a cover comprising:
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-07-26 | 1975-01-25 | 1975-07-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-07-26 | 1979-01-25 | 1979-07-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-07-26 | 1983-01-25 | 1983-07-27 | $7700.00 | Window Closed / Lapsed |