US3569756A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion source having a plasma and gridlike electrode
Assignee: US Philips Corp
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Filing: 1967-06-28
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Granted: 1971-03-09
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Expires: 1987-06-28
Abstract
Abstract An ion source employing a plasma and a gridlike electrode forming part of the wall of a space in which ions are produced, the ions being accelerated by an accelerating electrode having an aperture the diameter of which is at least equal to half the diameter of the gridlike electrode and the resistance thereof to gas flow is so low that the pressure on each side is equal and so low that the ion flow is saturated. The gridlike electrode has an aperture of at least 1 mm. in diameter through which electrons accelerated against the ion flow may be collected in the plasma space.
Inventors
- 👤 Otto Reifenschweiler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 10:25
CPC Classifications
H; H05; H05H; H05H3/00; H05H3/06; H01; H01J; H01J27/00; H01J27/02; H01J27/16; H01J49/00; H01J49/02; H01J49/10; H01J49/105
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
154 words
An ion source comprising a vessel housing an ionizable medium in one portion thereof and having a wall constituted by a gridlike electrode communicating with a second portion of said vessel and constituting a plasma boundary when said ionizable medium is converted to a plasma by a high-Frequency discharge, an extraction electrode within said latter portion for accelerating ions produced therein, said extraction electrode having an aperture the diameter of which is at least equal to half the diameter of the gridlike electrode and the resistance to gas flow is so low that the pressure on each side thereof is equal and so that the ion flow is saturated with an accelerating potential applied to said extraction electrode of at least 20 kilovolts, said gridlike electrode having a central aperture at least 1 mm in diameter whereby electrons accelerated counter to the ion flow may be collected in the other portion of the vessel.
Claim 2
Dependent Claim
154 words
An ion source comprising a vessel housing an ionizable medium in one portion thereof and having a wall constituted by a gridlike electrode communicating with a second portion of said vessel and constituting a plasma boundary when said ionizable medium is converted to a plasma by a high-Frequency discharge, an extraction electrode within said latter portion for accelerating ions produced therein, said extraction electrode having an aperture the diameter of which is at least equal to half the diameter of the gridlike electrode and the resistance to gas flow is so low that the pressure on each side thereof is equal and so that the ion flow is saturated with an accelerating potential applied to said extraction electrode of at least 20 kilovolts, said gridlike electrode having a central aperture at least 1 mm in diameter whereby electrons accelerated counter to the ion flow may be collected in the other portion of the vessel.
Claim 3
Dependent Claim
22 words
An ion source as claimed in claim 1 in which the gridlike electrode is a woven grid having a large central hole.
Claim 4
Dependent Claim
36 words
An ion source as claimed in claim 1 in which the gridlike electrode is a cap in the form of a spherical segment having a central aperture and at least one ring of apertures surrounding it.
Claim 5
Dependent Claim
25 words
An ion source as claimed in claim 1 in which the extraction electrode houses a braking electrode for the electrons produced within the ion-collector electrode.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-03-08 | 1974-09-07 | 1975-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-03-08 | 1978-09-07 | 1979-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-03-08 | 1982-09-07 | 1983-03-09 | $7700.00 | Window Closed / Lapsed |