US3568124A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Piezoresistive force- and pressure-measuring element
Assignee: Kistler Instrumente AG
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Filing: 1968-05-31
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Granted: 1971-03-02
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Expires: 1988-05-31
Abstract
Abstract A piezoresistive element for pressure- and force-measurements in which a silicon disc or the like, provided with resistive paths diffused in the same is supported on a metallic support ring, and in which an insulator ring is mounted on the support ring; the insulator ring is provided with contact lands or the like from an intermediate stage and thin wire connections between the same and the contact lands in the resistive paths.
Inventors
- 👤 Hans Conrad Sonderegger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:41
CPC Classifications
G; G01; G01L; G01L19/00; G01L19/14; G01L19/148; G01L19/0061; G01L19/0084; G01L19/142; G01L19/143; G01L19/147; G01L9/00; G01L9/0041; G01L9/0051; G01L9/0052; G01L9/0054
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
93 words
A piezoresistive element for pressure and force measurements, which includes a support ring, a silicon disc supported on said support ring, and said silicon disc being provided with resistive paths diffused into the disc, wherein the improvement comprises insulator ring means mounted on said support ring and having metallized contact land means on the exposed end face thereof disposed in a plane transverse to the axis of said insulator ring means, and connecting means including thin wire connections for connecting the metallized contact land means with the resistive paths on the silicon disc.
Claim 2
Dependent Claim
93 words
A piezoresistive element for pressure and force measurements, which includes a support ring, a silicon disc supported on said support ring, and said silicon disc being provided with resistive paths diffused into the disc, wherein the improvement comprises insulator ring means mounted on said support ring and having metallized contact land means on the exposed end face thereof disposed in a plane transverse to the axis of said insulator ring means, and connecting means including thin wire connections for connecting the metallized contact land means with the resistive paths on the silicon disc.
Claim 3
Dependent Claim
48 words
A piezoresistive element according to claim 1, further comprising an additional insulator sleeve having metallized lands, said lands being adapted to be connected to connecting wires by simple soldering, and said lands being connected to the land means by contact pressure along the faces of the piezoresistive element.
Claim 4
Dependent Claim
67 words
A piezoresistive element for pressure and force measurements, comprising a silicon disc attached to a metallic holding ring, at least one resistive path diffused on a silicon disc, and an insulator ring made of ceramic insulator material having contact lands on a face thereof disposed in a plane transverse to the axis of the insulator ring and the contact lands being connected with the metallic holding ring.
Claim 5
Dependent Claim
67 words
A piezoresistive element for pressure and force measurements, comprising a silicon disc attached to a metallic holding ring, at least one resistive path diffused on a silicon disc, and an insulator ring made of ceramic insulator material having contact lands on a face thereof disposed in a plane transverse to the axis of the insulator ring and the contact lands being connected with the metallic holding ring.
Claim 6
Dependent Claim
25 words
A piezoresistive element according to claim 3, wherein said insulator ring is connected to said metallic holding ring by means of a hard soldering connection.
Claim 7
Dependent Claim
25 words
A piezoresistive element according to claim 3, wherein said insulator ring is connected to said metallic holding ring by means of a thermocompression bonding joint.
Claim 8
Dependent Claim
24 words
A piezoresistive element according to claim 3, wherein an additional insulator sleeve having conductive lands is connected to said contact lands by contact pressure.
Claim 9
Dependent Claim
80 words
A piezoresistive element for pressure and force measurements which includes a semiconductor element provided with at least one resistive path diffused into the same and a support element for supporting the semiconductor element, wherein the improvement comprises insulator means on said support element, contact means located on an exposed end face of said insulator means disposed in a plane transverse to the axis of said insulator ring, and thin-wire connecting means operatively connecting the resistive path with said contact means.
Claim 10
Dependent Claim
80 words
A piezoresistive element for pressure and force measurements which includes a semiconductor element provided with at least one resistive path diffused into the same and a support element for supporting the semiconductor element, wherein the improvement comprises insulator means on said support element, contact means located on an exposed end face of said insulator means disposed in a plane transverse to the axis of said insulator ring, and thin-wire connecting means operatively connecting the resistive path with said contact means.
Claim 11
Dependent Claim
28 words
A piezoresistive element according to claim 7, wherein said support element is a conductive element and said insulator means is a ceramic element secured on said conductive element.
Claim 12
Dependent Claim
25 words
A piezoresistive element according to claim 8, wherein said ceramic element is secured to the metallic conductive element by means of a hard soldering connection.
Claim 13
Dependent Claim
25 words
A piezoresistive element according to claim 8, wherein said ceramic element is secured to the metallic conductive element by means of a thermocompression bonding connection.
Claim 14
Dependent Claim
39 words
A piezoresistive element according to claim 7, further comprising an additional insulator element provided with contact means in pressure contact with said first-mentioned contact means, and leadout wire means connected to the contact means on said additional insulator element.
Claim 15
Dependent Claim
26 words
A piezoresistive element according to claim 7, further comprising cover means fastened to said support element, and leadout wire means electrically connected with said contact means.
Claim 16
Dependent Claim
18 words
A piezoresistive element according to claim 12, wherein said leadout wire means extend laterally out of said element.
Claim 17
Dependent Claim
19 words
A piezoresistive element according to claim 12, wherein said leadout wire means extend substantially axially out of said element.
Claim 18
Dependent Claim
24 words
A piezoresistive element according to claim 7, wherein several resistive paths are diffused into the semiconductor element within the areas of maximum strain thereof.
Claim 19
Dependent Claim
24 words
A piezoresistive element according to claim 15, wherein additional resistive paths are provided on the semiconductor element within the areas of minimal strain thereof.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-03-01 | 1974-08-31 | 1975-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-03-01 | 1978-08-31 | 1979-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-03-01 | 1982-08-31 | 1983-03-02 | $7700.00 | Window Closed / Lapsed |